Method and apparatus for atmospheric pressure plasma jet coating deposition on a substrate

Abstract

A method for plasma coating an object includes an object profile, having the steps of: a) manufacturing a replaceable shield comprising a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet, wherein the nozzle outlet includes an edge essentially congruent to at least part of the object profile; b) detachably attaching the replaceable shield to a jet outlet of a plasma jet generator, c) placing the object at the nozzle outlet such that the object profile fits closely to the nozzle outlet edge; d) plasma coating the object with a low-temperature, oxygen-free plasma at an operating pressure which is higher than the atmospheric pressure by providing a plasma jet in the shield via the plasma jet generator and injecting coating precursors in the plasma jet in the shield.

1 . An apparatus for depositing a coating via an atmospheric pressure plasma jet, the apparatus comprising:
 a plasma jet generator comprising a jet outlet; and   a nozzle comprising an adaptor and a replaceable shield, the shield comprising a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet,   wherein the adaptor is configured for detachably attaching the shield onto the plasma jet generator and thereby communicatively coupling the jet outlet and the jet inlet,   wherein the sidewall of the shield comprises at least one precursor inlet,   and wherein the shield comprises an insulating material.   
     
     
         2 . The apparatus according to  claim 1 , wherein the shield comprises at the jet inlet a flange attached to the sidewall, and
 wherein the adaptor comprises a retaining wall comprising an opening with size and shape adapted for retaining the flange.   
     
     
         3 . The apparatus according to  claim 1 , wherein the shield is monolithic. 
     
     
         4 . The apparatus according to  claim 1 , wherein the shield comprises, and is made of, a polymer material. 
     
     
         5 . The apparatus according to  claim 1 , wherein the nozzle outlet of the shield comprises a non-planar edge. 
     
     
         6 . The apparatus according to  claim 1 , wherein the nozzle comprises a homogenization means, the shield comprising flow disturbance elements. 
     
     
         7 . The apparatus according to  claim 1 , wherein the nozzle is adapted for cooling, the sidewall of the shield comprising a channel for passage of a cooling fluid. 
     
     
         8 . The apparatus according to  claim 1 , wherein the apparatus comprises a transport means for in-line treatment of a planar or non-planar surface of a continuous substrate,
 wherein the nozzle outlet of the shield comprises an edge, and   wherein the apparatus is configured for maintaining said edge at a distance of at least 0.1 mm and at most 5 mm of said surface of said substrate.   
     
     
         9 . The apparatus according to  claim 1 , wherein the jet outlet comprises an opening, and wherein the jet inlet ( 22 ) comprises an opening larger than the opening of the jet outlet. 
     
     
         10 . The apparatus according to  claim 1 , wherein the sidewall comprises a tapering portion ( 21   a ). 
     
     
         11 . The apparatus according to  claim 1 , wherein the nozzle comprises a homogenization means, the shield comprising flow disturbance elements. 
     
     
         12 . A nozzle kit for an atmospheric pressure plasma jet generator, the plasma jet generator comprising a jet outlet, the nozzle kit comprising an adaptor and a plurality of replaceable shields, each shield comprising a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet, wherein the adaptor is configured for detachably attaching one of said shields onto the plasma jet generator and thereby communicatively coupling the jet outlet and the jet inlet, wherein the sidewall of the shield comprises at least one precursor inlet, and wherein the shield comprises an insulating material, whereby the nozzle kit further comprises a plasma jet generator comprising a jet outlet.