Laser processing system having optical diffraction tomography function

Abstract

The invention provides a laser processing system having the function of optical diffraction tomography, comprising: an integrated imaging optical path and a processing optical path; the imaging optical path is used to perform optical diffraction tomography on the device to be processed; the processing optical path is used for processing the device to be processed. Moreover, the specific optical path structure is introduced. During the processing of the device to be processed, the laser processing system can also perform real-time imaging of the device to be processed without shifting the device to be processed. That is to say, the laser processing and imaging processing of the device to be processed can be realized at the same time in a laser processing system.

1 . A laser processing system having optical diffraction tomography function, characterized in that the laser processing system includes: an integrated imaging optical path and a processing optical path;
 the imaging optical path is used for optical diffraction tomography imaging of the device to be processed;   the processing optical path is used for processing the device to be processed.   
     
     
         2 . The laser processing system according to  claim 1 , wherein the imaging optical path includes: a first laser, a first polarizing beam splitter, a dual-axis scanning galvomirror, a first objective lens, a second objective lens, and a non-polarizing flat plate beam splitter;
 the device to be processed is arranged between the first objective lens and the second objective lens;   the first laser is used to emit the imaging laser;   the first polarizing beam splitter is used to split the imaging laser light into signal light and reference light;   the dual-axis scanning galvomirror is used to two-dimensionally scan the signal light to form a scanning beam, and the scanning beam is focused on the back focal plane of the first objective lens to irradiate the device to be processed in different directions;   the second objective lens is used to collect transmitted light signals passing through the device to be processed;   the non-polarizing plate beam splitter is used to combine the reference light and the transmitted light signal to form an off-axis hologram at a certain off-axis angle, and the off-axis hologram is acquired by an image acquisition device.   
     
     
         3 . The laser processing system according to  claim 2 , wherein the imaging optical path further comprises:
 a rotating polarizer and a first half-wave plate are arranged sequentially between the first laser and the first polarizing beam splitter;   the rotating polarizer is used to adjust the total light intensity of the imaging laser;   the half-wave plate is used to adjust the splitting ratio of the imaging laser.   
     
     
         4 . The laser processing system according to  claim 2 , wherein the imaging optical path further comprises:
 a first optical fiber and a first collimating lens are arranged sequentially between the first polarizing beam splitter prism and the dual-axis scanning galvomirror;   the first optical fiber is used to transmit the signal light;   the first collimating lens is used for collimating the signal light.   
     
     
         5 . The laser processing system according to  claim 2 , wherein the imaging optical path further comprises:
 a second collimating lens is arranged between the dual-axis scanning galvanometer and the first objective lens;   the second collimating lens is used for collimating the scanning light beam.   
     
     
         6 . The laser processing system according to  claim 2 , wherein the imaging optical path further comprises:
 a third collimating lens is arranged between the second objective lens and the non-polarizing plate beam splitter;   the third collimating lens is used for collimating the transmitted light signal.   
     
     
         7 . The laser processing system according to  claim 2 , wherein the imaging optical path further comprises:
 a second optical fiber and a fourth collimating lens are arranged sequentially between the first polarizing beam splitter and the non-polarizing flat beam splitter;   the second optical fiber is used to transmit the reference light;   the fourth collimating lens is used for collimating the reference light.   
     
     
         8 . The laser processing system according to  claim 2 , wherein the first laser is a single longitudinal mode continuous laser. 
     
     
         9 . The laser processing system according to  claim 2 , wherein an anti-reflection coating is also provided on the non-polarizing flat beam splitter. 
     
     
         10 . The laser processing system according to  claim 2 , wherein the processing optical path comprises: a second laser, a laser power adjusting device, a beam expander, and a dichroic mirror;
 the second laser is used to emit the processing laser;   the laser power adjusting device is used to adjust the power of the processing laser;   the beam expander is used to expand the processing laser beam;   the dichroic mirror is used to reflect the expanded processing laser light to the second objective lens;   the second objective lens is also used to focus the expanded processing laser light on the device to be processed.   
     
     
         11 . The laser processing system according to  claim 10 , wherein the laser power adjusting device comprises:
 a second half-wave plate and a second polarizing beam splitter prism are arranged sequentially on the outgoing light path of the second laser.   
     
     
         12 . The laser processing system according to  claim 11 , wherein the beam expander comprises:
 a fifth collimating lens, an aperture, and a sixth collimating lens are arranged sequentially between the second polarizing beam splitter prism and the dichroic mirror.   
     
     
         13 . The laser processing system according to  claim 12 , wherein the aperture is arranged on a focal plane of the fifth collimating lens and the sixth collimating lens. 
     
     
         14 . The laser processing system according to  claim 10 , wherein the second laser is a femtosecond pulsed laser. 
     
     
         15 . The laser processing system according to  claim 10 , wherein the dichroic mirror performs reflection on the processing laser light, and performs high-transmission filtering on the transmitted light signal.