Glass material

Abstract

The present invention provides a glass material that has a suitable thermal expansion coefficient to meet the application in the field of semiconductor manufacturing. A glass material, wherein components thereof are represented by weight percentage, comprising: 43-63% of SiO 2 ; 0-15% of B 2 O 3 ; 2-15% of Al 2 O 3 ; 11-30% of BaO; 3-18% of CaO. Through rational component design, the glass material of the present invention has a suitable thermal expansion coefficient and is applicable to the field of semiconductor manufacturing.

1 . A glass material, wherein components thereof are represented by weight percentage, comprising: 43-63% of SiO 2 ; 0-15% of B 2 O 3 ; 2-15% of Al 2 O 3 ; 11-30% of BaO; 3-18% of CaO. 
     
     
         2 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, further comprising: 0-12% of SrO; and/or 0-8% of ZrO 2 ; and/or 0-10% of MgO; and/or 0-8% of Rn 2 O; and/or 0-8% of Ln 2 O 3 ; and/or 0-8% of ZnO; and/or 0-5% of TiO 2 ; and/or 0-5% of P 2 O 5 ; and/or 0-2% of clarifying agent; the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 , and the clarifying agent is one or more of Sb 2 O 3 , SnO 2 , and CeO 2 . 
     
     
         3 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, comprising: 46-60% of SiO 2 ; and/or 0.5-10% of B 2 O 3 ; and/or 4-13% of Al 2 O 3 ; and/or 15-25% of BaO; and/or 5-15% of CaO; and/or 0.5-10% of SrO; and/or 0-5% of ZrO 2 ; and/or 0-5% of MgO; and/or 0-5% of Rn 2 O; and/or 0-5% of Ln 2 O 3 ; and/or 0-5% of ZnO; and/or 0-3% of TiO 2 ; and/or 0-3% of P 2 O 5 ; and/or 0-1% of clarifying agent; the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 , and the clarifying agent is one or more of Sb 2 O 3 , SnO 2 , and CeO 2 . 
     
     
         4 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, comprising: 49-56% of SiO 2 ; and/or 1-7% of B 2 O 3 ; and/or 6-11% of Al 2 O 3 ; and/or 17-23% of BaO; and/or 7-12% of CaO; and/or 1-7% of SrO; and/or 0-2% of ZrO 2 ; and/or 0-2% of MgO; and/or 0-1% of Rn 2 O; and/or 0-2% of Ln 2 O 3 ; and/or 0-2% of ZnO; and/or 0-1% of TiO 2 ; and/or 0-1% of P 2 O 5 ; and/or 0-0.8% of clarifying agent; the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 , and the clarifying agent is one or more of Sb 2 O 3 , SnO 2 , and CeO 2 . 
     
     
         5 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, and one or more of the following 10 conditions are satisfied:
 1) RO is 16-60%;   2) (Al 2 O 3 +CaO)/SiO 2  is 0.1-0.65;   3) SiO 2 /(BaO+CaO) is 1.0-4.0;   4) (BaO+SrO)/SiO 2  is 0.2-0.8;   5) BaO/Al 2 O 3  is 1.0-10.0;   6) Rn 2 O/BaO is below 0.6;   7) (Ln 2 O 3 +CaO)/BaO is 0.15-1.5;   8) SrO/BaO is 0.02-0.8;   9) (ZnO+TiO 2 )/SrO is below 2.0;   10) (SiO 2 +Al 2 O 3 )/(BaO+B 2 O 3 ) is 1.2-5.0, the RO is a total content of MgO, CaO, SrO, and BaO, the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, and the Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 .   
     
     
         6 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, and one or more of the following 10 conditions are satisfied:
 1) RO is 20-50%;   2) (Al 2 O 3 +CaO)/SiO 2  is 0.15-0.55;   3) SiO 2 /(BaO+CaO) is 1.2-3.0;   4) (BaO+SrO)/SiO 2  is 0.25-0.7;   5) BaO/Al 2 O 3  is 1.2-8.0;   6) Rn 2 O/BaO is below 0.5;   7) (Ln 2 O 3 +CaO)/BaO is 0.2-1.0;   8) SrO/BaO is 0.05-0.6;   9) (ZnO+TiO 2 )/SrO is below 1.5;   10) (SiO 2 +Al 2 O 3 )/(BaO+B 2 O 3 ) is 1.5-4.0, the RO is the total content of MgO, CaO, SrO, and BaO, the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, and the Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 .   
     
