Method of fabricating metal thin film supported by glass support

Abstract

A method of fabricating a metal thin film-on-glass structure. A glass substrate, on a top surface of which a layer is formed, is prepared. A local area of the glass substrate is etched from a bottom of the glass substrate to expose the layer downwardly, thereby forming an exposed area of the layer. The layer is a metal thin film. The etching includes first-etching the glass substrate to a depth less than a thickness of the glass substrate using a first etching solution containing hydrofluoric acid and at least one of nitric acid and sulfuric acid, resulting in a first-etched portion of the glass substrate; and second-etching the first-etched portion of the glass substrate using an etching solution containing hydrofluoric acid without nitric acid or sulfuric acid, so that the layer is exposed downwardly, whereby the metal thin film is supported by a remaining portion of the glass substrate.

What is claimed is: 
     
         1 . The metal thin film-on-glass structure comprising:
 a layer comprising a metal thin film;   a glass support, in which a local hole is foiled, provided on a bottom surface of the layer such that the layer is supported by the glass support and the local hole exposes the layer downwardly,   wherein the thickness of the metal thin film ranges from 1 micrometer to 5 micrometers.   
     
     
         2 . The metal thin film-on-glass structure of  claim 1 , wherein the metal thin film comprises at least one selected from the group consisting of a Cr monolayer, a Cr—Hf alloy monolayer, a Cr—Ag multilayer, and a Cr—Ti—Cu multilayer. 
     
     
         3 . The metal thin film-on-glass structure of  claim 1 , wherein the glass support comprises soda-lime glass. 
     
     
         4 . The metal thin film-on-glass structure of  claim 1 , wherein the glass support comprises non-alkali glass. 
     
     
         5 . The metal thin film-on-glass structure of  claim 1 , wherein the glass support comprises glass which can be toughened by ion exchange. 
     
     
         6 . The metal thin film-on-glass structure of  claim 1 , wherein the layer further comprises a barrier layer disposed between the metal thin film and the glass substrate. 
     
     
         7 . The metal thin film-on-glass structure of  claim 6 , wherein the barrier layer contains chromium with or without hafnium. 
     
     
         8 . The metal thin film-on-glass structure of  claim 6 , wherein the barrier layer is formed by i) laminating a SiC- or Teflon-based anti-acid film, ii) applying an anti-acid solution, or iii) deposition. 
     
     
         9 . The metal thin film-on-glass structure of  claim 6 , wherein the barrier layer has a thickness ranging from 0.001 μm to 5 μm. 
     
     
         10 . The metal thin film-on-glass structure of  claim 1 , wherein the metal thin film is a patterned metal thin film. 
     
     
         11 . The metal thin film-on-glass structure comprising:
 a layer comprising a metal thin film;   a glass support, in which a local hole is formed, provided on a bottom surface of the layer such that the layer is supported by the glass support and the local hole exposes the layer downwardly.   
     
     
         12 . The metal thin film-on-glass structure of  claim 11 , wherein the layer further comprises a barrier layer disposed between the metal thin film and the glass substrate. 
     
     
         13 . The metal thin film-on-glass structure of  claim 11 , wherein the metal thin film comprises at least one selected from the group consisting of a Cr monolayer, a Cr—Hf alloy monolayer, a Cr—Ag multilayer, and a Cr—Ti—Cu multilayer.