US2022082733A1PendingUtilityA1

Semiconductor lens optimization of fabrication

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Assignee: LUMENTUM OPERATIONS LLCPriority: Apr 19, 2016Filed: Nov 22, 2021Published: Mar 17, 2022
Est. expiryApr 19, 2036(~9.8 yrs left)· nominal 20-yr term from priority
G02B 7/02G02B 7/005G02B 3/0056G02B 3/0043G02B 3/0037G02B 3/0025G02B 3/0018G02B 3/0012H01S 5/423G02B 27/62H01J 2237/334B01J 8/00H01J 2237/10G02B 1/14H01S 5/005H01J 37/32009B01J 2208/00008
68
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Claims

Abstract

Embodiments comprise a system created through fabricating a lens array through which lasers are emitted. The lens array may be fabricated in the semiconductor substrate used for fabricating the lasers or may be a separate substrate of other transparent material that would be aligned to the lasers. In some embodiments, more lenses may be produced than will eventually be used by the lasers. The inner portion of the substrate may be formed with the lenses that will be used for emitting lasers, and the outer portion of the substrate may be formed with lenses that will not be used for emitting lasers—rather, through etching these additional lenses, the inner lenses may be created with a higher quality.

Claims

exact text as granted — not AI-modified
1 - 12 . (canceled) 
     
     
         13 . A lens array, comprising:
 a plurality of lenses; and   a plurality of lasers,   wherein the lens array comprises an inner portion with a first set of lenses and an outer portion with a second set of lenses, the second set of lenses is positioned adjacent to and surrounds the first set of lenses, and the first set of lenses is surrounded by lenses of either the first set of lenses or the second set of lenses,   wherein each laser among the plurality of lasers is aligned or misaligned with a respective lens in the first set of lenses, such that respective beams of the plurality of lasers are incident on respective lenses in the first set of lenses, and   wherein no lasers are physically aligned or misaligned with any of the lenses in the second set of lenses.   
     
     
         14 . The lens array of  claim 13 , wherein the lens array is circular in configuration. 
     
     
         15 . The lens array of  claim 13 , wherein the plurality of lasers are positioned on an opposite side of a substrate from the lens array. 
     
     
         16 . The lens array of  claim 15 , wherein the substrate is deposited with a thick material, the thick material having a thickness that serves as a protective height barrier and prevent scratches. 
     
     
         17 . The lens array of  claim 13 , wherein a first laser, of the plurality of lasers, is aligned to a center of a first lens from the first set of lenses, and a second laser, of the plurality of lasers, is aligned to be off-center of a second lens from the first set of lenses. 
     
     
         18 . The lens array of  claim 13 , wherein each lens of the first set of lenses comprises a substantially similar Radius of Curvatures (ROCs). 
     
     
         19 . The lens array of  claim 18 , wherein each lens in the second set of lenses has a second ROC that is different from the first ROCs. 
     
     
         20 . The lens array of  claim 13 , wherein each lens of the first set of lenses is configured to be a length of at least two lenses from a border of a substrate of the lens array. 
     
     
         21 . The lens array of  claim 13 , wherein a distance from a center of any lens among the first set of lenses or the second set of lenses and the center of any adjacent lens is the same. 
     
     
         22 . The lens array of  claim 13 , wherein a first lens in the first set of lenses comprises a smaller pitch than a second lens in the first set of lenses. 
     
     
         23 . A lens array, comprising:
 a plurality of lenses;   wherein the lens array comprises an inner portion with a first set of lenses and an outer portion with a second set of lenses, the second set of lenses is positioned adjacent to and surrounds the first set of lenses, and the first set of lenses is surrounded by lenses of either the first set of lenses or the second set of lenses,   wherein each of the first set of lenses is configured to align or misalign with a respective vertical cavity surface emitting laser (VCSEL) of a plurality of VCSELs, such that respective beams of the plurality of VCSELs are to be incident on respective lenses in the first set of lenses, and   wherein the second set of lenses comprises non-functional lenses to which no lasers are to be physically aligned or misaligned.   
     
     
         24 . The lens array of  claim 23 , wherein the lens array is circular in configuration. 
     
     
         25 . The lens array of  claim 23 , wherein the lens array is configured to be positioned on an opposite side of a substrate from the plurality of VCSELs. 
     
     
         26 . The lens array of  claim 23 , further comprising a substrate having a thick material, the thick material having a thickness that serves as a protective height barrier and prevent scratches. 
     
     
         27 . The lens array of  claim 23 , wherein a center of a first lens, of the first set of lenses, is configured to align with a first VCSEL of the plurality of VCSELs, and a second lens, of the first set of lenses, is configured to have an off-center alignment with a second VCSEL of the plurality of VCSELs. 
     
     
         28 . The lens array of  claim 23 , wherein each lens of the first set of lenses comprises a substantially similar Radius of Curvatures (ROCs). 
     
     
         29 . The lens array of  claim 28 , wherein each lens in the second set of lenses has a second ROC that is different from the first ROCs. 
     
     
         30 . The lens array of  claim 23 , wherein each lens of the first set of lenses is configured to be a length of at least two lenses from a border of a substrate of the lens array. 
     
     
         31 . The lens array of  claim 23 , wherein a distance from a center of any lens among the first set of lenses or the second set of lenses and the center of any adjacent lens is the same. 
     
     
         32 . The lens array of  claim 23 , wherein a first lens in the first set of lenses comprises a smaller pitch than a second lens in the first set of lenses.

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