Method for operating a scroll vacuum pump

Abstract

Method for operating and in particular monitoring a scroll pump, with the steps of: producing a vacuum by means of the scroll pump; determining a pressure of the scroll pump; comparing the recorded pressure with a pre-set threshold value; and if the recorded pressure lies above the pre-set threshold value, emitting a warning signal. The invention furthermore concerns a scroll pump for executing the method.

1 . A method for operating and in particular monitoring a scroll pump, with the steps of:
 a) creating a vacuum by means of the scroll pump;   b) determining a pressure of the scroll pump;   c) comparing the recorded pressure with a pre-set threshold value; and   d) if the recorded pressure lies above the pre-set threshold value, emitting a warning signal; characterized in that the recorded pressure is an end pressure and, wherein the warning signal corresponds to a remaining running time predicted from the end pressure that has been reached.   
     
     
         2 . A method for operating and in particular monitoring a scroll pump, with the steps of:
 a) creating a vacuum by means of the scroll pump;   b) recording a first pressure of the scroll pump and a second pressure of the scroll pump;   c) comparing the difference between the first pressure and the second pressure with a pre-set threshold value; and   d) if the pressure difference lies below the pre-set threshold value, emitting a warning signal; characterized in that an end pressure is determined from the pressure difference and, wherein the warning signal corresponds to a remaining running time predicted from the end pressure that has been reached.   
     
     
         3 . The method according to  claim 1 , in which the pressure at the inlet of the scroll pump is recorded and/or within a scroll mechanism of the scroll pump. 
     
     
         4 . (canceled) 
     
     
         5 . The method according to  claim 1 , in which before the production of the end pressure, this step is carried out:
 closing of an intake valve arranged at the inlet of the scroll pump.   
     
     
         6 . The method according to  claim 1 , in which the warning signal is an optical signal and/or an acoustic signal and/or a data signal that can be transmitted by means of a communication device. 
     
     
         7 . (canceled) 
     
     
         8 . The method according to  claim 1 , in which the method is implemented at pre-set time intervals or on the basis of an input signal. 
     
     
         9 . The method according to  claim 1 , in which during operation, the operating pressure is measured at the inlet of the scroll pump, and if the measured operating pressure falls below a second threshold value, the rotational speed of the scroll pump is reduced. 
     
     
         10 . The method according to  claim 1 , in which the intake valve is closed when the scroll pump is switched off and/or in the event of a malfunction of the scroll pump. 
     
     
         11 . The method according to  claim 1 , in which a gas load is recorded and the end pressure or pressure difference is not recorded if a gas load is present. 
     
     
         12 . A scroll pump with
 a housing which has an inlet and an outlet,   a control device connected to the scroll pump,   at least one pressure sensor arranged on the scroll pump to record a pressure of the scroll pump, wherein the pressure sensor is connected to the control device,   wherein the control device is designed to implement the method according to  claim 1 .   
     
     
         13 . The scroll pump according to  claim 12 , characterised in that the pressure sensor is arranged at the inlet of the scroll pump. 
     
     
         14 . The scroll pump according to  claim 12 , characterised in that the recorded pressure is an operating pressure. 
     
     
         15 . The scroll pump according to  claim 12 , characterised in that the pressure sensor is arranged within a scroll mechanism of the scroll pump. 
     
     
         16 . The scroll pump according to  claim 12 , characterised in that at least two pressure sensors are provided, to record a first pressure and a second pressure, wherein the recorded pressure is determined from the difference between the first pressure and the second pressure. 
     
     
         17 . The scroll pumps according to  claim 12 , characterised in that an intake valve is arranged at the inlet, wherein the intake valve is connected to the control device, wherein the control device is designed to close the intake valve to determine the end pressure. 
     
     
         18 . The scroll pumps according to  claim 12 , characterised in that the control device and/or the pressure sensor and/or the intake valve are arranged in the housing of the scroll pump. 
     
     
         19 . The scroll pumps according to  claim 12 , characterised by a communication device for transmitting an operating pressure that has been recorded by means of the pressure sensor and/or the recorded end pressure and/or the warning signal that has been generated.