1,1,1-tris(organoamino)disilane compounds and method of preparing same

Abstract

A 1,1,1-tris(organoamino)disilane compound and a method of preparing the 1,1,1-tris(organoamino)disilane compound are disclosed. The method comprises aminating a 1,1,1-trihalodisilane with an aminating agent comprising an organoamine compound to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound. A film-forming composition is also disclosed. The film-forming composition comprises the 1,1,1-tris(organoamino)disilane compound. A film formed with the film-forming composition, and a method of forming the film, are also disclosed. The method of forming the film comprises subjecting the film-forming composition comprising the 1,1,1-tris(organoamino)disilane compound to a deposition condition in the presence of a substrate, thereby forming the film on the substrate.

1 - 2 . (canceled) 
     
     
         3 . A method of preparing a 1,1,1-tris(organoamino)disilane compound, said method comprising:
 aminating a 1,1,1-trihalodisilane with an aminating agent to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound;   wherein the aminating agent comprises an organoamine compound, wherein: (i) the organoamine compound is dimethylamine, and the 1,1,1-tris(organoamino)disilane compound is 1,1,1-tris(dimethylamino)disilane; or (ii) the organoamine compound is ethylamine, and the 1,1,1-tris(organoamino)disilane compound is 1,1,1-tris(ethylamino)disilane.   
     
     
         4 . The method of  claim 3 , further comprising isolating the 1,1,1-tris(organoamino)disilane compound from the reaction product. 
     
     
         5 . The method of  claim 4 , wherein isolating the 1,1,1-tris(organoamino)disilane compound from the reaction product comprises: (i) filtering the reaction product; (ii) distilling the reaction product; or (iii) both (i) and (ii). 
     
     
         6 . The method of  claim 3 , wherein the aminating agent further comprises a halogen scavenging agent other than the organoamine compound. 
     
     
         7 . The method of  claim 6 , wherein (i) a molar ratio of the 1,1,1-trihalodisilane to the organoamine compound of the aminating agent is from 1:3 to 1:1000; (ii) a molar ratio of the 1,1,1-trihalodisilane to the halogen scavenging agent of the aminating agent is from 1:3 to 1:1000; or (iii) both (i) and (ii). 
     
     
         8 . The method of  claim 3 , wherein a molar ratio of the 1,1, 1-trihalodisilane to the organoamine compound of the aminating agent is from 1:6 to 1:1000. 
     
     
         9 . The method of  claim 3 , wherein: (i) aminating is carried out in a vehicle; (ii) aminating is carried out at a reduced temperature; (iii) the 1,1,1-trihalodisilane is 1,1,1-trichlorodisilane; or (iv) any combination of (i) to (iii). 
     
     
         10 . The method of  claim 9 , wherein aminating is carried out in a vehicle, and wherein the vehicle comprises an organic solvent. 
     
     
         11 . The method of  claim 9 , wherein aminating is carried out at a reduced temperature, and wherein the reduced temperature is less than 0° C. 
     
     
         12 . The method of  claim 3 , wherein aminating comprises combining the 1,1,1-trihalodisilane and the aminating agent to aminate the 1,1,1-trihalodisilane to give the 1,1,1-tris(organoamino)disilane compound. 
     
     
         13 - 20 . (canceled)