Cryopump system, cryopump monitoring method, and non-transitory computer readable medium storing cryopump monitoring program

Abstract

A cryopump system includes a sensor that measures a measurement parameter related to the cryopump system, a cryopump controller that is configured to receive the measurement parameter from the sensor, to determine an operation parameter of the cryopump system such that the measurement parameter follows a target value, and to operate the cryopump system with the determined operation parameter, and a cryopump monitor that is configured to acquire time-series data of the measurement parameter and time-series data of the operation parameter and to display a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.

What is claimed is: 
     
         1 . A cryopump system comprising:
 a sensor that measures a measurement parameter related to the cryopump system;   a cryopump controller that is configured to receive the measurement parameter from the sensor, to determine an operation parameter of the cryopump system such that the measurement parameter follows a target value, and to operate the cryopump system with the determined operation parameter; and   a cryopump monitor that is configured to acquire time-series data of the measurement parameter and time-series data of the operation parameter and to display a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.   
     
     
         2 . The cryopump system according to  claim 1 ,
 wherein the cryopump monitor is configured to display the time-series graph of the measurement parameter and the time-series graph of the operation parameter to be arranged so that the target value of the measurement parameter and a limit value of the operation parameter are close to each other.   
     
     
         3 . The cryopump system according to  claim 2 ,
 wherein the cryopump monitor is configured to determine a display position of the target value of the measurement parameter at an edge portion of a first display area where the time-series graph of the measurement parameter is displayed and to determine a display position of the limit value of the operation parameter at an edge portion close to the edge portion of the first display area, among edge portions of a second display area where the time-series graph of the operation parameter is displayed.   
     
     
         4 . The cryopump system according to  claim 1 ,
 wherein the cryopump monitor is configured to display a mark indicating that diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axes.   
     
     
         5 . The cryopump system according to  claim 4 ,
 wherein the cryopump monitor is configured to display diagnosis information of the cryopump system associated with the mark in response to designation of the mark by an operator.   
     
     
         6 . The cryopump system according to  claim 1 , further comprising:
 a second sensor that measures a second measurement parameter related to the cryopump system, which is different from the measurement parameter,   wherein the cryopump monitor is configured to acquire time-series data of the second measurement parameter and to also display a time-series graph of the second measurement parameter together with the time-series graphs of the measurement parameter and the operation parameter with the time axes thereof aligned with each other.   
     
     
         7 . The cryopump system according to  claim 1 , comprising:
 a plurality of cryopumps; and   a plurality of sensors that each measure a measurement parameter related to a corresponding cryopump among the plurality of cryopumps,   wherein the cryopump controller is configured to, for each of the plurality of cryopumps, receive the measurement parameter from a corresponding sensor among the plurality of sensors, to determine an operation parameter of that cryopump such that the measurement parameter follows a target value, and to operate that cryopump with the determined operation parameter, and   the cryopump monitor is configured to, for each of the plurality of cryopumps, acquire time-series data of the measurement parameter and time-series data of the operation parameter and to display a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.   
     
     
         8 . The cryopump system according to  claim 7 ,
 wherein the cryopump monitor is configured to collectively display a plurality of the time-series graphs of the measurement parameters for the plurality of cryopumps and to collectively display a plurality of the time-series graphs of the operation parameters for the plurality of cryopumps.   
     
     
         9 . The cryopump system according to  claim 1 , comprising:
 a plurality of cryopumps;   a plurality of sensors that each measure a measurement parameter related to a corresponding cryopump among the plurality of cryopumps; and   a plurality of controllers that individually control the plurality of cryopumps, instead of the cryopump controller,   wherein each controller is configured to, for the corresponding cryopump among the plurality of cryopumps, receive the measurement parameter from a corresponding sensor among the plurality of sensors, to determine an operation parameter of the corresponding cryopump such that the measurement parameter follows a target value, and to operate the corresponding cryopump with the determined operation parameter, and   the cryopump monitor is configured to, for each of the plurality of cryopumps, acquire time-series data of the measurement parameter and time-series data of the operation parameter and to display a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.   
     
     
         10 . A cryopump monitoring method comprising:
 acquiring time-series data of a measurement parameter related to a cryopump system;   acquiring time-series data of an operation parameter of the cryopump system, which is controlled such that the measurement parameter follows a target value; and   displaying a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.   
     
     
         11 . The cryopump monitoring method according to  claim 10 ,
 wherein the displaying includes displaying the time-series graph of the measurement parameter and the time-series graph of the operation parameter to be arranged so that the target value of the measurement parameter and a limit value of the operation parameter are close to each other.   
     
     
         12 . The cryopump monitoring method according to  claim 11 ,
 wherein the displaying includes determining a display position of the target value of the measurement parameter at an edge portion of a first display area where the time-series graph of the measurement parameter is displayed and determining a display position of the limit value of the operation parameter at an edge portion close to the edge portion of the first display area, among edge portions of a second display area where the time-series graph of the operation parameter is displayed.   
     
     
         13 . The cryopump monitoring method according to  claim 10 ,
 wherein the displaying includes displaying a mark indicating that diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axes.   
     
     
         14 . The cryopump monitoring method according to  claim 13 ,
 wherein the displaying includes displaying diagnosis information of the cryopump system associated with the mark in response to designation of the mark by an operator.   
     
     
         15 . The cryopump monitoring method according to  claim 10 , further comprising:
 acquiring time-series data of a second measurement parameter related to the cryopump system, which is different from the measurement parameter,   wherein the displaying includes also displaying a time-series graph of the second measurement parameter together with the time-series graphs of the measurement parameter and the operation parameter with the time axes thereof aligned with each other.   
     
     
         16 . A non-transitory computer readable medium storing a cryopump monitoring program, the cryopump monitoring program when executed by a processor, causing the computer to:
 acquire time-series data of a measurement parameter related to a cryopump system;   acquire time-series data of an operation parameter of the cryopump system, which is controlled such that the measurement parameter follows a target value; and   display a time-series graph of the measurement parameter and a time-series graph of the operation parameter with time axes thereof aligned with each other.