     
         7 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, and one or more of the following 10 conditions are satisfied:
 1) RO is 25-45%;   2) (Al 2 O 3 +CaO)/SiO 2  is 0.2-0.5;   3) SiO 2 /(BaO+CaO) is 1.3-2.5;   4) (BaO+SrO)/SiO 2  is 0.3-0.65;   5) BaO/Al 2 O 3  is 1.5-5.0;   6) Rn 2 O/BaO is below 0.3;   7) (Ln 2 O 3 +CaO)/BaO is 0.25-0.8;   8) SrO/BaO is 0.1-0.5;   9) (ZnO+TiO 2 )/SrO is below 1.0;   10) (SiO 2 +Al 2 O 3 )/(BaO+B 2 O 3 ) is 1.7-3.5, the RO is the total content of MgO, CaO, SrO, and BaO, the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, and the Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 .   
     
     
         8 . The glass material according to  claim 1 , wherein components thereof are represented by weight percentage, and one or more of the following 10 conditions are satisfied:
 1) RO is 28-40%;   2) (Al 2 O 3 +CaO)/SiO 2  is 0.25-0.45;   3) SiO 2 /(BaO+CaO) is 1.5-2.0;   4) (BaO+SrO)/SiO 2  is 0.35-0.6;   5) BaO/Al 2 O 3  is 1.8-3.0;   6) Rn 2 O/BaO is below 0.1;   7) (Ln 2 O 3 +CaO)/BaO is 0.3-0.7;   8) SrO/BaO is 0.1-0.4;   9) (ZnO+TiO 2 )/SrO is below 0.5;   10) (SiO 2 +Al 2 O 3 )/(BaO+B 2 O 3 ) is 2.0-3.0, the RO is the total content of MgO, CaO, SrO, and BaO, the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, and the Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 .   
     
     
         9 . The glass material according to  claim 1 , wherein components thereof do not contain MgO; and/or do not contain ZnO; and/or do not contain P 2 O 5 ; and/or do not contain TiO 2 ; and/or do not contain Rn 2 O; and/or do not contain Ln 2 O 3 , the Rn 2 O is one or more of Li 2 O, Na 2 O, and K 2 O, and Ln 2 O 3  is one or more of La 2 O 3 , Gd 2 O 3 , Y 2 O 3 , and Yb 2 O 3 . 
     
     
         10 . The glass material according to  claim 1 , wherein thermal expansion coefficient α 20-300° C.  of the glass material is 50×10 −7 /K-68×10 −7 /K; and/or transition temperature T g  is 620° C.-760° C.; and/or Young's modulus E is above 6500×10 7  Pa; and/or acid resistance stability D A  is above Class 2; and/or water resistance stability D W  is above Class 2; and/or bubble degree is above Grade A; and/or stripe degree is above Grade C; and/or viscosity at 1450° C. is below 250 dPaS; and/or viscosity at 1300° C. is above 400 dPaS; and/or precision of thermal expansion coefficient is within ±3×10 −7 /K. 
     
     
         11 . The glass material according to  claim 1 , wherein thermal expansion coefficient α 20-300° C.  of the glass material is 52×10 −7 /K-64×10 −7 /K; and/or transition temperature T g  is 680° C.-740° C.; and/or Young's modulus E is above 7500×10 7  Pa; and/or acid resistance stability D A  is Class 1; and/or water resistance stability D W  is Class 1; and/or bubble degree is Grade A 00 ; and/or stripe degree is above Grade B; and/or viscosity at 1450° C. is below 200 dPaS; and/or viscosity at 1300° C. is above 600 dPaS; and/or precision of thermal expansion coefficient is within ±2×10 −7 /K. 
     
     
         12 . A packaging carrier, made of the glass material according to  claim 1 . 
     
     
         13 . A glass element, made of the glass material according to  claim 1 . 
     
     
         14 . A device, comprising the glass material according to  claim 1 .