Deposition source

Abstract

A deposition source includes a first frame including a lower space of a first crucible, a lower space of a second crucible, and a first partition wall disposed between the lower space of the first crucible and the lower space of the second crucible; and a second frame including an upper space of the first crucible, an upper space of the second crucible, a first nozzle connected to the first crucible, a second nozzle connected to the second crucible, and a second partition wall disposed between the upper space of the first crucible and the upper space of the second crucible, wherein an exhaust passage is disposed between the first partition wall of the first frame and the second partition wall of the second frame, and the first partition wall contacts the second partition wall.

What is claimed is: 
     
         1 . A deposition source comprising:
 a first frame including:
 a lower space of a first crucible, 
 a lower space of a second crucible, and 
 a first partition wall disposed between the lower space of the first crucible and the lower space of the second crucible; and 
   a second frame including:
 an upper space of the first crucible, 
 an upper space of the second crucible, 
 a first nozzle connected to the first crucible, 
 a second nozzle connected to the second crucible, and 
 a second partition wall disposed between the upper space of the first crucible and the upper space of the second crucible, wherein 
   an exhaust passage is disposed between the first partition wall of the first frame and the second partition wall of the second frame, and   the first partition wall of the first frame contacts the second partition wall of the second frame.   
     
     
         2 . The deposition source of  claim 1 , wherein the first nozzle and the second nozzle are arranged in a first direction. 
     
     
         3 . The deposition source of  claim 2 , wherein the exhaust passage extends in the first direction. 
     
     
         4 . The deposition source of  claim 3 , wherein the first crucible and the second crucible are arranged in a second direction intersecting the first direction. 
     
     
         5 . The deposition source of  claim 4 , wherein each of the first crucible and the second crucible extends in the first direction. 
     
     
         6 . The deposition source of  claim 1 , further comprising:
 a fastening member penetrating the exhaust passage and fastening the first partition wall and the second partition wall.   
     
     
         7 . The deposition source of  claim 6 , wherein the fastening member is a bolt. 
     
     
         8 . The deposition source of  claim 1 , wherein
 a lower portion of the exhaust passage is formed as a portion of the first partition wall, and   an upper portion of the exhaust passage is formed as a portion of the second partition wall.   
     
     
         9 . The deposition source of  claim 8 , wherein
 the upper portion of the exhaust passage is formed as a trench of the second partition wall, and   the lower portion of the exhaust passage is formed as a flat surface of the first partition wall.   
     
     
         10 . The deposition source of  claim 8 , wherein
 the upper portion of the exhaust passage is formed as a flat surface of the second partition wall, and   the lower portion of the exhaust passage is formed as a trench of the first partition wall.   
     
     
         11 . The deposition source of  claim 8 , wherein
 the upper portion of the exhaust passage is formed as a trench of the second partition wall, and   the lower portion of the exhaust passage is formed as a trench of the first partition wall.   
     
     
         12 . A deposition source comprising:
 a (1-1)th frame including a lower space of a first crucible;   a (1-2)th frame including a lower space of a second crucible; and   a second frame including:
 an upper space of the first crucible, 
 an upper space of the second crucible, 
 a first nozzle connected to the first crucible, and 
 a second nozzle connected to the second crucible, wherein 
   a first portion of a partition wall of the second frame disposed between the first crucible and the second crucible contacts the (1-1)th frame, and   a second portion of the partition wall of the second frame contacts the (1-2)th frame.   
     
     
         13 . The deposition source of  claim 12 , wherein a portion of the (1-1)th frame in contact with the first portion of the partition wall of the second frame is spaced apart from a portion of the (1-2)th frame in contact with the second portion of the partition wall of the second frame. 
     
     
         14 . The deposition source of  claim 12 , wherein the first nozzle and the second nozzle are arranged in a first direction. 
     
     
         15 . The deposition source of  claim 14 , wherein the first crucible and the second crucible are arranged in a second direction intersecting the first direction. 
     
     
         16 . The deposition source of  claim 15 , wherein each of the first crucible and the second crucible extends in the first direction. 
     
     
         17 . A deposition source comprising:
 a first frame including a lower space of a first crucible and a lower space of a second crucible;   a (2-1)th frame including:
 an upper space of the first crucible, and 
 a first nozzle connected to the first crucible; and 
   a (2-2)th frame including:
 an upper space of the second crucible, and 
 a second nozzle connected to the second crucible, wherein 
   a first portion of a partition wall of the first frame disposed between the first crucible and the second crucible contacts the (2-1)th frame, and   a second portion of the partition wall of the first frame contacts the (2-2)th frame.   
     
     
         18 . The deposition source of  claim 17 , wherein a portion of the (2-1)th frame in contact with the first portion of the partition wall of the first frame is spaced apart from a portion of the (2-2)th frame in contact with the second portion of the partition wall of the first frame. 
     
     
         19 . The deposition source of  claim 17 , wherein the first nozzle and the second nozzle are arranged in a first direction. 
     
     
         20 . The deposition source of  claim 19 , wherein the first crucible and the second crucible are arranged in a second direction intersecting the first direction.