US2022145894A1PendingUtilityA1

Vacuum pump and vacuum pump constituent component

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Assignee: EDWARDS JAPAN LTDPriority: Mar 26, 2019Filed: Mar 13, 2020Published: May 12, 2022
Est. expiryMar 26, 2039(~12.7 yrs left)· nominal 20-yr term from priority
Inventors:Nahoko YoshiharaYoshiyuki SakaguchiYasushi TatenoYohei Ogawa
F04D 19/042F04D 29/584F04D 19/04F04D 29/52F04D 29/58F04D 29/5853
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Claims

Abstract

The present disclosure provides a vacuum pump of which a thermal resistance between a heater and a water-cooling tube is high and which has a small number of components. The vacuum pump includes: a main body casing having an intake portion and an exhaust portion of gas; a turbo-molecular pump mechanism portion in which stator blades and rotor blades are formed; and a motor for rotating the rotor blades, wherein the main body casing has a base spacer capable of thermal conduction between a heating spacer portion and a water-cooling spacer portion having been integrally molded, and the base spacer is provided with a boundary portion having been molded such that a cross section thereof assumes a narrow neck shape between the heating spacer portion and the water-cooling spacer portion.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A vacuum pump, comprising:
 a pump mechanism portion in which a stator blade and a rotor blade are formed;   a casing which encloses the pump mechanism portion;   a motor for rotating the rotor blade; and   a vacuum pump constituent component which is capable of thermal conduction between a heating portion and a cooling portion having been integrally molded, wherein   the vacuum pump constituent component is provided with a boundary portion formed so that a cross section thereof assumes a narrow neck shape between the heating portion and the cooling portion.   
     
     
         2 . The vacuum pump according to  claim 1 , wherein the boundary portion is formed between a notched portion on an outer side and a tapered portion on an inner side of the vacuum pump constituent component. 
     
     
         3 . A vacuum pump constituent component which is capable of thermal conduction between a heating portion and a cooling portion having been integrally molded and which is provided with a boundary portion having been molded so that a cross section thereof assumes a narrow neck shape between the heating portion and the cooling portion. 
     
     
         4 . The vacuum pump constituent component according to  claim 3 , wherein the boundary portion is formed between a notched portion on an outer side and a tapered portion on an inner side.

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