US2023340656A1PendingUtilityA1

Multi-chamber deposition equipment for solid free form fabrication

77
Assignee: NORSK TITANIUM ASPriority: Jul 8, 2016Filed: Dec 21, 2022Published: Oct 26, 2023
Est. expiryJul 8, 2036(~10 yrs left)· nominal 20-yr term from priority
C23C 14/24B22F 10/00B22F 10/16B22F 10/20B22F 12/86B33Y 10/00C23C 14/50B22F 10/10B22F 2201/10B22F 2201/20Y02P10/25B33Y 30/00B33Y 50/02B22F 10/30B22F 10/322
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Claims

Abstract

Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A chamber system for solid free form fabrication comprising:
 one or more independently controlled loading/unloading chambers;   an independently controlled deposition chamber, the deposition chamber including a deposition apparatus comprising a heat source;   one or more doors connecting the deposition chamber with each of one or more loading/unloading chambers; and   an independently controlled service chamber connected to the deposition chamber, the service chamber sized to house the deposition apparatus, and arranged such that the deposition apparatus can move in and out of the service chamber without removing the wire feed.

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