Cryopump system and monitoring method thereof

Abstract

A cryopump system mounted on a vacuum process device, the cryopump system including at least one cryopump, a cryopump controller that controls the cryopump, a network that connects the cryopump to the cryopump controller and transmits information related to the cryopump between the cryopump and the cryopump controller, and a cryopump monitor that is connected to the network and displays the information related to the cryopump, which is transmitted via the network, in which the cryopump controller is disposed in a casing of the vacuum process device, and the cryopump monitor is disposed outside the casing of the vacuum process device.

What is claimed is: 
     
         1 . A cryopump system mounted on a vacuum process device, the cryopump system comprising:
 at least one cryopump;   a cryopump controller that controls the cryopump;   a network that connects the cryopump to the cryopump controller and transmits information related to the cryopump between the cryopump and the cryopump controller; and   a cryopump monitor that is connected to the network and displays the information related to the cryopump, which is transmitted via the network,   wherein the cryopump controller is disposed in a casing of the vacuum process device, and the cryopump monitor is disposed outside the casing of the vacuum process device.   
     
     
         2 . The cryopump system according to  claim 1 ,
 wherein the cryopump controller is connectable to a host controller provided in the vacuum process device, and   the cryopump monitor is connected to the network without going through the host controller.   
     
     
         3 . The cryopump system according to  claim 1 , further comprising:
 at least one compressor that is disposed outside the casing of the vacuum process device and is connected to the network,   wherein the cryopump monitor is provided in the compressor.   
     
     
         4 . The cryopump system according to  claim 3 ,
 wherein the cryopump monitor displays information related to the compressor, which is transmitted via the network.   
     
     
         5 . The cryopump system according to  claim 1 ,
 wherein the cryopump monitor includes an operation panel that is used for operating the cryopump system.   
     
     
         6 . A method of monitoring a cryopump system mounted on a vacuum process device,
 wherein the cryopump system includes at least one cryopump, a cryopump controller that is disposed in a casing of the vacuum process device and controls the cryopump, and a network that connects the cryopump to the cryopump controller and transmits information related to the cryopump between the cryopump and the cryopump controller,   the method comprising:   connecting a cryopump monitor to the network and disposing the cryopump monitor outside the casing of the vacuum process device; and   displaying the information related to the cryopump, which is transmitted via the network, on the cryopump monitor.