Thermo-optic phase modulation module and optical modulator

Abstract

A thermo-optic phase modulation module and an optical modulator are provided. The thermo-optic phase modulation module includes: a substrate; an isolation layer located on substrate; a first waveguide located on isolation layer; and at least one heating element located on the isolation layer and not overlapping with the first waveguide in a direction perpendicular to a bottom surface of the substrate. The thermo-optic phase modulation module is provided with a plurality of side heat insulation grooves extending downwardly from a top surface and exposing the substrate, and the plurality of side heat insulation grooves are arranged around the first waveguide and the at least one heating element.

1 . A thermo-optic phase modulation module, comprising:
 a substrate;   an isolation layer located on the substrate;   a first waveguide located on the isolation layer; and   at least one heating element located on the isolation layer and not overlapping with the first waveguide in a direction perpendicular to a bottom surface of the substrate;   wherein the thermo-optic phase modulation module is provided with a plurality of side heat insulation grooves extending downwardly from a top surface and exposing the substrate, and the plurality of side heat insulation grooves are arranged around the first waveguide and the at least one heating element.   
     
     
         2 . The thermo-optic phase modulation module according to  claim 1 , further comprising:
 a second waveguide located between the isolation layer and the first waveguide, and integrally connected to the first waveguide to form a ridge waveguide structure.   
     
     
         3 . The thermo-optic phase modulation module according to  claim 2 , wherein
 the at least one heating element is formed on an upper surface of the isolation layer and does not overlap with the second waveguide in the direction perpendicular to the bottom surface of the substrate.   
     
     
         4 . The thermo-optic phase modulation module according to  claim 2 , wherein
 the at least one heating element is formed on an upper surface of the second waveguide.   
     
     
         5 . The thermo-optic phase modulation module according to  claim 1 , further comprising:
 a plurality of wires connected to the at least one heating element, which are located on the isolation layer and overlap with none of the first waveguide and the plurality of side heat insulation grooves in the direction perpendicular to the bottom surface of the substrate.   
     
     
         6 . The thermo-optic phase modulation module according to  claim 5 , wherein
 the thermo-optic phase modulation module comprises a first end face and a second end face arranged opposite to each other, and a third end face and a fourth end face arranged opposite to each other, wherein the first waveguide extends to the first end face and the second end face, and the plurality of wires extend to at least one of the third end face or the fourth end face.   
     
     
         7 . The thermo-optic phase modulation module according to  claim 1 , further comprising:
 a covering layer for covering the first waveguide and the at least one heating element.   
     
     
         8 . The thermo-optic phase modulation module according to  claim 1 , wherein
 a side of the substrate facing the isolation layer is provided with a bottom heat insulation groove for communicating bottom portions of the plurality of side heat insulation grooves with each other.   
     
     
         9 . The thermo-optic phase modulation module according to  claim 8 , wherein
 the at least one heating element comprises one heating element, an orthographic projection of the one heating element onto the bottom surface of the substrate being rectangular, and an orthographic projection of each side heat insulation groove of the plurality of side heat insulation grooves onto the bottom surface of the substrate being rectangular, and the plurality of side heat insulation grooves comprise a first side heat insulation groove, a second side heat insulation groove, a third side heat insulation groove and a fourth side heat insulation groove, wherein:   a long side of the orthographic projection of the one heating element onto the bottom surface of the substrate, a long side of the orthographic projection of the first side heat insulation groove onto the bottom surface of the substrate, and a long side of the orthographic projection of the second side heat insulation groove onto the bottom surface of the substrate are substantially parallel to an extension direction of the first waveguide; and   a long side of the orthographic projection of the third side heat insulation groove onto the bottom surface of the substrate and a long side of the orthographic projection of the fourth side heat insulation groove onto the bottom surface of the substrate are substantially orthogonal to the extension direction of the first waveguide.   
     
     
         10 . The thermo-optic phase modulation module according to  claim 8 , wherein
 the at least one heating element comprises a plurality of heating elements, and orthographic projections of the plurality of heating elements onto the bottom surface of the substrate are distributed on one side or two sides of an orthographic projection of the first waveguide onto the bottom surface of the substrate.   
     
     
         11 . The thermo-optic phase modulation module according to  claim 8 , wherein the at least one heating element is any-ene at least one of a metal heating element, a ceramic heating element, a nanomaterial heating element, a microcrystalline heating element, or an infrared heating element. 
     
     
         12 . An optical modulator, comprising: a thermo-optic phase modulation module, wherein the thermo-optic phase modulation module comprises:
 a substrate;   an isolation layer located on the substrate;   a first waveguide located on the isolation layer; and   at least one heating element located on the isolation layer and not overlapping with the first waveguide in a direction perpendicular to a bottom surface of the substrate;   wherein the thermo-optic phase modulation module is provided with a plurality of side heat insulation grooves extending downwardly from a top surface and exposing the substrate, and the plurality of side heat insulation grooves are arranged around the first waveguide and the at least one heating element.   
     
     
         13 . The optical modulator according to  claim 12 , wherein the thermo-optic phase modulation module further comprises:
 a second waveguide located between the isolation layer and the first waveguide, and integrally connected to the first waveguide to form a ridge waveguide structure.   
     
     
         14 . The optical modulator according to  claim 13 , wherein
 the at least one heating element is formed on an upper surface of the isolation layer and does not overlap with the second waveguide in the direction perpendicular to the bottom surface of the substrate.   
     
     
         15 . The optical modulator according to  claim 13 , wherein
 the at least one heating element is formed on an upper surface of the second waveguide.   
     
     
         16 . The optical modulator according to  claim 12 , wherein the thermo-optic phase modulation module further comprises:
 a plurality of wires connected to the at least one heating element, which are located on the isolation layer and overlap with none of the first waveguide and the plurality of side heat insulation grooves in the direction perpendicular to the bottom surface of the substrate.   
     
     
         17 . The optical modulator according to  claim 16 , wherein
 the thermo-optic phase modulation module comprises a first end face and a second end face arranged opposite to each other, and a third end face and a fourth end face arranged opposite to each other, wherein the first waveguide extends to the first end face and the second end face, and the plurality of wires extend to at least one of the third end face or the fourth end face.   
     
     
         18 . The optical modulator according to  claim 12 , wherein the thermo-optic phase modulation module further comprises:
 a covering layer for covering the first waveguide and the at least one heating element.   
     
     
         19 . The optical modulator according to  claim 12 , wherein
 a side of the substrate facing the isolation layer is provided with a bottom heat insulation groove for communicating bottom portions of the plurality of side heat insulation grooves with each other.   
     
     
         20 . The optical modulator according to  claim 19 , wherein
 the at least one heating element comprises one heating element, an orthographic projection of the one heating element onto the bottom surface of the substrate being rectangular, and an orthographic projection of each side heat insulation groove of the plurality of side heat insulation grooves onto the bottom surface of the substrate being rectangular, and the plurality of side heat insulation grooves comprise a first side heat insulation groove, a second side heat insulation groove, a third side heat insulation groove and a fourth side heat insulation groove, wherein:   a long side of the orthographic projection of the one heating element onto the bottom surface of the substrate, a long side of the orthographic projection of the first side heat insulation groove onto the bottom surface of the substrate, and a long side of the orthographic projection of the second side heat insulation groove onto the bottom surface of the substrate are substantially parallel to an extension direction of the first waveguide; and   a long side of the orthographic projection of the third side heat insulation groove onto the bottom surface of the substrate and a long side of the orthographic projection of the fourth side heat insulation groove onto the bottom surface of the substrate are substantially orthogonal to the extension direction of the first waveguide.