Coater photoresist arm smart centering jig

Abstract

An alignment nozzle jig for centering a coater photoresist arm that includes an alignment nozzle block. The alignment nozzle jig also includes an endoscope holder removably secured to a bottom of the alignment nozzle block, an endoscope, and an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block. The alignment nozzle jig is retrieved from a nozzle bath by the coater arm and transferred to a center of a chuck in an associated process chamber. Via the endoscope, the coater photoresist arm is aligned with the center of the chuck using the alignment mark.

What is claimed is: 
     
         1 . An alignment nozzle jig for centering of a coater photoresist arm, comprising:
 an alignment nozzle block;   an endoscope holder removably secured to a bottom of the alignment nozzle block; and   an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block.   
     
     
         2 . The alignment nozzle jig of  claim 1 , further comprising an endoscope removably secured to the endoscope holder. 
     
     
         3 . The alignment nozzle jig of  claim 2 , further comprising a view screen in optical communication with the endoscope. 
     
     
         4 . The alignment nozzle jig of  claim 3 , wherein the endoscope holder further comprises a lens disposed therein. 
     
     
         5 . The alignment nozzle jig of  claim 4 , wherein the lens is positioned between the endoscope and the alignment mark. 
     
     
         6 . The alignment nozzle jig of  claim 5 , wherein the endoscope is communicatively coupled to a view screen. 
     
     
         7 . A system for coater photoresist arm centering, comprising:
 an alignment nozzle jig for centering of a coater photoresist arm;   a nozzle bath configured to store at least one photoresist nozzle assembly and the alignment nozzle jig;   an endoscope removably coupled to the alignment nozzle jig;   a view screen in communication with the endoscope; and   a nozzle holder block lock cylinder disposed on one end of the coater photoresist arm,   wherein either the alignment nozzle jig or the at least one photoresist nozzle assembly is secured by the nozzle holder block lock cylinder.   
     
     
         8 . The system of  claim 7 , wherein the alignment nozzle jig further comprises:
 an alignment nozzle block;   an endoscope holder removably secured to a bottom of the alignment nozzle block; and   an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block,   wherein the endoscope is removably secured to the endoscope holder.   
     
     
         9 . The system of  claim 8 , further comprising a process chamber, the process chamber including a chuck, wherein the chuck further comprises a vacuum hole positioned at the center of the chuck. 
     
     
         10 . The system of  claim 9 , wherein the alignment mark is aligned with the vacuum hole of the chuck via adjustment of the coater photoresist arm in at least one of an X axis position or a Y axis position. 
     
     
         11 . The system of  claim 10 , further comprising a rail on which the nozzle bath is located, wherein the nozzle bath is configured to move along the rail. 
     
     
         12 . The system of  claim 10 , further comprising a motor configured to move the coater photoresist arm along the X axis. 
     
     
         13 . The system of  claim 10 , further comprising a motor configured to move the coater photoresist arm along the Y axis. 
     
     
         14 . A system for coater photoresist arm centering, comprising:
 an alignment nozzle jig for centering of a coater photoresist arm;   a nozzle bath coupled to a trolley movably mounted on a rail, the nozzle bath storing at least one photoresist nozzle assembly and the alignment nozzle jig;   an endoscope removably coupled to the alignment nozzle jig;   a view screen in communication with the endoscope; and   a nozzle holder block lock cylinder disposed on one end of the coater photoresist arm,   wherein either the alignment nozzle jig or the at least one photoresist nozzle assembly is secured by the nozzle holder block lock cylinder.   
     
     
         15 . The system of  claim 14 , wherein the trolley further comprises at least one motor operable to move the trolley on the rail. 
     
     
         16 . The system of  claim 15 , wherein the alignment nozzle jig further comprises:
 an alignment nozzle block;   an endoscope holder removably secured to a bottom of the alignment nozzle block; and   an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block,   wherein the endoscope is removably secured to the endoscope holder.   
     
     
         17 . The system of  claim 16 , further comprising a process chamber, the process chamber including a chuck, wherein the chuck further comprises a vacuum hole positioned at the center of the chuck. 
     
     
         18 . The system of  claim 17 , wherein the alignment mark is aligned with the vacuum hole of the chuck via adjustment of the coater photoresist arm in at least one of an X axis position or a Y axis position. 
     
     
         19 . The system of  claim 17 , further comprising a motor configured to move the coater photoresist arm along the X axis. 
     
     
         20 . The system of  claim 18 , further comprising a motor configured to move the coater photoresist arm along the Y axis.