Siloxane mitigation for laser systems

Abstract

In various embodiments, the concentration and deposition of siloxane materials within components of laser systems, such as laser resonators, is reduced or minimized utilizing mitigation systems that may also supply gas having low siloxane levels into multiple different components in series or in parallel.

1 .- 161 . (canceled) 
     
     
         162 . A laser apparatus comprising:
 a laser system comprising a plurality of enclosed components, at least one of the components comprising one or more beam emitters therewithin, wherein (i) each component comprises a gas inlet configured to permit ingress of gas into the component and a gas outlet configured to permit egress of gas out of the component, and (ii) the components are fluidly connected to each other in series;   a pump, different from the plurality of enclosed components, for supplying gas to the gas inlet of a first one of the components, whereby the supplied gas flows sequentially into and out of each of the series-connected components; and   a siloxane-mitigation system, different from the plurality of enclosed components, configured to remove siloxanes from gas supplied by the pump.   
     
     
         163 . The apparatus of  claim 162 , further comprising an inlet manifold, different from the plurality of enclosed components, fluidly coupled to the gas inlet of the first one of the components, wherein the pump supplies gas to the inlet manifold for supply to the gas inlet of the first one of the enclosed components. 
     
     
         164 . The apparatus of  claim 162 , wherein at least one of the enclosed components of the laser system (i) comprises therewithin one or more optical elements configured to focus and/or direct laser beams, and (ii) does not comprise a beam emitter therewithin. 
     
     
         165 . The apparatus of  claim 162 , further comprising an outlet manifold, different from the plurality of enclosed components, fluidly coupled to the gas outlet of a last one of the enclosed components. 
     
     
         166 . The apparatus of  claim 165 , wherein the pump is fluidly connected to the outlet manifold. 
     
     
         167 . The apparatus of  claim 165 , wherein the outlet manifold is configured to release gas into a surrounding ambient. 
     
     
         168 . The apparatus of  claim 162 , wherein a gas outlet of a last one of the enclosed components is fluidly connected to the pump. 
     
     
         169 . The apparatus of  claim 162 , wherein a gas outlet of a last one of the enclosed components is configured to release gas into a surrounding ambient. 
     
     
         170 . The apparatus of  claim 162 , further comprising a desiccant positioned to remove moisture from gas supplied by the pump. 
     
     
         171 . The apparatus of  claim 162 , wherein the siloxane-mitigation system comprises a siloxane-adsorbing material and/or a siloxane-absorbing material. 
     
     
         172 . The apparatus of  claim 162 , wherein the siloxane-mitigation system comprises a remediation system configured to remove siloxanes from the gas via at least one of condensation or reaction. 
     
     
         173 . The apparatus of  claim 162 , wherein the siloxane-mitigation system comprises a liquid over and/or through which gas supplied by the pump is flowed. 
     
     
         174 . The apparatus of  claim 162 , further comprising one or more sensors configured to detect siloxanes within at least one enclosed component and/or within one or more conduits fluidly connected to at least one of the pump, at least one enclosed component, or the siloxane-mitigation system. 
     
     
         175 . The apparatus of  claim 162 , wherein one of the components comprises a laser resonator having an enclosed laser cavity, the laser cavity comprising therewithin:
 a plurality of beam emitters each emitting a beam having a different wavelength;   a dispersive element configured to receive beams emitted by the plurality of emitters and combine the beams into a multi-wavelength beam; and   disposed optically downstream of the dispersive element, a partially reflective output coupler configured to (i) receive the multi-wavelength beam, (ii) transmit a first portion of the multi-wavelength beam as an output beam, and (iii) reflect a second portion of the multi-wavelength beam back toward the dispersive element.   
     
     
         176 . The apparatus of  claim 175 , wherein:
 the laser cavity comprises a platform having top and bottom opposed sides and defining an opening therethrough;   the plurality of beam emitters is disposed over the top side of the platform, the beams emitted thereby being directed through the opening in the platform to the bottom side of the platform; and   the dispersive element is disposed over the bottom side of the platform and positioned to receive the beams directed through the opening.   
     
     
         177 . The apparatus of  claim 176 , wherein the partially reflective output coupler is disposed over the bottom side of the platform. 
     
     
         178 . The apparatus of  claim 175 , wherein the laser cavity comprises therewithin:
 a plurality of slow-axis collimation lenses disposed optically downstream of the plurality of beam emitters, each slow-axis collimation lens configured to receive one or more beams from one of the beam emitters; and   a plurality of folding mirrors disposed optically downstream of the slow-axis collimation lenses and optically upstream of the dispersive element.   
     
     
         179 . The apparatus of  claim 178 , wherein:
 the laser cavity comprises a platform having top and bottom opposed sides;   the plurality of beam emitters is disposed over the top side of the platform;   the plurality of slow-axis collimation lenses and the plurality of folding mirrors are disposed over the top side of the platform;   the dispersive element is disposed over the bottom side of the platform;   the platform defines an opening therethrough, and the beams emitted by the plurality of beam emitters are directed, from the top side of the platform to the bottom side of the platform, to the dispersive element through the opening; and   the partially reflective output coupler is disposed over the bottom side of the platform.   
     
     
         180 . The apparatus of  claim 162 , wherein the plurality of enclosed components of the laser system comprises a plurality of laser resonators, each laser resonator (i) being enclosed within a separate enclosure fluidly coupled to a different one of the gas inlets and (ii) comprising a plurality of beam emitters therewithin and being configured to combine beams emitted by the beam emitters into a combined beam. 
     
     
         181 . The apparatus of  claim 180 , further comprising:
 a beam-combining module, separate from the laser resonators, configured to receive the combined beams from the laser resonators and combine the combined beams into an output beam; and   a fiber optic module, separate from the laser resonators, configured to receive the output beam from the beam-combining module and supply the output beam to an optical fiber.   
     
     
         182 . The apparatus of  claim 162 , further comprising a computer-based controller configured to operate the pump. 
     
     
         183 . The apparatus of  claim 182 , further comprising one or more sensors configured to detect siloxanes within at least one enclosed component and/or within one or more conduits fluidly connected to at least one of the pump, at least one enclosed component, or the siloxane-mitigation system, wherein the controller is responsive to signals received from the one or more sensors. 
     
     
         184 . The apparatus of  claim 183 , wherein the controller is configured to operate the pump only when a siloxane concentration detected by at least one of the sensors exceeds a threshold. 
     
     
         185 . The apparatus of  claim 183 , wherein the controller is configured to power down or power off the one or more beam emitters when a siloxane concentration detected by at least one of the sensors exceeds a threshold. 
     
     
         186 . The apparatus of  claim 182 , wherein the controller is configured to operate the pump continuously, at least during operation of the one or more beam emitters. 
     
     
         187 . The apparatus of  claim 182 , wherein the controller is configured to operate the pump at regular, predetermined intervals, irrespective of a siloxane concentration within one or more of the components.