Soft magnetic alloy particle and inductor including the same

Abstract

Soft magnetic alloy particles according to the present disclosure include nanocrystals and amorphous phase and Fe (iron) and Ge (germanium). An average content of Ge in the amorphous phase is Ge(a) (at %) and an average content of Ge in the nanocrystal is Ge(c) (at %), and Ge(a)−Ge(c)>0.

What is claimed is: 
     
         1 . Soft magnetic alloy particles, comprising:
 nanocrystals and amorphous phase, and Fe (iron) and Ge (germanium),   wherein an average content of Ge in the amorphous phase is Ge(a) (at %), an average content of Ge in the nanocrystals is Ge(c) (at %), and Ge(a)−Ge(c)>0.   
     
     
         2 . The soft magnetic alloy particles of  claim 1 , wherein
 a composition of the soft magnetic alloy particles is represented by Composition Formula 1:
   Fe a Co b Ge c M d   Composition Formula 1
 
   wherein, in Composition Formula 1, a, b, c, and d represent an atomic percentage content (at %) of corresponding elements, respectively, 0<a≤90, 0≤b≤10, 0<c≤5, 0<d≤20, a+b+c+d=100, and   M includes B, P, Cu, Nb, Cr, C, Ni, Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, O, S, or a combination thereof.   
     
     
         3 . The soft magnetic alloy particles of  claim 2 , wherein
 the M does not include Si.   
     
     
         4 . The soft magnetic alloy particles of  claim 2 , wherein
 c satisfies 0.5≤c≤4.   
     
     
         5 . The soft magnetic alloy particles of  claim 2 , wherein
 a satisfies 70≤a≤80.   
     
     
         6 . The soft magnetic alloy particles of  claim 2 , wherein
 b satisfies 2≤b≤6.   
     
     
         7 . The soft magnetic alloy particles of  claim 2 , wherein
 a and b satisfy 75≤a+b≤90.   
     
     
         8 . The soft magnetic alloy particles of  claim 2 , wherein
 d satisfies 10≤d≤20.   
     
     
         9 . The soft magnetic alloy particles of  claim 2 , wherein
 Ge(a) and Ge(c) satisfy 0.1≤Ge(a)−Ge(c)≤0.7.   
     
     
         10 . The soft magnetic alloy particles of  claim 2 , wherein
 M includes B, P, Cu, or a combination thereof.   
     
     
         11 . The soft magnetic alloy particles of  claim 1 , wherein
 crystallinity of the soft magnetic alloy particles is greater than or equal to about 59% and less than or equal to about 70%.   
     
     
         12 . The soft magnetic alloy particles of  claim 1 , wherein
 an average crystal size of the nanocrystals is less than or equal to about 20 nm.   
     
     
         13 . An inductor comprising:
 a body including a magnetic material including soft magnetic alloy particles;   a coil in the body; and   an external electrode on an outer surface of the body,   wherein the soft magnetic alloy particles include nanocrystals and amorphous phase, and include Fe (iron) and Ge (germanium), and an average content of Ge in the amorphous phase is Ge(a) (at %) and an average content of Ge in the nanocrystal is Ge(c) (at %), and Ge(a)−Ge(c)>0.   
     
     
         14 . The inductor of  claim 13 , wherein
 a composition of the soft magnetic alloy particles is represented by Composition Formula 1:
   Fe a Co b Ge c M d   Composition Formula 1
 
   wherein, in Composition Formula 1, a, b, c, and d represent an atomic percentage content (at %) of corresponding elements, respectively, 0<a≤90, 0≤b≤10, 0<c≤5, 0<d≤20, a+b+c+d=100, and   M includes B, P, Cu, Nb, Cr, C, Ni, Al, Mn, Ag, Zn, Sn, As, Sb, Bi, N, O, S, or a combination thereof.   
     
     
         15 . The inductor of  claim 14 , wherein
 M does not include Si.   
     
     
         16 . The inductor of  claim 14 , wherein
 c satisfies 0.5≤c≤4.   
     
     
         17 . The inductor of  claim 13 , wherein
 crystallinity of the soft magnetic alloy particles is greater than or equal to about 59% and less than or equal to about 70%.   
     
     
         18 . The inductor of  claim 13 , wherein
 an average crystal size of the nanocrystals is less than or equal to about 20 nm.   
     
     
         19 . The inductor of  claim 13 , wherein
 the coil includes a support member and an upper coil and a lower coil respectively on upper and lower surfaces of the support member, and   the upper coil and the lower coil are connected through a via penetrating the support member,   
     
     
         20 . The inductor of  claim 13 , wherein
 the body includes a mold portion, a cover portion on one surface of the mold portion, and a core protruding from one surface of the mold portion,   wherein the coil is between one surface of the mold portion and the cover portion, and the core penetrates through the coil.   
     
     
         21 . The inductor of  claim 13 , wherein
 the body includes a plurality of magnetic sheets including the magnetic material.