Systems and methods for designing mems scanning mirrors involving finite element analysis model

Abstract

Embodiments of the disclosure provide a design method for a LiDAR scanning mirror. The design method may include determining, by at least one processor, design parameters of the LiDAR scanning mirror and computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the design parameters. The method may further include when the mirror performance indexes meet a predetermined target performance, providing the design parameters determined by the at least one processor for making the LiDAR scanning mirror.

1 . A method for designing a LiDAR scanning mirror, comprising:
 determining, by at least one processor, design parameters of the LiDAR scanning mirror;   computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the design parameters; and   when the mirror performance indexes meet a predetermined target performance, providing the design parameters determined by the at least one processor for making the LiDAR scanning mirror.   
     
     
         2 . The method of  claim 1 , wherein computing the mirror performance indexes further comprises:
 computing a plurality of partial derivatives of the mirror performance indexes with respect to the design parameters using the FEA model.   
     
     
         3 . The method of  claim 1 , further comprising:
 when the mirror performance indexes do not meet the predetermined target performance, tuning the design parameters; and   recomputing the mirror performance indexes for the tuned design parameters by applying the FEA model.   
     
     
         4 . The method of  claim 3 , wherein tuning the design parameters comprises:
 applying a step size variation to a present value of each design parameter.   
     
     
         5 . The method of  claim 4 , wherein recomputing the mirror performance indexes further comprises:
 updating the mirror performance indexes by adding a weighted sum of the step size variations of the design parameters, wherein each step size variation is weighted by a partial derivative with respect to the corresponding design parameter, wherein the partial derivative is calculated using the FEA model.   
     
     
         6 . The method of  claim 3 , wherein the mirror performance indexes are updated by tuning one design parameter at a time with the rest design parameters remaining at the respective present value, and applying the FEA model to calculate updated mirror performance indexes with the one design parameter tuned. 
     
     
         7 . The method of  claim 1 , wherein the LiDAR scanning mirror comprises at least one MEMS mirror and at least one spring coupling the MEMS mirror to an anchor. 
     
     
         8 . The method of  claim 7 , wherein the mirror performance indexes comprise at least one of a rotational moment of inertia of the MEMS mirror, a natural frequency of the MEMS mirror, a mirror bow, a maximum stress of the MEMS mirror, or a mechanical nonlinearity of the spring. 
     
     
         9 . The method of  claim 7 , wherein the design parameters comprise at least one of a thickness of the MEMS mirror, a dimension of the MEMS mirror, or a dimension of the spring. 
     
     
         10 . A method for making a LiDAR scanning mirror, comprising:
 determining, by at least one processor, design parameters of the LiDAR scanning mirror, wherein the design parameters yield one or more mirror performance indexes that meet a predetermined target performance, wherein the mirror performance indexes are computed by applying a Finite Element Analysis (FEA) model to the design parameters; and   making the LiDAR scanning mirror based on the design parameters determined by the at least one processor.   
     
     
         11 . The method of  claim 10 , wherein the mirror performance indexes are computed by computing a plurality of partial derivatives of the mirror performance indexes with respect to the design parameters using the FEA model. 
     
     
         12 . The method of  claim 10 , wherein determining the design parameters of the LiDAR scanning mirror further comprises:
 tuning the design parameters until the mirror performance indexes computed by applying the FEA model to the design parameters meet a predetermined target performance.   
     
     
         13 . The method of  claim 12 , wherein tuning the design parameters comprises:
 applying a step size variation to a present value of one design parameter.   
     
     
         14 . The method of  claim 13 , further comprising:
 recomputing the mirror performance indexes by applying the FEA model to the design parameters with the one design parameter tuned; and   determining partial derivatives of the mirror performance indexes with respect to the one design parameter tuned.   
     
     
         15 . The method of  claim 10 , wherein making the LiDAR scanning mirror comprises:
 making at least one MEMS mirror according to the design parameters comprising a thickness of the MEMS mirror and a dimension of the MEMS mirror.   
     
     
         16 . The method of  claim 15 , wherein making the LiDAR scanning mirror further comprises:
 making at least one spring coupling the MEMS mirror to an anchor according to the design parameters comprising a dimension of the spring.   
     
     
         17 . The method of  claim 16 , wherein the mirror performance indexes comprise at least one of a rotational moment of inertia of the MEMS mirror, a natural frequency of the MEMS mirror, a mirror bow, a maximum stress of the MEMS mirror, or a mechanical nonlinearity of the spring. 
     
     
         18 . A LiDAR scanning mirror, comprising:
 at least one MEMS mirror; and   at least one spring coupling the MEMS mirror to an anchor,   wherein the MEMS mirror and the spring are made according to design parameters yielding one or more mirror performance indexes that meet a predetermined target performance, wherein the mirror performance indexes are computed by applying a Finite Element Analysis (FEA) model to the design parameters.   
     
     
         19 . The LiDAR scanning mirror of  claim 18 , wherein the mirror performance indexes comprise at least one of a rotational moment of inertia of the MEMS mirror, a natural frequency of the MEMS mirror, a mirror bow, a maximum stress of the MEMS mirror, or a mechanical nonlinearity of the spring. 
     
     
         20 . The LiDAR scanning mirror of  claim 18 , wherein the design parameters comprise at least one of a thickness of the MEMS mirror, a dimension of the MEMS mirror, or a dimension of the spring.