Method of Growing Single Crystal Diamond Assisted by Polycrystalline Diamond Growth

Abstract

A method of growing single crystal diamond assisted by polycrystalline diamond growth to enhance dimensions and quality of the single crystal diamond includes thermally mating a diamond seed on a top surface of a substrate holder providing a growth surface for a combination of single crystal diamond and polycrystalline diamond. A predetermined temperature difference between the diamond seed and the substrate holder during processing along with the plasma process conditions causes a single crystal diamond growth rate to be different from a polycrystalline growth rate by a predetermined amount. Process gasses are introduced, and a plasma is formed to grow both single crystal diamond and polycrystalline diamond on the growth surface so that the polycrystalline diamond grown adjacent to the single crystal diamond shields side surfaces of the growing single crystal diamond, thereby improving growth quality across the growing single crystal diamond.

1 - 86 . (canceled) 
     
     
         87 . A method of growing a single crystal diamond assisted by polycrystalline diamond in a single continuous chemical vapor deposition growth cycle, the method comprising:
 a) thermally mating single crystal diamond seeds on a flat top surface of a substrate holder with a bonding material so as to provide a growth surface of a combined single crystal diamond and polycrystalline diamond substrate that is unrestricted by the substrate holder;   b) providing process gasses and forming a plasma to grow both single crystal diamond and polycrystalline diamond on the growth surface, where the polycrystalline diamond grown adjacent to the single crystal diamond shields lateral surfaces of the growing single crystal diamond from the plasma and process gases, thereby improving thermal uniformity across the growing single crystal diamond during the single chemical vapor deposition growth; and   c) terminating the chemical vapor deposition growth of the single crystal diamond without multiple growth cycles, thereby forming a diamond without growth lines and defects associated with multiple growth cycles, while allowing lateral growth with respect to a growth face of the diamond seed that is unrestricted by the substrate holder.   
     
     
         88 . The method of  claim 88  further comprising thermally mating single crystal diamond seeds on the flat top surface of a substrate holder with the bonding material so that there is a predetermined temperature difference during processing which causes a single crystal diamond growth rate in a direction perpendicular to a top surface of the single crystal diamond seed to be different from a polycrystalline growth rate in a direction perpendicular to the top surface of the single crystal diamond seed by a desired amount. 
     
     
         89 . The method of  claim 88  further comprising providing a spacer between the diamond seed and the substrate holder that adjusts a height of the diamond seed relative to the top surface of the substrate holder to change a growth rate of the diamond seed in the direction perpendicular to the top surface of the diamond seed relative to the growth rate of the polycrystalline diamond in the direction perpendicular to the top surface of the diamond seed. 
     
     
         90 . The method of  claim 88  wherein the providing process gasses and forming the plasma to grow both the single crystal diamond and the polycrystalline diamond on the growth surface is performed so that the single crystal growth rate in the direction perpendicular to the top surface of the diamond seed is greater than the polycrystalline growth rate in the direction perpendicular to the top surface of the diamond seed. 
     
     
         91 . The method of  claim 88  wherein the substrate holder comprises diamond. 
     
     
         92 . The method of  claim 88  wherein the bonding material comprises a diamond material. 
     
     
         93 . The method of  claim 88  further comprising forming the top surface of the substrate holder with a recess for supporting the diamond seed. 
     
     
         94 . The method of  claim 88  further comprising forming the top surface of the substrate holder with a textured finish. 
     
     
         95 . The method of  claim 88  further comprising changing process conditions during the growth in order to maintain the desired relative growth rate of the single crystal and polycrystalline material. 
     
     
         96 . The method of  claim 88  further comprising changing process conditions during the growth in order to maintain the desired growth characteristic of the single crystal material. 
     
     
         97 . The method of  claim 88  further comprising producing plates of single crystal diamond material by cutting the grown single crystal diamond. 
     
     
         98 . The method of  claim 88  wherein the thermally mating the diamond seed on the top surface of the substrate holder so as to provide the growth surface of the combined single crystal diamond and polycrystalline diamond substrate comprises thermally mating a plurality of diamond seed on the top surface of the substrate holder so as to provide a plurality of growth surfaces of a plurality of combined single crystal diamond and polycrystalline diamond substrates. 
     
     
         99 . A method of growing single crystal diamond assisted by polycrystalline diamond in a single continuous chemical vapor deposition growth cycle, the method comprising:
 a) thermally mating a diamond seed on a flat top surface of a substrate holder with a bonding material so as to provide growth surface for a combined single crystal diamond and polycrystalline diamond substrate that is unrestricted by the substrate holder;   b) performing a growth cycle by providing process gasses and forming a plasma to grow by plasma chemical vapor deposition both single crystal diamond and polycrystalline diamond on the growth surface, where the polycrystalline diamond grown adjacent to the single crystal diamond shields lateral surfaces of the growing single crystal diamond from the plasma and process gases, thereby improving thermal uniformity across the growing single crystal diamond; and   c) continuing the growth cycle recited in step b) without interruption to obtain a desired thickness while continuously maintaining the thermal mating of the single crystal diamond seed on the top surface of the substrate holder, thereby preventing growth lines and defects formed between growth cycles, while allowing lateral growth with respect to a growth face of the diamond seed that is unrestricted by the substrate holder.   
     
     
         100 . The method of  claim 100  further comprising forming the top surface of the substrate holder with a textured finish. 
     
     
         101 . The method of  claim 100  further comprising selecting a bonding material to attach the diamond seed to the holder so that there is a desired temperature difference between the diamond seed and the polycrystalline material during growth. 
     
     
         102 . The method of  claim 100  wherein the thermally mating the diamond seed on the top surface of a substrate holder is performed such that a desired temperature difference exists between the diamond seed and the polycrystalline material during growth. 
     
     
         103 . The method of  claim 100  further comprising changing process conditions during the growth in order to maintain the desired relative growth rate of the single crystal and polycrystalline material. 
     
     
         104 . The method of  claim 100  further comprising changing process conditions during the growth in order to maintain the desired growth characteristic of the single crystal material. 
     
     
         105 . The method of  claim 100  wherein the thermally mating the diamond seed on the top surface of the substrate holder so as to provide the growth surface of the combined single crystal diamond and polycrystalline diamond substrate comprises thermally mating a plurality of diamond seed on the top surface of the substrate holder so as to provide a plurality of growth surfaces of a plurality of combined single crystal diamond and polycrystalline diamond substrates.