US2022410146A1PendingUtilityA1

Flow cells

Assignee: ILLUMINA INCPriority: Jan 29, 2019Filed: Aug 29, 2022Published: Dec 29, 2022
Est. expiryJan 29, 2039(~12.5 yrs left)· nominal 20-yr term from priority
B01L 2300/0893B01L 2300/161C08L 37/00B01L 2200/0663C12Q 1/6869B01L 2300/165C08K 5/5406B01L 3/5085B01L 3/502707B01L 3/5088B01L 3/5027B01L 2300/0819B01L 2300/0896C12N 15/1065B01L 2200/12
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Claims

Abstract

An example of a flow cell includes a substrate, which includes nano-depressions defined in a surface of the substrate, and interstitial regions separating the nano-depressions. A hydrophobic material layer has a surface that is at least substantially co-planar with the interstitial regions and is positioned to define a hydrophobic barrier around respective sub-sets of the nano-depressions.

Claims

exact text as granted — not AI-modified
1 .- 29 . (canceled) 
     
     
         30 . A method, comprising:
 laminating a hydrophobic material film having a thickness less than about 2 μm to a patterned substrate, including:
 nano-depressions defined in a surface of the patterned substrate; 
 interstitial regions separating the nano-depressions; and 
 a gel material in the nano-depressions; and 
   exposing the dry hydrophobic material film to photolithography to form a hydrophobic barrier around respective sub-sets of the nano-depressions and the interstitial regions.   
     
     
         31 . The method as defined in  claim 30 , wherein the hydrophobic material film is selected from the group consisting of a fluorinated polymer, a perfluorinated polymer, a silicon polymer, a silane, and a mixture thereof. 
     
     
         32 . The method as defined in  claim 30 , wherein prior to laminating the hydrophobic material film, the method further comprises forming the patterned substrate by:
 patterning a non-patterned support to form the nano-depressions; and   attaching the gel material to the nano-depressions by:
 silanizing the nano-depressions and the interstitial regions; 
 depositing the gel material on the nano-depressions and the interstitial regions; and 
 removing the gel material from the interstitial regions. 
   
     
     
         33 . A method, comprising:
 printing a hydrophobic material to a patterned substrate, including:
 nano-depressions defined in a surface of the patterned substrate; 
 interstitial regions separating the nano-depressions; and 
 a gel material in the nano-depressions; 
   
       wherein the hydrophobic material is printed to form a hydrophobic barrier around respective sub-sets of the nano-depressions and the interstitial regions and to have a thickness less than about 2 μm. 
     
     
         34 . The method as defined in  claim 33 , wherein the hydrophobic material is selected from the group consisting of a fluorinated polymer, a perfluorinated polymer, a silicon polymer, a silane, and a mixture thereof. 
     
     
         35 . The method as defined in  claim 33 , wherein prior to printing the hydrophobic material, the method further comprises forming the patterned substrate by:
 patterning a non-patterned support to form the nano-depressions; and   attaching the gel material to the nano-depressions by:
 silanizing the nano-depressions and the interstitial regions; 
 depositing the gel material on the nano-depressions and the interstitial regions; and 
 removing the gel material from the interstitial regions. 
   
     
     
         36 . The method as defined in  claim 33 , wherein the printing involves aerosol printing. 
     
     
         37 . A method, comprising:
 laser cutting and weeding a multi-layer precursor including:
 two sacrificial layers; and 
 a hydrophobic material layer having a thickness less than about 2 μm positioned between the two sacrificial layers; 
   
       thereby removing a first of the two sacrificial layers and defining a pattern of a hydrophobic barrier in the hydrophobic material layer that is positioned on a second of the two sacrificial layers;
 laminating the patterned hydrophobic material to a patterned substrate, including:
 nano-depressions defined in a surface of the patterned substrate; 
 interstitial regions separating the nano-depressions; and 
 a gel material in the nano-depressions. 
 
 
     
     
         38 . The method as defined in  claim 37 , further comprising removing the second of the two sacrificial layers. 
     
