Manufacturing method of aluminum nitride

Abstract

The present disclosure provides a manufacturing method of aluminum nitride, including: providing an electrolyte including choline chloride, urea, aluminum chloride, boric acid, and ascorbic acid; disposing a workpiece, wherein at least a part of the workpiece is in contact with the electroplating solution; heating the electrolyte to within 60° C.-95° C.; applying an operating current to electroplate aluminum onto the workpiece; and annealing the aluminum on the workpiece to form aluminum nitride.

What is claimed is: 
     
         1 . A manufacturing method of aluminum nitride, comprising:
 providing an electrolyte comprising choline chloride, urea, aluminum chloride, boric acid, and ascorbic acid;   disposing a workpiece, wherein at least a part of the workpiece is in contact with the electrolyte;   heating the electrolyte to within 60° C. to 95° C.;   applying an operating current to electroplate aluminum onto the workpiece; and   annealing the aluminum on the workpiece to form aluminum nitride.   
     
     
         2 . The manufacturing method of aluminum nitride of  claim 1 , wherein in the step of annealing the workpiece, 10 sccm to 30 sccm of nitrogen gas is introduced to anneal the workpiece in a nitrogen environment. 
     
     
         3 . The manufacturing method of aluminum nitride of  claim 1 , wherein an annealing temperature is within 250° C. to 450° C. 
     
     
         4 . The manufacturing method of aluminum nitride of  claim 1 , wherein a current density of the operating current is within 1 mA/cm 2  to 10 mA/cm 2 . 
     
     
         5 . The manufacturing method of aluminum nitride of  claim 1 , wherein a molar ratio of choline chloride to urea in the electrolyte is 1:2. 
     
     
         6 . The manufacturing method of aluminum nitride of  claim 1 , wherein a molar concentration of aluminum chloride in the electrolyte is from 0.005 M to 1 M. 
     
     
         7 . The manufacturing method of aluminum nitride of  claim 1 , wherein a molar concentration of boric acid in the electrolyte is from 0.7 M to 2 M. 
     
     
         8 . The manufacturing method of aluminum nitride of  claim 1 , wherein a molar concentration of ascorbic acid in the electrolyte is from 0.025 M to 0.15 M. 
     
     
         9 . The manufacturing method of aluminum nitride of  claim 1 , wherein the electrolyte further comprises saccharin, and a molar concentration of saccharin is from 0.03 M to 0.2 M. 
     
     
         10 . The manufacturing method of aluminum nitride of  claim 1 , wherein the electrolyte further comprises graphene or graphene oxide, and molar concentrations of graphene and graphene oxide both are from 0.005 M to 0.05 M.