Electron beam irradiation device

Abstract

An electron beam irradiation device (1) irradiates an electron beam from an electrode (12) that is connected to a tip of a conductive part (21) which projects inside a vacuum container (11), to the exterior of the vacuum container (11) via a metal foil (111) that constitutes a portion of a peripheral wall of the vacuum container (11). The electron beam irradiation device (1) includes a tubular insulator (22) that surrounds the periphery of the conductive part (21) in the vacuum container (11), and an amorphous carbon film (23) that covers the outer peripheral surface of the insulator (22).

1 . An electron beam irradiation device, adapted for irradiating an electron beam from an electrode connected to a tip of a conductive part projecting inside a vacuum container to exterior of the vacuum container via a metal foil that constitutes a portion of a peripheral wall of the vacuum container, wherein
 the electron beam irradiation device comprises an insulator of a tubular shape surrounding a periphery of the conductive part in the vacuum container; and   the insulator has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the insulator.   
     
     
         2 . The electron beam irradiation device according to  claim 1 , wherein
 the insulator comprises a tapered tube where an inner diameter and an outer diameter of the insulator gradually decrease from a base end side toward a tip side of the insulator; and   the amorphous carbon film covers the outer peripheral surface of the insulator.   
     
     
         3 . The electron beam irradiation device according to  claim 1 , wherein
 the insulator comprises one or two or more insulator units of a cylindrical shape; and   the insulator unit has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the insulator unit.   
     
     
         4 . The electron beam irradiation device according to  claim 3 , wherein
 the insulator is configured by connecting a plurality of insulator units of a cylindrical shape; and   among the plurality of insulator units, the insulator unit arranged closer to the electrode has a smaller outer diameter.   
     
     
         5 . The electron beam irradiation device according to  claim 1 , further comprising:
 a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode; and   the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.   
     
     
         6 . The electron beam irradiation device according to  claim 2 , further comprising:
 a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode; and   the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.   
     
     
         7 . The electron beam irradiation device according to  claim 3 , further comprising:
 a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode; and   the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.   
     
     
         8 . The electron beam irradiation device according to  claim 4 , further comprising:
 a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode; and   the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.