Sputtering techniques for biosensors

Abstract

Systems and methods for forming probes for a biosensor. In the systems and methods disclosed herein, a base substrate is provided; and a platinum layer is formed on the base substrate by sputtering platinum in the absence of oxygen. The platinum layer is formed using a sputtering pressure of at least 30 mtorr.

1 . A method of forming a probe for a biosensor, the method comprising the steps of:
 providing a base substrate; and   forming a platinum layer overlying the base substrate by sputtering platinum in the absence of oxygen, wherein the platinum layer is formed using a sputtering pressure of at least 30 mtorr.   
     
     
         2 . The method of  claim 1 , wherein the step of forming the platinum layer comprises forming the platinum layer having a thickness of between 15 nm and 2000 nm. 
     
     
         3 . The method of  claim 1 , wherein the step of forming the platinum layer comprises forming the platinum layer using a sputtering power of at least 100 W. 
     
     
         4 . The method of  claim 1 , wherein the step of providing the base substrate comprises providing a base substrate formed from polyethylene terephthalate (PET). 
     
     
         5 . The method of  claim 1 , wherein the platinum layer is formed using a sputtering pressure of at least 50 mtorr. 
     
     
         6 . The method of  claim 1 , wherein the method of forming the probe for a biosensor is a continuous process. 
     
     
         7 . The method of  claim 1 , wherein the method comprises sputtering a first adhesion-promoting layer overlying the base substrate. 
     
     
         8 . The method of  claim 7 , wherein the method comprises sputtering a second surface-roughness-promoting layer overlying the first adhesion-promoting layer. 
     
     
         9 . The method of  claim 7 , wherein the step of sputtering the first adhesion-promoting layer overlying the base substrate comprises sputtering a titanium layer overlying the base substrate. 
     
     
         10 . The method of  claim 8 , wherein the step of sputtering the second surface-roughness-promoting layer overlying the first adhesion-promoting layer comprises sputtering, in the presence of oxygen, a layer overlying the first adhesion-promoting layer using a sputtering source comprising a material selected from the group of platinum, iridium, ruthenium and zirconium. 
     
     
         11 . The method of  claim 10 , wherein the step of sputtering the second surface-roughness-promoting layer is performed by gas flow sputtering. 
     
     
         12 . The method of  claim 1 , wherein the step of providing the base substrate comprises providing a base substrate formed from polyethylene terephthalate (PET). 
     
     
         13 . The method of  claim 11 , wherein the step of sputtering the platinum layer overlying the second surface-roughness-promoting layer comprises sputtering a platinum layer having a thickness of between 25 nm and 100 nm 
     
     
         14 . The method of  claim 13 , wherein the step of sputtering the platinum layer overlying the second surface-roughness-promoting layer is performed at a sputtering pressure of above 30 mtorr. 
     
     
         15 . The method of  claim 1 , wherein the method of forming the probe for the glucose biosensor is a continuous process using a conveyor to continuously move the base substrate through a sputtering chamber during sputtering in the sputtering chamber.