Pilot unit

Abstract

A pilot unit for an abatement apparatus and a method are disclosed. The pilot unit is for an abatement apparatus configured to abate an effluent stream from a semiconductor processing tool. the pilot unit comprises: a housing retaining a foraminous pilot surface. the housing and foraminous pilot surface defining a plenum which is configured to convey fuel and oxidant from a corresponding housing inlet and through that foraminous pilot surface: and an ignitor configured to ignite the fuel and oxidant when exiting the foraminous pilot surface. In this way. rather than having an ignition flame combusting from a nozzle. an ignition flame is provided across the foraminous pilot surface which provides for a more reliable ignition source for the abatement apparatus.

1 . A pilot unit for an abatement apparatus configured to abate an effluent stream from a semiconductor processing tool, said pilot unit comprising:
 a housing retaining a foraminous pilot surface, said housing and foraminous pilot surface defining a plenum which is configured to convey fuel and oxidant from a corresponding housing inlet and through that foraminous pilot surface; and   an ignitor configured to ignite said fuel and oxidant when exiting said foraminous pilot surface.   
     
     
         2 . The pilot unit of  claim 1 , wherein said foraminous pilot surface is positioned on one of an external and an outer surface of said housing. 
     
     
         3 . The pilot unit of  claim 1 , wherein said foraminous pilot surface is shaped to fit proximate a burner of said abatement apparatus. 
     
     
         4 . The pilot unit of  claim 1 , wherein said foraminous pilot surface is shaped to fit proximate at least one of a plurality of burners of said abatement apparatus. 
     
     
         5 . The pilot unit of  claim 4 , wherein said foraminous pilot surface is at least one of:
 shaped to abut at least one of said plurality of burners of said abatement apparatus;   shaped to abut a combustion surface of at least one of said plurality of burners of said abatement apparatus;   shaped to provide a continuation of a combustion surface of at least one of said plurality of burners of said abatement apparatus;   shaped to extend along an edge of at least one of said plurality of burners of said abatement apparatus; and   shaped to extend along at least a portion of a perimeter of at least one of said plurality of burners of said abatement apparatus.   
     
     
         6 . The pilot unit of  claim 4 , wherein said pilot unit is at least one of:
 configured to locate said foraminous pilot surface to ignite fuel and oxidant exiting at least one of said plurality of burners of said abatement apparatus; and   configured to locate said foraminous pilot surface towards an exhaust of at least one of said plurality of burners of said abatement apparatus.   
     
     
         7 . The pilot unit of  claim 1 , wherein said foraminous pilot surface is at least one of planar and elongate. 
     
     
         8 . The pilot unit of  claim 1 , wherein said foraminous pilot surface defines at least one aperture to receive at least one of said ignitor, a sight port and a sensor. 
     
     
         9 . The pilot unit of  claim 1 , wherein said foraminous pilot surface comprises a plurality of adjacent foraminous pilot surfaces. 
     
     
         10 . The pilot unit of  claim 9 , wherein one of said plurality of adjacent foraminous pilot surfaces defines said at least one aperture. 
     
     
         11 . The pilot unit of  claim 1 , wherein said housing comprises a main housing and a removably retained sub-housing, said foraminous pilot surface by retained by said sub-housing. 
     
     
         12 . The pilot unit of  claim 11 , wherein said main housing is formed of material having at least one of a lower use temperature and lower oxidation resistance than material forming said sub-housing. 
     
     
         13 . The pilot unit of  claim 11 , wherein said main housing defines a main plenum and said sub-housing defines a sub-plenum, said sub-plenum being in fluid communication with said main plenum. 
     
     
         14 . The pilot unit of  claim 1 , wherein:
 said ignitor comprises a nozzle configured to generate a pilot flame to ignite said fuel and oxidant exiting said foraminous pilot surface; and   wherein said nozzle is retained within said pilot unit.   
     
     
         15 . (canceled) 
     
     
         16 . The pilot unit of  claim 14 , wherein said nozzle comprises a nozzle conduit extending through said plenum. 
     
     
         17 . The pilot unit of  claim 14 , comprising a fuel and oxidant manifold having a plurality of inlets, each inlet being configured to receive at least one of said fuel and oxidant and configured to deliver said fuel and oxidant to said nozzle and said plenum in different stochiometric ratios. 
     
     
         18 . The pilot unit of  claim 17 , wherein said manifold delivers said fuel and oxidant to said nozzle with a richer ratio of fuel to oxidant compared to fuel to oxidant delivered to said plenum. 
     
     
         19 . The pilot unit of  claim 17 , wherein said manifold comprises at least one flow mixer configured to vary a mix of said fuel and oxidant to at least one of said nozzle and said plenum. 
     
     
         20 . The pilot unit of  claim 1 , wherein said housing comprises a plurality of upstands configured to extend to at least said foraminous pilot surface. 
     
     
         21 . An abatement apparatus comprising:
 a pilot unit configured to abate an effluent stream from a semiconductor processing tool, said pilot unit comprising:
 a housing retaining a foraminous pilot surface, said housing and foraminous pilot surface defining a plenum which is configured to convey fuel and oxidant from a corresponding housing inlet and through that foraminous pilot surface; and 
 an ignitor configured to ignite said fuel and oxidant when exiting said foraminous pilot surface. 
   
     
     
         22 . A method, comprising:
 retaining a foraminous pilot surface in a housing to define a plenum;   conveying fuel and oxidant from a corresponding housing inlet, through said plenum to said foraminous pilot surface; and
 igniting said fuel and oxidant when exiting said foraminous pilot surface.