Electrode layer partitioning

Abstract

A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.

1 .- 19 . (canceled) 
     
     
         20 . A system for performing capacitive sensing, the system comprising:
 a substrate located in a first plane;   an electrode shield located on the first plane, wherein the electrode shield is formed of a first conductive material; and   a plurality of sense electrodes disposed on the substrate in the first plane, wherein each of the plurality of sense electrodes is located adjacent to at least a portion of the electrode shield in the first plane, wherein each of the sense electrodes comprises a folded strip electrode, and wherein the length of the folded strip electrode is longer than the length of the perimeter of the sense electrode.   
     
     
         21 . The system of  claim 20 , wherein the electrode shield comprises a plurality of slots that substantially extend between two non-adjacent sides of the electrode shield. 
     
     
         22 . (canceled) 
     
     
         23 . The system of  claim 21 , wherein the plurality of slots substantially extends between two parallel sides of the sense electrode. 
     
     
         24 . The system of  claim 23 , wherein the two parallel sides comprise two long sides of the sense electrode. 
     
     
         25 . The system of  claim 23 , wherein the two parallel sides comprise two short sides of the sense electrode. 
     
     
         26 . The system of  claim 21 , wherein the plurality of slots comprises a comb pattern. 
     
     
         27 . The system of  claim 21 , wherein the plurality of slots comprises a partial hexagonal pattern. 
     
     
         28 . The system of  claim 21 , wherein the plurality of slots comprises multiple angled slots. 
     
     
         29 . The system of  claim 28 , wherein three of the angled slots intersect at 120-degree angles. 
     
     
         30 . The system of  claim 20 , wherein a plurality of slots formed by the folded strip electrode comprises at least 8% of the surface area of the sense electrode. 
     
     
         31 . The system of  claim 30 , wherein the plurality of slots comprises less than 20% of the surface area of the sense electrode. 
     
     
         32 . The system of  claim 20 , wherein a plurality of slots is formed by the folded strip electrode, and wherein at least a portion of each of the plurality of slots is located parallel to another of the plurality of slots. 
     
     
         33 . The system of  claim 20 , further comprising a movable component of a MEMS device layer, wherein the MEMS device layer is coupled to the substrate, and wherein the movable component moves along a first axis in response to an external force. 
     
     
         34 . The system of  claim 33 , wherein the first axis is perpendicular to the first plane. 
     
     
         35 . The system of  claim 20 , further comprising a center point located in the first plane between at least two of the plurality of sense electrodes, wherein the electrode shield and the plurality of sense electrodes are symmetrical about a line that passes through the center point in the first plane. 
     
     
         36 . The system of  claim 20 , further comprising a processing unit coupled to the plurality of sense electrodes to determine a value of an external force based on a combined measurement of a first capacitive sensing element and a second capacitive sensing element. 
     
     
         37 . The system of  claim 20 , wherein the folded strip electrode substantially forms a square wave pattern, a spiral pattern, a T-slot pattern, a Y-slot pattern, or a recessed slot pattern.