Enclosed cavity structures

Abstract

An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.

1 . A component structure, comprising:
 a substrate having a substrate surface;   one or more cavity walls extending from the substrate surface, the one or more cavity walls at least partially defining a cavity over the substrate, wherein the substrate defines a bottom of the cavity; and   a component suspended by a component support that connects to at least one side of the component,   wherein the component support is disposed on the one or more cavity walls.   
     
     
         2 . The component structure of  claim 1 , wherein the one or more cavity walls comprise a patterned adhesive. 
     
     
         3 . The component structure of  claim 1 , wherein the cavity is at least partially defined by adhesive. 
     
     
         4 . The component structure of  claim 1 , wherein the one or more cavity walls comprise a material different from a material comprised in the substrate. 
     
     
         5 . The component structure of  claim 1 , comprising a structure tether extending from the component support. 
     
     
         6 . The component structure of  claim 5 , wherein the structure tether is a broken or separated tether. 
     
     
         7 . The component structure of  claim 5 , wherein the structure tether is exterior to the cavity. 
     
     
         8 . The component structure of  claim 1 , wherein the one or more cavity walls have a cavity wall perimeter that at least partially surrounds the cavity. 
     
     
         9 . The component structure of  claim 8 , wherein the cavity wall perimeter completely surrounds the cavity. 
     
     
         10 . The component structure of  claim 8 , wherein the cavity wall perimeter forms a rectangle. 
     
     
         11 . The component structure of  claim 1 , wherein the one or more cavity walls extend horizontally beyond at least a portion of an outer perimeter of the component support. 
     
     
         12 . The component structure of  claim 1 , wherein the one or more cavity walls extend horizontally beyond an entirety of the outer perimeter of the component support in a direction parallel to the substrate surface. 
     
     
         13 . The component structure of  claim 1 , wherein (i) the one or more cavity walls have a height or thickness no greater than 10 microns, (ii) the component support has a height or thickness no greater than 10 microns, or (iii) both (i) and (ii). 
     
     
         14 . The component structure of  claim 1 , comprising an electrode that extends from the substrate surface onto and in contact with a portion of the one or more cavity walls and onto and in contact with a portion of the component support. 
     
     
         15 . The component structure of  claim 1 , wherein the substrate surface enclosed by the one or more cavity walls is substantially planar. 
     
     
         16 . The component structure of  claim 1 , wherein the component is disposed over the substrate surface enclosed by the one or more cavity walls. 
     
     
         17 . The component structure of  claim 1 , wherein the component is disposed at least partially within the cavity. 
     
     
         18 . The component structure of  claim 1 , comprising a cap disposed over the component, wherein the cap encloses the cavity. 
     
     
         19 . The component structure of  claim 18 , wherein the cap is disposed on the substrate surface or is disposed on to the one or more cavity walls or is disposed on the component support. 
     
     
         20 . The component structure of  claim 18 , wherein the component support comprises a frame and one or more support portions connecting the frame to the component, and wherein the frame is disposed over and adhered to the one or more cavity walls. 
     
     
         21 - 31 . (canceled)