Transfer system and a fixture thereof adaptable to performing levelling alignment

Abstract

A transfer system adaptable to performing levelling alignment includes a transfer head that picks up micro devices, the transfer head having a plurality of pick-up heads protruded from a bottom surface of the transfer head; and a levelling fixture configured to perform levelling alignment for the transfer head, the levelling fixture having a plurality of cavities that are concave downwards to correspondingly accommodate the pick-up heads respectively.

What is claimed is: 
     
         1 . A transfer system adaptable to performing levelling alignment, the system comprising:
 a transfer head that picks up micro devices, the transfer head having a plurality of pick-up heads protruded from a bottom surface of the transfer head; and   a levelling fixture configured to perform levelling alignment for the transfer head, the levelling fixture having a plurality of cavities that are concave downwards to correspondingly accommodate the pick-up heads respectively.   
     
     
         2 . The system of  claim 1 , wherein the micro devices have a size less than 100 micrometers. 
     
     
         3 . The system of  claim 1 , wherein the transfer head adopts vacuum force, electromagnetic force, Van der Waals force or viscous force to pick up the micro devices. 
     
     
         4 . The system of  claim 1 , further comprising:
 an adapter disposed above the transfer head to hold the transfer head.   
     
     
         5 . The system of  claim 1 , wherein the levelling fixture is made of a rigid material. 
     
     
         6 . The system of  claim 1 , wherein the cavities of the levelling fixture are made by etching or laser drilling. 
     
     
         7 . The system of  claim 1 , wherein a depth of the cavities is greater than a height of the pick-up heads. 
     
     
         8 . The system of  claim 1 , wherein a pitch of the cavities is larger than a width of the cavities, which is greater than a width of the pick-up heads. 
     
     
         9 . The system of  claim 8 , wherein a ratio of the width of the cavities to the width of the pick-up heads is greater than 1 and is less than or equal to 1.5. 
     
     
         10 . The system of  claim 8 , wherein a ratio of the width of the cavities to the width of the pick-up heads is greater than 1.5. 
     
     
         11 . The system of  claim 1 , wherein the plurality of cavities are interconnected to result in a single cavity to accommodate all the pick-up heads of the transfer head. 
     
     
         12 . A fixture adaptable to performing levelling alignment, the fixture comprising:
 a levelling fixture configured to perform levelling alignment for a transfer head, the levelling fixture having a plurality of cavities that are concave downwards to correspondingly accommodate a plurality of pick-up heads of the transfer head respectively.   
     
     
         13 . The fixture of  claim 12 , wherein the levelling fixture is made of a rigid material. 
     
     
         14 . The fixture of  claim 12 , wherein the cavities of the levelling fixture are made by etching or laser drilling. 
     
     
         15 . The fixture of  claim 12 , wherein a depth of the cavities is greater than a height of the pick-up heads. 
     
     
         16 . The fixture of  claim 12 , wherein a pitch of the cavities is larger than a width of the cavities, which is greater than a width of the pick-up heads. 
     
     
         17 . The fixture of  claim 16 , wherein a ratio of the width of the cavities to the width of the pick-up heads is greater than 1 and is less than or equal to 1.5. 
     
     
         18 . The fixture of  claim 16 , wherein a ratio of the width of the cavities to the width of the pick-up heads is greater than 1.5. 
     
     
         19 . The fixture of  claim 12 , wherein the plurality of cavities are interconnected to result in a single cavity to accommodate all the pick-up heads of the transfer head.