US2025130444A1PendingUtilityA1

Hybrid spatial light modulator

Assignee: UNIV WASHINGTONPriority: Aug 2, 2023Filed: Jul 30, 2024Published: Apr 24, 2025
Est. expiryAug 2, 2043(~17 yrs left)· nominal 20-yr term from priority
G03H 2225/55G03H 2225/10G03H 2225/20G03H 2223/23G03H 2223/19G03H 2223/17G03H 2223/16G03H 2223/12G02B 6/30G02B 6/124G03H 1/2294G02F 1/01G02F 1/011G02B 6/12004G02B 2006/12107G02B 2006/12142
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Claims

Abstract

Spatial light modulators and associated methods are described. In one embodiment, a spatial light modulator includes a photonic integrated circuit configured for emitting a plurality of light beams as a first waveform by a plurality of pixels. The light beams are individually controllable. The spatial light modulator also includes a meta-optic having a plurality of nanostructures configured for receiving the first waveform and aggregating the plurality of light beams as a second waveform at a surface of the meta-optic. The spatial light modulator also includes an aperture array configured for converting the second waveform into a third waveform, where the third waveform is smaller than the second waveform.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A spatial light modulator, comprising:
 a photonic integrated circuit configured for emitting a plurality of light beams as a first waveform by a plurality of pixels, wherein light beams are individually controllable;   a meta-optic comprising a plurality of nanostructures configured for receiving the first waveform and aggregating the plurality of light beams as a second waveform at a surface of the meta-optic; and   an aperture array configured for converting the second waveform into a third waveform, wherein the third waveform is smaller than the third waveform.   
     
     
         2 . The spatial light modulator of  claim 1 , wherein the plurality of nanostructures are manufactured on a nanometer scale. 
     
     
         3 . The spatial light modulator of  claim 1 , wherein the plurality of nanostructures are distributed on a substrate. 
     
     
         4 . The spatial light modulator of  claim 1 , wherein each pixel of the plurality of the pixels comprises:
 an optical conductor configured for transmitting incoming light;   a modulating ring configured for optically coupling with the optical conductor; and   a grating coupler configured for emitting a light beam out of the photonic integrated circuit.   
     
     
         5 . The spatial light modulator of  claim 4 , wherein the optical conductor, the modulating ring, and the grating coupler are configured at a top side of the photonic integrated circuit, and wherein the grating coupler is configured for emitting the light beam out of the photonic integrated circuit through a bottom side of the photonic integrated circuit. 
     
     
         6 . The spatial light modulator of  claim 4 , further comprising an electrical integrated circuit comprising a plurality of pixel controls configured for controlling the plurality of light beams. 
     
     
         7 . The spatial light modulator of  claim 6 , wherein each pixel control is configured for controlling an amplitude and a phase of corresponding light beam of the plurality of light beams. 
     
     
         8 . The spatial light modulator of  claim 6 , wherein each pixel control comprises a pair of electrodes and an active element, and wherein the active element is configured proximate to the modulating ring. 
     
     
         9 . The spatial light modulator of  claim 8 , wherein the plurality of pixel controls control the plurality of pixels is based on at least one of:
 electrical current passed through the electrodes and the active element;   electromagnetic field produced by the electrodes and the active element; or   microheating over the modulating ring.   
     
     
         10 . The spatial light modulator of  claim 1 , wherein the first waveform, the second waveform and the third waveform have a same resolution. 
     
     
         2 . A method of generating an image by a spatial light modulator, the method comprising:
 emitting a plurality of light beams as a first waveform by a plurality of pixels of a photonic integrated circuit, wherein light beams are individually controllable;   aggregating the plurality of light beams as a second waveform on a surface of a meta-optic, wherein the meta-optic comprises a plurality of nanostructures; and   converting the second waveform into a third waveform by an aperture array, wherein the third waveform is smaller than the second waveform.   
     
     
         12 . The method of claim  11 , wherein the first waveform, the second waveform and the third waveform have a same resolution. 
     
     
         13 . The method of claim  11 , the plurality of nanostructures are manufactured on a nanometer scale. 
     
     
         14 . The method of claim  11 , wherein the plurality of nanostructures are distributed on a substrate. 
     
     
         15 . The method of claim  11 , wherein each pixel of the plurality of the pixels comprises:
 an optical conductor configured for transmitting incoming light;   a modulating ring configured for optically coupling with the optical conductor; and   a grating coupler configured for emitting a light beam out of the photonic integrated circuit.   
     
     
         16 . The method of  claim 15 , wherein the optical conductor, the modulating ring, and the grating coupler are configured at a top side of the photonic integrated circuit, and wherein the grating coupler is configured for emitting the light beam out of the photonic integrated circuit through a bottom side of the photonic integrated circuit. 
     
     
         17 . The method of  claim 15 , further comprising controlling the plurality of light beams by a plurality of pixel controls of an electrical integrated circuit. 
     
     
         18 . The method of  claim 17 , wherein each pixel control is configured for controlling an amplitude and a phase of corresponding light beam of the plurality of light beams. 
     
     
         19 . The method of  claim 17 , wherein each pixel control comprises a pair of electrodes and an active element, and wherein the active element is configured proximate to the modulating ring. 
     
     
         20 . The method of  claim 18 , wherein controlling the amplitude and the phase of corresponding light beam comprises:
 controlling electrical current passed through the electrodes and the active element;   controlling electromagnetic field produced by the electrodes and the active element; or   controlling microheating of the modulating ring.

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