     
         39 . The method as defined in  claim 37 , wherein the hydrophobic material is selected from the group consisting of a fluorinated polymer, a perfluorinated polymer, a silicon polymer, a silane, and a mixture thereof. 
     
     
         40 . The method as defined in  claim 37 , wherein prior to printing the hydrophobic material, the method further comprises forming the patterned substrate by:
 patterning a non-patterned support to form the nano-depressions; and   attaching the gel material to the nano-depressions by:
 silanizing the nano-depressions and the interstitial regions; 
 depositing the gel material on the nano-depressions and the interstitial regions; and 
 removing the gel material from the interstitial regions. 
   
     
     
         41 . A method, comprising:
 coating a stamp with a hydrophobic material, the stamp defining a pattern of a hydrophobic barrier; and   transferring the hydrophobic material in the pattern of the hydrophobic barrier to a patterned substrate, including:
 nano-depressions defined in a surface of the patterned substrate; 
 interstitial regions separating the nano-depressions; and 
 a gel material in the nano-depressions; 
   
       thereby forming the hydrophobic barrier around respective sub-sets of the nano-depressions and the interstitial regions, the hydrophobic barrier having a thickness less than about 2 μm. 
     
     
         42 . The method as defined in  claim 41 , wherein the hydrophobic material is selected from the group consisting of a fluorinated polymer, a perfluorinated polymer, a silicon polymer, a silane, and a mixture thereof. 
     
     
         43 . The method as defined in  claim 41 , wherein prior to transferring the hydrophobic material, the method further comprises forming the patterned substrate by:
 patterning a non-patterned support to form the nano-depressions; and   attaching the gel material to the nano-depressions by:
 silanizing the nano-depressions and the interstitial regions; 
 depositing the gel material on the nano-depressions and the interstitial regions; and 
 removing the gel material from the interstitial regions. 
   
     
     
         44 . The method as defined in  claim 41 , further comprising forming the stamp from a master template. 
     
     
         45 . A flow cell, comprising:
 a substrate;   nano-pads of a gel material positioned on the substrate; and   a hydrophobic material layer i) having a surface that is at least substantially co-planar with a surface of the nano-pads and ii) positioned to define a hydrophobic barrier around respective sub-sets of the nano-pads.   
     
     
         46 . The flow cell as defined in  claim 45 , wherein:
 each of the nano-pads has a thickness less than about 2 μm; and   the hydrophobic material layer has a thickness less than about 2 μm.   
     
     
         47 . The flow cell as defined in  claim 45 , further comprising a plurality of primers attached to each of the nano-pads. 
     
     
         48 . A method, comprising:
 forming discrete subsets of nano-pads on a substrate, each of the nano-pads having a thickness less than about 2 μm; and   selectively applying a hydrophobic material on the substrate around each of the discrete subsets, thereby forming a hydrophobic barrier i) around each of the discrete subsets, ii) having a surface that is at least substantially co-planar with a surface of the nano-pads, and iii) having a thickness less than about 2 μm.   
     
     
         49 . The method as defined in  claim 48 , wherein the selectively applying of the hydrophobic material involves transferring the hydrophobic material in a pattern of the hydrophobic barrier to the substrate. 
     
     
         50 . The method as defined in  claim 48 , wherein the selectively applying of the hydrophobic material involves printing the hydrophobic material in a pattern of the hydrophobic barrier to the substrate. 
     
     
         51 . The method as defined in  claim 48 , wherein the selectively applying of the hydrophobic material involves:
 applying a mask material on the discrete subsets of nano-pads, thereby defining a pattern for the hydrophobic barrier;   applying the hydrophobic material according to the pattern, thereby forming the hydrophobic barrier; and   removing the mask material   
     
     
         52 . The method as defined in  claim 48 , wherein the forming of the discrete subsets of nano-pads involves:
 applying a gel material on a surface of the substrate;   disposing a mask material on the gel material;   forming spaces in the mask material and the gel material; and   removing the mask material.

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