AlN MONOCRYSTAL PLATE

Abstract

An AlN monocrystal plate disclosed herein may include: a first surface in a thickness direction; and a second surface opposing the first surface. A metal component containing region may be disposed substantially parallel to the first surface in an intermediate portion between the first surface and the second surface. In the metal component containing region, a plurality of metal components may be introduced and distributed. A type of the metal components may be Ga.

1 . An AlN monocrystal plate comprising:
 a first surface in a thickness direction; and   a second surface opposing the first surface,   wherein   a metal component containing region is disposed substantially parallel to the first surface in an intermediate portion between the first surface and the second surface, wherein in the metal component containing region, a plurality of metal components is introduced and distributed, and   a type of the plurality of metal components is Ga.   
     
     
         2 . The AlN monocrystal plate according to  claim 1 , wherein
 a thickness of the metal component containing region is 0.1 μm or more and 5.0 μm or less.   
     
     
         3 . The AlN monocrystal plate according to  claim 1 , wherein
 in the metal component containing region, a distance between the metal components adjacent to each other is 1 μm or more and 300 μm or less.   
     
     
         4 . The AlN monocrystal plate according to  claim 1 , wherein
 each of the plurality of metal components has an aspect ratio of 1 or more and 10 or less, and is disposed such that its long side extends along the first surface.   
     
     
         5 . The AlN monocrystal plate according to  claim 2 , wherein
 in the metal component containing region, a distance between the metal components adjacent to each other is 1 μm or more and 300 μm or less.   
     
     
         6 . The AlN monocrystal plate according to  claim 2 , wherein
 each of the plurality of metal components has an aspect ratio of 1 or more and 10 or less, and is disposed such that its long side extends along the first surface.   
     
     
         7 . The AlN monocrystal plate according to  claim 3 , wherein
 each of the plurality of metal components has an aspect ratio of 1 or more and 10 or less, and is disposed such that its long side extends along the first surface.   
     
     
         8 . The AlN monocrystal plate according to  claim 5 , wherein
 each of the plurality of metal components has an aspect ratio of 1 or more and 10 or less, and is disposed such that its long side extends along the first surface.