Plasma reaction apparatus

Abstract

Provided is a plasma reaction apparatus capable of preventing edge cracks of a magnetic core by dividing the core, the plasma reaction apparatus including a reactor body having a gas inlet at a side thereof, a plasma outlet at another side thereof, and an annular loop space therein, and a magnetic core provided in a shape surrounding at least a part of the reactor body, and having a primary coil to generate plasma by exciting a gas in the annular loop space, wherein the magnetic core includes a middle core layer, an upper core layer mounted on the middle core layer, and a lower core layer mounted under the middle core layer, wherein the upper core layer is divided into a first core layer and a second core layer to prevent edge cracks of the upper core layer by reducing an upper thermal deviation, and wherein the lower core layer is divided into a third core layer and a fourth core layer to prevent edge cracks of the lower core layer by reducing a lower thermal deviation.

1 . A plasma reaction apparatus comprising:
 a reactor body having an annular loop space therein; and   a magnetic core having a primary coil to generate plasma in the annular loop space,   wherein a range in which a unit core constituting the magnetic core surrounds the reactor body is 3.5% to 4.5% of a plasma discharge channel.   
     
     
         2 . The plasma reaction apparatus of  claim 1 , wherein the reactor body has a gas inlet at a side thereof and a plasma outlet at another side thereof, and has a symmetric structure in which a gas injected through the gas inlet is split into at least two channels. 
     
     
         3 . The plasma reaction apparatus of  claim 2 , wherein the magnetic core comprises unit cores symmetrically mounted one-to-one on left and right sides of the symmetric structure. 
     
     
         4 . The plasma reaction apparatus of  claim 3 , wherein the reactor body is divided into a first region where the magnetic core is mounted, and a second region where the magnetic core is not mounted, and
 wherein, when the first region occupies 35% to 45%, the second region occupies 55% to 65%.   
     
     
         5 . The plasma reaction apparatus of  claim 4 , wherein a volume of a portion of the reactor body corresponding to the first region is 40 ml to 42 ml. 
     
     
         6 . The plasma reaction apparatus of  claim 5 , wherein unit cores mounted in the first region are provided in five layers. 
     
     
         7 . The plasma reaction apparatus of  claim 6 , wherein a cooling plate and a thermal pad are provided between adjacent unit cores. 
     
     
         8 . The plasma reaction apparatus of  claim 6 , wherein the reactor body has a form of a toroidal bezel made of a conductive material, and comprises at least one insulating section. 
     
     
         9 . The plasma reaction apparatus of  claim 8 , wherein, when a plurality of insulating sections are present, the reactor body is divided into an upper block, a lower block, and an I-shaped block. 
     
     
         10 . The plasma reaction apparatus of  claim 9 , wherein the magnetic core is mounted on the I-shaped block. 
     
     
         11 . The plasma reaction apparatus of  claim 10 , wherein an inner diameter of the insulating section is in a range of 125% to 135% of an inner diameter of the I-shaped block. 
     
     
         12 . The plasma reaction apparatus of  claim 11 , wherein the insulating section comprises inclined surfaces having a curvature and facing each other. 
     
     
         13 . A plasma reaction apparatus comprising:
 a reactor body having a gas inlet at a side thereof, a plasma outlet at another side thereof, and an annular loop space therein; and   a magnetic core provided in a shape surrounding at least a part of the reactor body, and having a primary coil to generate plasma by exciting a gas in the annular loop space,   wherein the magnetic core comprises:   a middle core layer;   an upper core layer mounted on the middle core layer; and   a lower core layer mounted under the middle core layer,   wherein the upper core layer is divided into a first core layer and a second core layer to prevent edge cracks of the upper core layer by reducing an upper thermal deviation, and   wherein the lower core layer is divided into a third core layer and a fourth core layer to prevent edge cracks of the lower core layer by reducing a lower thermal deviation.   
     
     
         14 . The plasma reaction apparatus of  claim 13 , wherein the first core layer, the second core layer, the middle core layer, the third core layer, and the fourth core layer have substantially the same shape, and are stacked on one another in a vertical direction. 
     
     
         15 . The plasma reaction apparatus of  claim 14 , wherein the magnetic core comprises:
 a left core provided in a rectangular ring shape surrounding a first I block which forms a side of the annular loop space; and   a right core provided in a rectangular ring shape surrounding a second I block which forms another side of the annular loop space, and   wherein each of the first core layer, the second core layer, the middle core layer, the third core layer, and the fourth core layer of the left core or the right core comprises a front block having a U shape, and a rear block having an inverse U shape.   
     
     
         16 . The plasma reaction apparatus of  claim 15 , further comprising:
 a first cooling plate mounted between the first core layer and the second core layer;   a second cooling plate mounted between the second core layer and the middle core layer;   a third cooling plate mounted between the middle core layer and the third core layer; and   a fourth cooling plate mounted between the third core layer and the fourth core layer.   
     
     
         17 . The plasma reaction apparatus of  claim 16 , further comprising:
 first bent portions bent downward from the first cooling plate along side surfaces of the second core layer; and   second bent portions bent upward from the second cooling plate along side surfaces of the second core layer, and having engaging portions to engage with the first bent portions.   
     
     
         18 . The plasma reaction apparatus of  claim 16 , further comprising:
 a first thermal pad mounted between the first core layer and the first cooling plate; and   a second thermal pad mounted between the first cooling plate and the second core layer.   
     
     
         19 . The plasma reaction apparatus of  claim 13 , wherein the reactor body comprises:
 an upper block having the gas inlet;   a lower block having the plasma outlet; and   an I block connecting the upper block with the lower block, and comprising a first I block and a second I block to form the annular loop space, and   wherein, to increase an ignition area of facing surfaces between the upper block and the I block or between the I block and the lower block for block ignition, round surfaces, cross-sections of which have a curvature to increase an insulating section and inclined to face each other, are provided at edges of the facing surfaces.   
     
     
         20 . The plasma reaction apparatus of  claim 19 , wherein an insulator is mounted between the upper block and the I block or between the I block and the lower block. 
     
     
         21 . The plasma reaction apparatus of  claim 20 , wherein the round surfaces comprise an upper round surface provided on the upper block and a lower round surface provided on the I block, so as to correspond to each other, and
 wherein an inner diameter of a portion where the upper and lower round surfaces are in contact is 1.25 times to 1.35 times an inner diameter of the I block.