Fluid-filled pressure sensor assembly capable of higher pressure environments

Abstract

This disclosure provides systems and methods for a fluid-filled pressure sensor assembly for higher pressure environments. A fluid-filled pressure sensor assembly may be adapted for coupling to a structure at a mating surface and may include a header; a pressure sensor coupled to the header; a diaphragm coupled to the header and configured for positioning forward of the mating surface so that a fluid region is disposed between the diaphragm and the pressure sensor; a fill hole coupled to the fluid region; a sealing element coupled to the fill hole and configured for positioning forward of the mating surface; and wherein during operation the first pressure applied at the diaphragm is substantially transferred by the fluid in the fluid region and the fill hole to an inner-side of the sealing element and the first pressure is about equivalent to a second pressure applied at an outer-side of the sealing element.

What is claimed is: 
     
         1 . A fluid-filled pressure sensor and engine assembly, comprising:
 an engine having a pressure media disposed within an engine port; and   a fluid-filled pressure sensor coupled to the engine port, the fluid-filled pressure sensor comprising:
 a header; 
 a pressure sensor chip coupled to the header; 
 a diaphragm coupled to the header and configured to receive a pressure from the pressure media; 
 a sealing element disposed at least partially in a fill hole and coupled to the header, the sealing element being configured to receive the pressure from the pressure media on an outer-side of the sealing element; and 
 a fluid disposed in a fluid region of the header and in fluid communication with the pressure sensor chip, the diaphragm, and the sealing element, 
 wherein, when the pressure is applied at the diaphragm, the pressure is transferred by the fluid to the pressure sensor chip for measurement thereof and to an inner-side of the sealing element such that the pressure is applied to both the outer-side and the inner-side of the sealing element. 
   
     
     
         2 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the fill hole is disposed in and defined by the header. 
     
     
         3 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the header comprises a pressure-media-facing side and a housing-facing side, the pressure-media facing side configured to face the pressure media disposed within the engine port. 
     
     
         4 . The fluid-filled pressure sensor and engine assembly of  claim 3  further comprising a housing coupled to the housing-facing side of the header and configured for coupling the fluid-filled pressure sensor to the engine port. 
     
     
         5 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the pressure sensor chip comprises a substantially flat first side substantially parallel and opposite to a substantially flat second side, a majority of the first side of the pressure sensor chip being disposed on and coupled to the header. 
     
     
         6 . The fluid-filled pressure sensor and engine assembly of  claim 5 , wherein the pressure is transferred by the fluid to the second side of the pressure sensor chip. 
     
     
         7 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the diaphragm is welded to the header. 
     
     
         8 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the sealing element seals the fluid in the fluid region of the fluid-filled pressure sensor. 
     
     
         9 . The fluid-filled pressure sensor and engine assembly of  claim 8 , wherein the sealing element is welded to the header. 
     
     
         10 . The fluid-filled pressure sensor and engine assembly of  claim 1 , wherein the diaphragm and the sealing element are substantially coplanar. 
     
     
         11 . A fluid-filled pressure sensor and engine assembly made by a process comprising:
 coupling a pressure sensor chip to a header;   coupling a diaphragm to the header, the diaphragm being configured to receive a pressure from a pressure media disposed within an engine port, a fluid region being disposed between the pressure sensor chip and the diaphragm;   filling the fluid region with a fluid via a fill hole formed in the header;   sealing the fill hole with a sealing element, the sealing element being configured to receive the pressure from the pressure media on an outer-side of the sealing element; and   coupling the header to the engine port of an engine,   wherein the pressure applied by the pressure media to the diaphragm is transferred by the fluid in the fluid region to an inner-side of the sealing element such that the pressure is applied to both the outer-side and the inner-side of the sealing element.   
     
     
         12 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the fill hole is disposed in and defined by the header. 
     
     
         13 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the header comprises a pressure-media-facing side and a housing-facing side, the pressure-media facing side configured to face the pressure media disposed within the engine port. 
     
     
         14 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 13  further comprising a housing coupled to the housing-facing side of the header and configured for coupling the fluid-filled pressure sensor to the engine port. 
     
     
         15 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the pressure sensor chip comprises a substantially flat first side substantially parallel and opposite to a substantially flat second side, a majority of the first side of the pressure sensor chip being disposed on and coupled to the header. 
     
     
         16 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 15 , wherein the pressure is transferred by the fluid to the second side of the pressure sensor chip. 
     
     
         17 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the diaphragm is welded to the header. 
     
     
         18 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the sealing element seals the fluid in the fluid region of the fluid-filled pressure sensor. 
     
     
         19 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 18 , wherein the sealing element is welded to the header. 
     
     
         20 . The fluid-filled pressure sensor and engine assembly made by the process of  claim 11 , wherein the diaphragm and the sealing element are substantially coplanar.