Clean room module
Abstract
The present invention relates to a clean room module, which includes: a housing defining an accommodation cavity therein and formed with an air inlet and an air outlet; a gas circulation device arranged at the housing, with two ends thereof being connected to the air inlet and the air outlet respectively, the housing and the gas circulation device being both sealed to define a confined space without gas exchange with outside; and a filter arranged in the gas circulation device, wherein the gas in the accommodation cavity is drawn out from the air outlet through the gas circulation device, filtered by the filter, and sent back to the accommodation cavity from the air inlet. The clean room module of the present application can significantly reduce the time required for the accommodation cavity to reach a preset cleanliness after the cleaning function is activated.
Claims
exact text as granted — not AI-modified1 . A clean room module, comprising:
a housing defining an accommodation cavity therein and formed with an air inlet and an air outlet; a gas circulation device arranged at the housing, with two ends thereof being connected to the air inlet and the air outlet respectively, the housing and the gas circulation device being both sealed to define a confined space without gas exchange with the outside; and a filter arranged in the gas circulation device, wherein a gas in the accommodation cavity is drawn out from the air outlet through the gas circulation device, filtered by the filter, and sent back to the accommodation cavity from the air inlet.
2 . The clean room module according to claim 1 , wherein each movable joint of the clean room module is provided with a silicone rubber ring.
3 . The clean room module according to claim 1 , wherein the gas circulation device is arranged on the top of the housing, and the housing is further provided with an openable side cover.
4 . The clean room module according to claim 1 , wherein the gas circulation device comprises:
a cassette, the filter being arranged within the cassette, the cassette being mounted at the air outlet so that the filter is close to the air outlet; a pipe with one end being connected to the cassette and the other end being connected to the air inlet; and a fan facing the filter.
5 . The clean room module according to claim 4 , wherein the cassette comprises an openable top cover.
6 . The clean room module according to claim 1 , further comprising a partition wall arranged in the housing, wherein,
the partition wall divides the accommodation cavity within the housing into a first cavity and a second cavity, the air inlet being arranged at a part of the housing corresponding to the first cavity, the air outlet being arranged at a part of the housing corresponding to the second cavity; the partition wall is provided with a communication hole; the gas in the second cavity being drawn out from the air outlet through the gas circulation device, filtered by the filter, sent into the first cavity from the air inlet, and returned to the second cavity through the communication hole.
7 . The clean room module according to claim 6 , wherein the communication hole is arranged at a side of the partition wall away from the gas circulation device.
8 . The clean room module according to claim 6 , wherein the first cavity serves as a working space within the clean room, and is located in the middle of the accommodation cavity.
9 . The clean room module according to claim 6 , wherein the second cavity serves as a working space within the clean room, and is located in the middle of the accommodation cavity.
10 . The clean room module according to claim 9 , wherein the gas circulation device comprises:
a cassette, the filter being arranged within the cassette, the cassette being mounted at the air outlet so that the filter is close to the air outlet; a pipe with one end being connected to the cassette and the other end being connected to the air inlet; and a fan arranged beside the filter, with two sides thereof respectively facing the filter and a connection port between the pipe and the cassette, a blowing direction of the fan and a direction in which the air outlet is directed being perpendicular to each other.
11 . The clean room module according to claim 6 , wherein a plurality of communication holes are dispersedly arranged in the partition wall.Join the waitlist — get patent alerts
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