US2023088084A1PendingUtilityA1
Method of preparing graphyne
Assignee: RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIVPriority: Jul 21, 2021Filed: Jul 20, 2022Published: Mar 23, 2023
Est. expiryJul 21, 2041(~14.9 yrs left)· nominal 20-yr term from priority
H10P 14/24H10P 14/22H10P 14/3438H10P 14/2923H10D 30/6741H10D 62/83H10D 62/882C01B 32/05H01L 29/16H10D 30/481H10D 62/881H10P 14/3406
49
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Claims
Abstract
Disclosed is a method for preparing a graphyne including: supplying a precursor represented by the following Chemical Formula 1 to a chamber including a first zone and a second zone; vaporizing or subliming the precursor in the first zone; and depositing the precursor vaporized or sublimed in the second zone on a metal substrate to form the graphyne:(in Chemical Formula 1, X is carbon or nitrogen, and R1 to R3 may be selected from the group consisting of hydrogen, bromine, fluorine, chlorine, and iodine, respectively).
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method for preparing a graphyne comprising:
supplying a precursor represented by the following Chemical Formula 1 to a chamber comprising a first zone and a second zone; vaporizing or subliming the precursor in the first zone; and depositing the precursor vaporized or sublimed in the second zone on a metal substrate to form the graphyne:
(in Chemical Formula 1, X is carbon or nitrogen, and R 1 to R 3 are selected from the group consisting of hydrogen, bromine, fluorine, chlorine, and iodine, respectively).
2 . The method of claim 1 , wherein the precursor is selected from the group consisting of tribromo triethynylbenzene, triethynylbenzene, triethynyl triazine, trichloro triethynylbenzene, trifluoro triethynylbenzene, and combinations thereof.
3 . The method of claim 2 , wherein a ratio between a number of double bonds and a number of triple bonds in the precursor is 0.5:1 to 2:1.
4 . The method of claim 1 , wherein the forming of the graphyne comprises:
binding the precursor and the metal substrate; performing a surface-coupling reaction between the precursors; and separating atoms of the substrate bound to the precursor from the substrate.
5 . The method of claim 1 , wherein the precursor is supplied to the first zone or the second zone by an inert gas.
6 . The method of claim 1 , wherein the vaporizing or subliming the precursor in the first zone and the depositing the precursor in the second zone are performed sequentially or simultaneously.
7 . The method of claim 1 , wherein the metal substrate comprises at least one selected from the group consisting of Cu, Fe, Ni, Pd, Ru, Ir, Ti, Pt, Au, Ag, and combinations thereof.
8 . The method of claim 1 , wherein the graphyne is substituted or doped by at least one selected from the group consisting of H, N, O, F, Cl, Br, S, and combinations thereof.
9 . The method of claim 1 , wherein a reaction temperature in the first zone is lower than a reaction temperature in the second zone.
10 . The method of claim 9 , wherein the reaction temperature in the first zone is 30° C. to 50° C., and of the reaction temperature in the second zone is above 50° C. to 80° C.
11 . A graphyne prepared by the method of claim 1 .
12 . The graphyne of claim 11 , wherein a ratio of a number of double bonds:a number of triple bonds in the graphyne is 0.25:1 to 4:1.
13 . The graphyne of claim 11 , wherein the graphyne comprises a single-layered structure or a multi-layered staking structure.
14 . The graphyne of claim 13 , wherein in the multi-layered stacking structure, graphynes of the single-layered structure are alternately stacked, or graphyne of an upper layer and graphyne of a lower layer are stacked to cross each other.
15 . A transistor comprising:
a substrate; a source electrode disposed on the substrate; a drain electrode disposed on the substrate and spaced apart from the source electrode; and a channel layer disposed between the source electrode and the drain electrode and comprising the graphyne of claim 11 .
16 . The transistor of claim 15 , wherein holes on the graphyne electrically connects the source electrode and the drain electrode.Join the waitlist — get patent alerts
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