Method of manufacturing an aluminium alloy plate for vacuum chamber elements

Abstract

Described herein is a method of manufacturing an aluminium alloy plate for vacuum chamber elements, valves, or total assemblies, the method comprising the steps of: (a) providing a rolling feedstock material of an Al—Mg—Si aluminium alloy having a composition comprising of, in wt. %, Mg 0.80%-1.05%, Si 0.70%-1.0%, Mn 0.70%-0.90%, Fe up to 0.20%, Zn up to 0.08%, Cu up to 0.05%, Cr up to 0.03%, Ti up to 0.06%, unavoidable impurities and balance aluminium; (b) homogenizing of the rolling feedstock at a temperature in a range of 550-595° C.; (c) hot-rolling of the homogenized rolling feedstock in one or more rolling steps to a hot-rolled plate having a thickness of at least 10 mm; (d) solution heat-treatment (SHT″) of the hot rolled plate at a temperature in a range of 540-590° C.; (e) rapid cooling the SHT plate; (f) stretching of the cooled SHT plate to obtain a permanent elongation from 1-5%; (g) artificial ageing of the stretched plate.

1 . A method of manufacturing an aluminium alloy plate for vacuum chamber elements, valves, or total assemblies, the method comprising the steps of:
 (a) providing a rolling feedstock material of an Al—Mg—Si aluminium alloy having a composition comprising of, in wt. %,   
       
         
           
                 
                 
                 
               
                     
                     
                 
                     
                   Mg 
                   0.80% to 1.05%, 
                 
                     
                   Si 
                   0.70% to 1.0%, 
                 
                     
                   Mn 
                   0.70% to 0.90%, 
                 
                     
                   Fe 
                   up to 0.20%, 
                 
                     
                   Zn 
                   up to 0.08%, 
                 
                     
                   Cu 
                   up to 0.05%, 
                 
                     
                   Cr 
                   up to 0.03%, 
                 
                     
                   Ti 
                   up to 0.06%, 
                 
                     
                     
                 
             
                
               
               
                
                
                
                
                
                
                
                
                
               
            
           
         
         
           unavoidable impurities each <0.03%, total <0.10%, balance aluminium; 
         
         (b) homogenizing of the rolling feedstock at a temperature in a range of 550° C. to 595° C.; 
         (c) hot-rolling of the homogenized rolling feedstock in one or more rolling steps to a hot-rolled plate having a thickness of at least 10 mm; 
         (d) solution heat-treatment (“SHT”) of the hot rolled plate at a temperature in a range of 540° C. to 590° C.; 
         (e) rapid cooling the SHT plate; 
         (f) stretching of the cooled SHT plate to obtain a permanent elongation from 1% to 5%; and 
         (g) artificial ageing of the stretched plate. 
       
     
     
         2 . The method according to  claim 1 , wherein the hot rolling of the homogenized rolling feedstock is to a plate having a thickness in the range of 10 mm to 230 mm. 
     
     
         3 . The method according to  claim 1 , wherein the Mg-content is in a range of 0.85% to 1.05%. 
     
     
         4 . The method according to  claim 1 , wherein the Si-content is in a range of 0.70% to 0.95%. 
     
     
         5 . The method according to  claim 1 , wherein the ratio (in wt. %) Mg/Si is more than 0.9. 
     
     
         6 . The method according to  claim 1 , wherein the Mn-content is in a range of 0.75% to 0.85%. 
     
     
         7 . The method according to  claim 1 , wherein the Fe-content is up to 0.12%. 
     
     
         8 . The method according to  claim 1 , wherein the Ti-content is in a range of 0.01% to 0.06%. 
     
     
         9 . The method according to  claim 1 , wherein homogenizing of the rolling feedstock is at a temperature in a range of 555° C. to 595° C. 
     
     
         10 . The method according to  claim 1 , wherein the solution heat-treatment of the hot rolled plate is at a temperature in a range of 545° C. to 580° C. 
     
     
         11 . The method according to  claim 1 , wherein the artificial ageing is performed at a temperature in the range of 150° C. to 190° C. 
     
     
         12 . The method of  claim 11 , wherein the artificial ageing is performed for a time of 5 to 60 hours. 
     
     
         13 . The method according to  claim 1 , wherein the rapid cooling is performed by one of spray quenching or immersion quenching in water or other quenching media. 
     
     
         14 . The method according to  claim 1 , wherein the artificial ageing is performed to achieve a T6 temper. 
     
     
         15 . The method according to  claim 1 , further comprising the steps of:
 (h) machining said aged plate into a vacuum chamber element, a valve, or a total assembly; and   (i) surface treating of the vacuum chamber element, the valve, or the total assembly.   
     
     
         16 . The method of  claim 15 , wherein the surface treating is performed by anodization. 
     
     
         17 . The method of  claim 1 , wherein the aluminum alloy plate has a density of phases and particles having a size greater than 10 μm 2  of less than 400 phases per mm 2 . 
     
     
         18 . A method of manufacturing an aluminium alloy plate for vacuum chamber elements, valves, or total assemblies, the method comprising the steps of:
 (a) providing a rolling feedstock material of an Al—Mg—Si aluminium alloy having a composition comprising of, in wt. %,   
       
         
           
                 
                 
                 
               
                     
                     
                 
                     
                   Mg 
                   0.70% to 1.05%; 
                 
                     
                   Si 
                   0.70% to 1.0%; 
                 
                     
                   Mn 
                   0.60% to 1.0%; 
                 
                     
                   Fe 
                   up to 0.20%; 
                 
                     
                   Zn 
                   up to 0.2%; 
                 
                     
                   Cu 
                   up to 0.10%; 
                 
                     
                   Cr 
                   up to 0.05%; 
                 
                     
                   Ti 
                   up to 0.1%; 
                 
                     
                   Ni 
                   up to 0.06%; 
                 
                     
                     
                 
             
                
               
               
                
                
                
                
                
                
                
                
                
                
               
            
           
         
         
           unavoidable impurities each <0.05%, total <0.15%, balance aluminium; 
         
         (b) homogenizing of the rolling feedstock at a temperature in a range of 550° C. to 595° C.; 
         (c) hot-rolling of the homogenized rolling feedstock in one or more rolling steps to a hot-rolled plate having a thickness of at least 10 mm; 
         (d) solution heat-treatment (“SHT”) of the hot rolled plate at a temperature in a range of 540° C. to 590° C.; 
         (e) rapid cooling the SHT plate; 
         (f) stretching of the cooled SHT plate to obtain a permanent elongation from 1% to 5%; and 
         (g) artificial ageing of the stretched plate. 
       
     
     
         19 . The method according to  claim 18 , wherein the rapid cooling is performed by one of spray quenching or immersion quenching in water or other quenching media. 
     
     
         20 . The method according to  claim 18 , wherein the artificial ageing is performed at a temperature in the range of 150° C. to 190° C. and for a time of 5 to 60 hours. 
     
     
         21 . (canceled)