Vacuum system apparatus and method

Abstract

Aspects of the present invention relate to a vacuum system. The vacuum system includes a vacuum pump; and a heat exchanger for receiving a heat transfer fluid. The heat transfer fluid comprising a gas. The heat exchanger is thermally coupled to the vacuum pump and is operable to absorb thermal energy from the vacuum pump. Aspects of the present invention also relate to a method of operating a vacuum system; and a controller for controlling operation of a vacuum system.

1 . A vacuum system comprising:
 a vacuum pump; and   a heat exchanger for receiving a heat transfer fluid, the heat transfer fluid comprising a gas;   wherein the heat exchanger is thermally coupled to the vacuum pump and is operable to absorb thermal energy from the vacuum pump.   
     
     
         2 . The vacuum system as claimed in  claim 1  comprising at least one port for introducing the heat transfer fluid from the heat exchanger into the vacuum pump and/or into an exhaust of the vacuum pump. 
     
     
         3 . The vacuum system as claimed in  claim 2  comprising a gas heater for heating the heat transfer fluid, the gas heater being disposed between the heat exchanger and the port. 
     
     
         4 . The vacuum system as claimed in  claim 1  comprising a control valve for controlling the supply of the heat transfer fluid to the heat exchanger. 
     
     
         5 . The vacuum system as claimed in  claim 4 , wherein the control valve is operable selectively to bypass the heat exchanger. 
     
     
         6 . The vacuum system as claimed in  claim 4  comprising a valve controller for controlling operation of the control valve, the valve controller comprising at least one electronic processor having at least one input for receiving a signal indicating an operating state of the vacuum pump. 
     
     
         7 . The vacuum system as claimed in  claim 6 , wherein the valve controller is configured selectively to actuate the control valve to decrease the supply of the heat transfer fluid to the heat exchanger to reduce the absorption of thermal energy from the vacuum pump. 
     
     
         8 . The vacuum system as claimed in  claim 6 , wherein the valve controller is configured selectively to actuate the control valve to decrease the supply of the heat transfer fluid to the heat exchanger in dependence on the signal indicating that the vacuum pump is operating in a low load condition. 
     
     
         9 . The vacuum system as claimed in  claim 6 , wherein the valve controller is configured selectively to actuate the control valve to increase the supply of the heat transfer fluid to the heat exchanger so as to increase the absorption of thermal energy from the vacuum pump. 
     
     
         10 . The vacuum system as claimed in  claim 6 , wherein the valve controller is configured selectively to actuate the control valve to increase the supply of the heat transfer fluid to the heat exchanger in dependence on the signal indicating that the vacuum pump is operating in a high load condition. 
     
     
         11 . The vacuum system as claimed in  claim 1  comprising a cooling block thermally coupled to the heat exchanger and operable selectively to absorb thermal energy from the heat exchanger; the cooling block being configured to receive a coolant wherein the coolant comprises a liquid. 
     
     
         12 . The vacuum system as claimed in  claim 11 , wherein the cooling block has an inlet and an outlet for conveyance of the coolant. 
     
     
         13 . The vacuum system as claimed in  claim 11  comprising a cooling block controller for controlling a supply of the coolant to the cooling block, the cooling block controller being configured to supply coolant in dependence on a determination that the temperature of the heat exchanger is greater than or equal to a predefined temperature threshold. 
     
     
         14 . The vacuum system as claimed in  claim 11 , wherein the heat exchanger and the cooling block are operable independently of each other. 
     
     
         15 . A method of operating a vacuum system, the vacuum system comprising a vacuum pump and a heat exchanger for absorbing thermal energy from the vacuum pump, the heat exchanger being configured to receive a heat transfer fluid;
 wherein the heat transfer fluid comprises a purge gas and the method comprises selectively supplying the heat transfer fluid from the heat exchanger to the vacuum pump or into an exhaust of the vacuum pump.   
     
     
         16 . The method as claimed in  claim 15  comprising controlling the supply of the heat transfer fluid to the heat exchanger in dependence on one or more operating parameters of the vacuum pump. 
     
     
         17 . The method as claimed in  claim 16  comprising supplying the heat transfer fluid to the heat exchanger in dependence on a determination that the vacuum pump has an operating temperature greater than or equal to a predetermined threshold. 
     
     
         18 . The method as claimed in  claim 15  comprising actuating a control valve to control the supply of the heat transfer fluid to the heat exchanger. 
     
     
         19 . The method as claimed in  claim 18  comprising selectively actuating the control valve to bypass the supply of the heat transfer fluid to the heat exchanger. 
     
     
         20 . A controller for controlling operation of a vacuum system, the controller comprising at least one electronic processor and a memory, wherein a set of instructions is stored in the memory; and, when executed, the instructions cause the controller to implement the method claimed in  claim 15 .