Mechanical Resonant Pump

Abstract

Provided herein is a mechanical resonant system, comprising a frame; at least one pump disposed on the frame; one or two masses coupled to the frame by a first plurality of resilient members; and at least one voice coil actuator disposed within the frame and coupled to the at least one pump or to the one or two masses; wherein when the system comprises two masses, a second plurality of resilient members couple the masses to each other. Also provided are methods for using these mechanical resonant systems to evacuate a chamber, to compress air, or sense changes in pressure.

1 - 13 . (canceled) 
     
     
         14 . A method for evacuating a chamber, comprising operating a mechanical resonant system in fluid communication with the chamber, the system comprising:
 a frame comprising a plurality of plates and a plurality of standoffs;   at least one pair of pumps disposed on opposite sides of the frame, each of the at least one pair of pumps comprising a pump head, a piston, and a barrel, wherein each piston is disposed within each barrel and beneath each pump head;   two masses operatively coupled to the frame by a first plurality of resilient members;   a second plurality of resilient members coupling the two masses to each other; and   at least one voice coil actuator disposed between and coupled to each of the at least one pair of pumps, the at least one voice coil actuator comprising a bobbin, a magnet, and a magnet housing;   wherein the piston of one pump of the at least one pair of pumps is coupled to the bobbin, and the piston of another pump of the at least one pair of pumps is coupled to the magnet housing.   
     
     
         15 . The method of  claim 14 , wherein the system comprises one pair of pumps disposed on opposite sides of the frame, wherein one pump pulls and the other pump pushes. 
     
     
         16 . The method of  claim 14 , wherein during operation the system has a resonance frequency, and when the system is in resonance, the input force is in phase with of the velocity of each of the two masses. 
     
     
         17 . A method for compressing air, comprising operating a mechanical resonant system comprising:
 a frame comprising a plurality of plates and a plurality of standoffs;   at least one pair of pumps disposed on opposite sides of the frame, each of the at least one pair of pumps comprising a pump head, a piston, and a barrel, wherein each piston is disposed within each barrel and beneath each pump head;   two masses operatively coupled to the frame by a first plurality of resilient members;   a second plurality of resilient members coupling the two masses to each other; and   at least one voice coil actuator disposed between and coupled to each of the at least one pair of pumps, the at least one voice coil actuator comprising a bobbin, a magnet, and a magnet housing;   wherein the piston of one pump of the at least one pair of pumps is coupled to the bobbin, and the piston of another pump of the at least one pair of pumps is coupled to the magnet housing.   
     
     
         18 . The method of  claim 17 , wherein during operation the system has a resonance frequency, and when the system is in resonance, the input force is in phase with of the velocity of each of the two masses. 
     
     
         19 . The method of  claim 14 , wherein the system comprises two pairs of pumps disposed on opposite sides of the frame. 
     
     
         20 . The method of  claim 14 , wherein the two masses comprise a mass assembly comprising a mass plate, a plurality of spacers, and at least one ring. 
     
     
         21 . The method of  claim 14 , wherein the first plurality of resilient members comprises springs. 
     
     
         22 . The method of  claim 14 , wherein system further comprises one or more selected from the group consisting of a signal generator, oscilloscope, signal conditioner, amplifier, current probe, voltage probe, and accelerometer. 
     
     
         23 . The method of  claim 14 , wherein system further comprises a third plurality of resilient members disposed between the frame and ground, whereby the frame functions as a third mass in the system. 
     
     
         24 . The method of  claim 17 , wherein the system comprises two pairs of pumps disposed on opposite sides of the frame. 
     
     
         25 . The method of  claim 17 , wherein the two masses comprise a mass assembly comprising a mass plate, a plurality of spacers, and at least one ring. 
     
     
         26 . The method of  claim 17 , wherein the first plurality of resilient members comprises springs. 
     
     
         27 . The method of  claim 17 , wherein system further comprises one or more selected from the group consisting of a signal generator, oscilloscope, signal conditioner, amplifier, current probe, voltage probe, and accelerometer. 
     
     
         28 . The method of  claim 17 , wherein system further comprises a third plurality of resilient members disposed between the frame and ground, whereby the frame functions as a third mass in the system.