Guide device, coolant duct and diffusion vacuum pump

Abstract

A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.

1 . A guide device for a diffusion vacuum pump having
 a plurality of annular guide plates, the guide plates being arranged radially,   wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point,   wherein the first section extends axially in a first direction, the second section extending axially in the opposite second direction,   wherein the first section is designed to taper radially and/or wherein the second section is designed to taper radially.   
     
     
         2 . The guide device according to  claim 1 , characterized in that all guide plates are designed in the same way. 
     
     
         3 . The guide device according to  claim 1 , characterized in that an axial end point of one of the guide plates is located radially above or further inside the connection point of the directly adjacent guide plate. 
     
     
         4 . The guide device according to  claim 1 , characterized in that 3 to 5 guide plates are provided. 
     
     
         5 . The guide device according to  claim 1 , characterized in that at least one guide plate is connected to a cooling element for cooling the guide plate. 
     
     
         6 . The guide device according to  claim 5 , characterized in that the first section and the second section of the at least one cooled guide plate are each formed by a first guide plate element and second guide plate element, wherein the first guide plate element and the second guide plate element are connected to one another by means of the cooling element. 
     
     
         7 . The guide device according to  claim 6 , characterized in that the first guide plate element and/or the second guide plate element of the at least one cooled guide plate have a substantially radially extending section for connection to the cooling element. 
     
     
         8 . The guide device according to  claim 1 , characterized in that the axial length of the second section decreases from an outer guide plate to an inner guide plate. 
     
     
         9 . The guide device according to  claim 1 , characterized in that the guide plates are connected to a flange by means of, in particular, radially extending webs. 
     
     
         10 . The guide device according to  claim 9 , characterized by a coolant duct for supplying the cooling element with a coolant wherein the coolant duct comprises a flange, the flange having a recess with a first diameter, wherein a coolant line is arranged in the recess, the coolant line having a second diameter, the second diameter being smaller than the first diameter so that the coolant line is guided in the recess without contact. 
     
     
         11 . A coolant duct for a vacuum pump, in particular a diffusion pump, with a flange, the flange having a recess with a first diameter, wherein a coolant line is arranged in the recess, the coolant line having a second diameter, the second diameter being smaller than the first diameter so that the coolant line is guided in the recess without contact. 
     
     
         12 . The coolant duct according to  claim 11 , characterized in that the coolant line is connected to the flange on the outside of the flange. 
     
     
         13 . A diffusion pump having at least one nozzle, wherein a guide device according to  claim 1  is arranged directly above the inlet-side nozzle. 
     
     
         14 . The diffusion pump according to  claim 13 , characterized by a coolant duct wherein the coolant duct comprises a flange, the flange having a recess with a first diameter, wherein a coolant line is arranged in the recess, the coolant line having a second diameter, the second diameter being smaller than the first diameter so that the coolant line is guided in the recess without contact. 
     
     
         15 . The diffusion vacuum pump according to  claim 13 , characterized in that there is no contact between the nozzle on the inlet side and the guide device. 
     
     
         16 . The diffusion pump according to  claim 13 , characterized by a connection flange, wherein the flange of the guide device is connected to the connection flange.