Switch based on phase-change material

Abstract

The present description concerns a switch based on a phase-change material comprising: a region of the phase-change material; a heating element electrically insulated from the region of the phase-change material; and one or a plurality of pillars extending in the region of the phase-change material, the pillar(s) being made of a material having a thermal conductivity greater than that of the phase-change material.

1 . A switch based on a phase-change material, comprising:
 a region of the phase-change material;   a heating element electrically insulated from the region of the phase-change material; and   a plurality of pillars extending in the region of the phase-change material, the pillars being made of a material having a thermal conductivity greater than that of the phase-change material.   
     
     
         2 . The switch according to  claim 1 , wherein the material of the pillars is electrically insulating. 
     
     
         3 . The switch according to  claim 1 , wherein the material of the pillars is selected from aluminum nitride and silicon nitride. 
     
     
         4 . The switch according to  claim 1 , wherein the phase-change material is a chalcogenide material. 
     
     
         5 . The switch according to  claim 1 , wherein an electrically insulating layer is interposed between the heating element and the region of the phase-change material. 
     
     
         6 . The switch according to  claim 5 , wherein the electrically insulating layer is made of the same material as the pillars. 
     
     
         7 . The switch according to  claim 1 , wherein the region of the phase-change material is closer to a substrate, inside and on top of which is formed the switch, than the heating element. 
     
     
         8 . The switch according to  claim 1 , wherein the heating element is closer to a substrate, inside and on top of which is formed the switch, than the region of the phase-change material. 
     
     
         9 . The switch according to  claim 1 , wherein the region of the phase-change material is coated with a passivation layer. 
     
     
         10 . The switch according to  claim 1 , wherein the region of the phase-change material couples first and second conduction electrodes of the switch. 
     
     
         11 . The switch according to  claim 1 , wherein each pillar has a maximum lateral dimension equal to approximately 300 nm. 
     
     
         12 . The switch according to  claim 1 , wherein each pillar is separated from the neighboring pillar by a distance in the order of 300 nm. 
     
     
         13 . A device, comprising:
 a phase-change material switch that includes:
 a region of phase-change material; 
 a heating element on the phase-change material; and 
 a plurality of pillars extending in the region of the phase-change material. 
   
     
     
         14 . The device of  claim 13  wherein the plurality of pillars are a material having a thermal conductivity greater than that of the phase-change material. 
     
     
         15 . The device of  claim 14  wherein the switch includes a first electrode spaced from a second electrode, the region of phase change material being on the first and second electrodes. 
     
     
         16 . The device of  claim 15  wherein the switch includes a first insulating layer between the first electrode and the region of phase change material. 
     
     
         17 . A device, comprising:
 a substrate;   a first electrode on the substrate;   a second electrode on the substrate;   a phase change material on the first and second electrodes;   a plurality of pillars in the phase change material, the plurality of pillars including a material that is different from the phase change material.   
     
     
         18 . The device of  claim 17  wherein the material of the plurality of pillars have a thermal conductivity greater than that of the phase-change material. 
     
     
         19 . The device of  claim 18 , comprising a heating element on the phase change material.