Cryopump, cryopump control system and cryopump control method

Abstract

This application discloses a cryopump, including a pump housing, a radiation shield in the pump housing, a first-stage cold storage component in the pump housing, a second-stage cold storage component in the holding space of the radiation shield, a connector connecting the first-stage cold storage component and the radiation shield, and a cryopanel assembly in the holding space and connected to the second-stage cold storage component.

What is claimed is: 
     
         1 . A cryopump, including:
 a pump housing;   a radiation shield, arranged in the pump housing, and configured that a holding space is formed inside the radiation shield, a first through hole is arranged on the radiation shield, and the first through hole is connected with the holding space;   a first-stage cold storage component, arranged in the pump housing;   a second-stage cold storage component, arranged in the holding space, and configured that one end of the second-stage cold storage component extends from the first through hole and connects the first-stage cold storage component;   a connector, configured that one end of the connector is connected with the first-stage cold storage component, and other end is connected with the radiation shield; and   a cryopanel assembly, set in the holding space and connected to the second-stage cold storage component.   
     
     
         2 . The cryopump according to  claim 1 , wherein, the connector includes:
 a first tube body, configured that the second-stage cold storage component penetrates the first tube body;   a first end plate, arranged at one end of the first tube body and is connected with the first-stage cold storage component; and   a second end plate, arranged at other end of the first tube body and connected to the radiation shield.   
     
     
         3 . The cryopump according to  claim 2 , wherein, the second-stage cold storage component is coaxially arranged with the first through hole, and a diameter of the second-stage cold storage component is smaller than a diameter of the first through hole. 
     
     
         4 . The cryopump according to  claim 3 , wherein, the connector also includes a second tube body and a annular barrier, an inner diameter of the first tube body is equal to the diameter of the first through hole, the second tube body is slidable in the first tube body, the annular barrier is slidable in the second tube body, and a gap is reserved between an inner wall of the annular barrier and an outer wall of the second-stage cold storage component. 
     
     
         5 . The cryopump according to  claim 4 , wherein, the first-stage cold storage component has a first cooling stage connecting the first end plate, and in an axial direction of the first tube body, a projection of the first end plate is greater than or equal to a projection of the first cooling stage, the projection of the first end plate coincides with a projection of the second end plate. 
     
     
         6 . The cryopump according to  claim 5 , wherein, the connector also includes a screw, the screw is rotated and installed on the first cooling stage, the screw is arranged axially in parallel with the first tube body, the annular barrier is provided with a threaded hole adapted to the screw, and the screw penetrates the annular barrier by adapting the threaded hole. 
     
     
         7 . The cryopump according to  claim 6 , wherein, the connector also includes a guide rod fixed on the first cooling stage, and the guide rod and the screw are arranged in parallel axially; the annular barrier is provided with a second through hole, and the guide rod slides through the annular barrier through the second through hole. 
     
     
         8 . The cryopump according to  claim 7 , wherein, the screw and the guide rod are equal in length and are partially extended into the holding space. 
     
     
         9 . The cryopump according to  claim 8 , wherein, the second tube body includes a tube body part slidable in the first tube body and a blocking part extending from the tube body part; the blocking part is located in the tube body part and away from a side of the first cooling stage, and the annular barrier is between the blocking part and the first cooling stage. 
     
     
         10 . The cryopump according to  claim 2 , wherein, the first-stage cold storage component has a first cooling stage connecting the first end plate, and in an axial direction of the first tube body, a projection of the first end plate is greater than or equal to a projection of the first cooling stage, the projection of the first end plate coincides with a projection of the second end plate. 
     
     
         11 . The cryopump according to  claim 1 , wherein, the cryopump also includes:
 a first pressure detector, arranged on the pump housing to detect a pressure in the pump housing; and   a pressure relief valve, arranged on the pump housing, the pressure relief valve has a valve spool, and the valve spool is configured to open actively; when the first pressure detector detects that the pressure in the pump housing reaches a first set value, the valve spool is opened and maintains a set opening.   
     
     
         12 . A cryopump control system, including:
 the cryopump according to  claim 1 , the cryopump also includes a motor for powering the first-stage cold storage component and the second-stage cold storage component;   a compressor, which has a low-pressure pipeline and a high-pressure pipeline, the low-pressure pipeline and the high-pressure pipeline are used to provide working gas for the first-stage cold storage component and the second-stage cold storage component;   a second pressure detector, used for communicating the compressor and detecting a pressure of the low-pressure pipeline;   a third pressure detector, used for communicating the compressor and detecting a pressure of the high-pressure pipeline; and   a control device, used for communicating the motor and the compressor, and issuing warning information and/or remedial information according to a pressure value or a pressure difference between the low-pressure pipeline and the high-pressure pipeline.   
     
     
         13 . The cryopump control system according to  claim 12 , wherein, also including:
 a cryopump controller, communicated with the motor and the control device, the cryopump controller can obtain operating state parameters of the motor, and the control device evaluates operating conditions of the cryopump and the compressor according to the operating state parameters of the motor and gives maintenance suggestions.   
     
     
         14 . The cryopump control system according to  claim 13 , wherein, the operating state parameters of the motor include current, the cryopump controller obtains the current of the motor, the control device compares the current with a set current, and adjusts a speed of the motor through PID control algorithm. 
     
     
         15 . A cryopump control method applied to the cryopump according to  claim 1 , wherein, including the following steps:
 providing power to the first-stage cold storage component and the second-stage cold storage component;   using a low-pressure pipeline and a high-pressure pipeline of a compressor to provide working gas for the first-stage cold storage component and the second-stage cold storage component;   obtaining a pressure of the low-pressure pipeline of the compressor;   obtaining a pressure of the high-pressure pipeline of the compressor; and   issuing a warning information and/or a remedial information according to a pressure value or a pressure difference between the low-pressure pipeline and the high-pressure pipeline.   
     
     
         16 . The cryopump control method according to  claim 15 , wherein, also including:
 obtaining operating state parameters of a motor, evaluating operating conditions of the cryopump and the compressor according to the operating state parameters of the motor, and giving maintenance suggestions.   
     
     
         17 . The cryopump control method according to  claim 16 , wherein, the operating state parameters of the motor include current, the cryopump control method also including:
 obtaining the current of the motor, comparing the current with a set current, and adjusting a speed of the motor through PID control algorithm.