Serial airlock architecture

Abstract

A method for isolating a first region maintained at a first environment and a second region maintained at a second environment, wherein the first and second environments are different from each other. The method includes forming an airlock between the first region and the second region, in which the airlock includes a plurality of chambers, which are separated by gate valves, successively arranged along a guide path between the first region and the second region. The method also includes maintaining environments in the plurality of chambers so that an environment in one chamber is different from an environment in an adjacent chamber.

What is claimed: 
     
         1 . A method for isolating a first region maintained at a first environment and a second region maintained at a second environment, wherein the first and second environments are different from each other, comprising:
 forming an airlock between the first region and the second region, wherein the airlock comprises a plurality of chambers, which are separated by gate valves, successively arranged along a guide path between the first region and the second region; and   maintaining chamber environments in the plurality of chambers so that one chamber environment in one chamber is different from an adjacent chamber environment in an adjacent chamber.   
     
     
         2 . The method according to  claim 1 , wherein the first region and the second region are separated by a passage in which the airlock is arranged, and
 wherein first region is maintained at a pressure higher than that of the second region, and the plurality of chambers are pressurized at predetermined pressures that progressively decrease from a first chamber adjacent the first region to a last chamber adjacent the second region.   
     
     
         3 . The method according to  claim 2 , wherein the first region is maintained at ambient pressure of about 100 kPa and the second region is maintained at a pressure of about 100 Pa. 
     
     
         4 . The method according to  claim 2 , wherein the progressive decrease in the pressure between the first region and the second region comprises a pressure difference between adjacent chambers of about 1 kPa-25 kPa. 
     
     
         5 . The method according to  claim 1 , further comprising sequentially opening the gate valves from the first chamber to the last chamber to allow an object to continuously move through the airlock. 
     
     
         6 . The method according to  claim 1 , further comprising isolating the second region from a third region maintained at a third environment, which is different from the second environment by:
 forming a second airlock between the second region and the third region, wherein the second airlock comprises a plurality of second chambers, which are separated by second gate valves, successively arranged along a guide path from the second region to the third region; and   maintaining second chamber environments in the plurality of second chambers so that at one second chamber environment in one of the second chambers is different from an adjacent second chamber environment in an adjacent second chamber.   
     
     
         7 . The method according to  claim 6 , wherein the second region and the third region are separated by a second passage in which the second airlock is arranged, and
 wherein the second region is maintained at a pressure lower than that of the third region, and the plurality of second chambers are pressurized at predetermined pressures that progressively increase from a first second chamber adjacent the second region to a last second chamber adjacent the third region.   
     
     
         8 . The method according to  claim 6 , further comprising sequentially opening the second gate valves from a first second chamber to a last second chamber to allow an object to continuously move through the second airlock. 
     
     
         9 . The method according to  claim 6 , wherein the first region and the second region are separated by a first passage in which the airlock is arranged, and
 wherein the first region is maintained at a pressure higher than that of the second region, and the plurality of chambers are pressurized at predetermined pressures that progressively decrease from a first chamber adjacent the first region to a last chamber adjacent the second region.   
     
     
         10 . The method according to  claim 9 , further comprising:
 sequentially opening the gate valves from the first chamber to the last chamber to allow an object to continuously move through the airlock; and   sequentially opening the second gate valves from the first second chamber to the last second chamber to allow an object to continuously move through the second airlock.   
     
     
         11 . The method according to  claim 10 , wherein the first region and the third region are maintained at ambient pressures of about 100 kPa and the second region is maintained at a pressure of about 100 Pa. 
     
     
         12 . The method according to  claim 11 , wherein a pressure difference between the first region and the first chamber of the airlock is about 0.1 kPa and a pressure difference between the last second chamber of the second airlock and the third region is about 0.1 kPa. 
     
     
         13 . The method according to  claim 12 , wherein the progressive decrease in the pressure in the airlock between the first region and the second region comprises a pressure difference of about 1 kPa between adjacent chambers; and
 wherein the progressive increase in the pressure in the second airlock between the second region and the third region comprises a pressure difference of about 1 kPa between adjacent second chambers.   
     
     
         14 . The method according to  claim 12 , wherein the progressive decrease in the pressure in the airlock between the first region and the second region comprises a pressure difference of about 2.5 kPa between adjacent chambers; and
 wherein the progressive increase in the pressure in the second airlock between the second region and the third region comprises a pressure difference of about 2.5 kPa between adjacent second chambers.   
     
     
         15 . The method according to  claim 12 , wherein the progressive decrease in the pressure in the airlock between the first region and the second region comprises a pressure difference of about 10 kPa between adjacent chambers; and
 wherein the progressive increase in the pressure in the second airlock between the second region and the third region comprises a pressure difference of about 10 kPa between adjacent second chambers.   
     
     
         16 . The method according to  claim 12 , wherein the progressive decrease in the pressure in the airlock between the first region and the second region comprises a pressure difference of about 25 kPa between adjacent chambers; and
 wherein the progressive increase in the pressure in the second airlock between the second region and the third region comprises a pressure difference of about 25 kPa between adjacent second chambers.   
     
     
         17 . The method according to  claim 1 , wherein at least one of the gate valves comprises an airbag mechanism that includes a bag and a blower, and the method further comprises inflating the bag to close the gate valve. 
     
     
         18 . The method according to  claim 1 , wherein at least one of the gate valves comprises a shutter mechanism having a plurality of overlapping blades, and the method further includes opening the shutter mechanism as an object passing through the passage approaches the shutter mechanism and closing the shutter mechanism after the object has passed through the shutter mechanism. 
     
     
         19 . The method according to  claim 1 , further comprising monitoring a pressure in front of an object passing through the passage, and triggering an opening of a next gate valve as the object approaches the next gate valve. 
     
     
         20 . The method according to  claim 19 , wherein the opening of the next gate valve is triggered by a detected increase in pressure between the object and next gate valve in a closed position.