US2024420979A1PendingUtilityA1

Equipment front end module

83
Assignee: WOO BUM JEPriority: Oct 23, 2020Filed: Aug 28, 2024Published: Dec 19, 2024
Est. expiryOct 23, 2040(~14.2 yrs left)· nominal 20-yr term from priority
Inventors:Bum Je Woo
H10P 72/3218H10P 72/1922H10P 72/1916H10P 72/0466H10P 72/0464H10P 72/0454H10P 72/1926H10P 72/0402H10P 72/3406H01L 21/6773H01L 21/67386H01L 21/67376H01L 21/67201H01L 21/67196H01L 21/67167H01L 21/67393H10P 72/3408H10P 72/0441
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Claims

Abstract

Proposed is an EFEM configured to perform wafer transfer between a wafer storage device and process equipment. More particularly, proposed is an EFEM that prevents harmful gases inside a transfer chamber in which wafer transfer is performed from escaping out of the EFEM.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An equipment front end module (EFEM), comprising:
 a transfer chamber in which wafers are transferred between a wafer storage device and process equipment;   a first opening allowing connection of a FOUP of the wafer storage device to the transfer chamber;   a first door provided in the transfer chamber so as to open and close an inside of the first opening; and   a first chamber surrounding the transfer chamber at a position outside the transfer chamber.   
     
     
         2 . The EFEM of  claim 1 , further comprising:
 a controller controlling that a pressure inside the first chamber is maintained lower than that inside the transfer chamber.   
     
     
         3 . The EFEM of  claim 2 , further comprising:
 a second chamber surrounding the first chamber at a position outside the first chamber.   
     
     
         4 . The EFEM of  claim 3 , wherein the controller controls that the pressure inside the first chamber is maintained lower than that inside the second chamber. 
     
     
         5 . The EFEM of  claim 4 , wherein the controller controls that the pressure inside the second chamber is maintained higher than that inside the transfer chamber. 
     
     
         6 . The EFEM of  claim 1 , further comprising:
 a transfer chamber supply part for supplying gas into the transfer chamber and communicating with the first chamber.   
     
     
         7 . The EFEM of  claim 3 , further comprising:
 a transfer chamber supply part for supplying gas into the transfer chamber and communicating with the second chamber.

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