Display substrate and preparation method thereof, display panel and mask

Abstract

Provided are a display substrate and a preparation method thereof, a display panel and a mask. The display substrate includes an underlayer and an organic structure disposed on the underlayer. The organic structure includes a first surface arranged away from the underlayer; in a direction perpendicular to a plane where the underlayer is located, a difference between a maximum distance between the first surface and the underlayer and a minimum distance between the first surface and the underlayer is less than or equal to 0.06 μm.

1 . A display substrate, comprising:
 an underlayer and an organic structure disposed on the underlayer;   wherein the organic structure comprises a first surface arranged away from the underlayer;   in a direction perpendicular to a plane where the underlayer is located, a difference between a maximum distance between the first surface and the underlayer and a minimum distance between the first surface and the underlayer is less than or equal to 0.06 μm.   
     
     
         2 . The display substrate according to  claim 1 , wherein in the direction perpendicular to the plane where the underlayer is located, a distance from a geometric center of the first surface to the underlayer is greater than or equal to an average value of distances from points on the first surface to the underlayer. 
     
     
         3 . The display substrate according to  claim 1 , wherein the organic structure comprises a photo spacer, and a surface of the photo spacer facing away from the underlayer is the first surface. 
     
     
         4 . The display substrate according to  claim 1 , wherein the organic structure comprises color filter patterns, the display substrate comprises a display area and a peripheral area surrounding the display area, a dimension, in the direction perpendicular to the plane where the underlayer is located, of a part of the color filter patterns located in the peripheral area is less than or equal to a dimension, in the direction perpendicular to the plane where the underlayer is located, of a part of the color filter patterns located in the display area;
 a surface on a side facing away from the underlayer in an area not overlapping with an adjacent color filter pattern of the color filter pattern located in the peripheral area is the first surface.   
     
     
         5 . The display substrate according to  claim 3 , wherein a plurality of protrusions and a plurality of dents are provided on the first surface, and each of the dents are located between at least two of the protrusions; a geometric center of the first surface is provided with the protrusion. 
     
     
         6 . The display substrate according to  claim 5 , wherein the organic structure comprises a first cross section, the first cross section is a cross section in the direction perpendicular to the plane where the underlayer is located, and an intersection line of the first cross section and the first surface is parallel to a side of the first surface;
 a number of the protrusions provided at the intersection line of the first surface and the first cross section is an odd number.   
     
     
         7 . The display substrate according to  claim 5 , wherein the organic structure comprises a first cross section, the first cross section is a cross section in the direction perpendicular to the plane where the underlayer is located, an intersection line of the first cross section and the first surface passes through the geometric center of the first surface;
 a number of the protrusions provided at the intersection line of the first surface and the first cross section is an odd number;   wherein an orthographic projection shape of the first surface on the underlayer is a quadrilateral;   the intersection line of the first surface and the first cross section is parallel to a diagonal of the quadrilateral; or   the intersection line of the first surface and the first cross section is parallel to a side of the quadrilateral.   
     
     
         8 . (canceled) 
     
     
         9 . The display substrate according to  claim 5 , wherein the first surface comprises a center area and an edge area surrounding the center area, and the geometric center of the first surface is located in the center area;
 a maximum distance between a part of the protrusions located in the center area and the underlayer is greater than or equal to a maximum distance between a part of the protrusions located in the edge area and the underlayer.   
     
     
         10 . The display substrate according to  claim 3 , wherein a plurality of the protrusions are provided at an outer contour of the first surface, and a maximum distance between a part of the protrusions located on the outer contour of the first surface and the underlayer is less than or equal to a maximum distance between other protrusions and the underlayer. 
     
     
         11 . The display substrate according to  claim 3 , wherein the first surface comprises a center area and an edge area surrounding the center area, and a geometric center of the first surface is located in the center area;
 a curvature radius of a part of protrusions located in the center area is less than or equal to the curvature radius of a part of the protrusions located in the edge area.   
     
     
         12 . The display substrate according to  claim 7 , wherein when the organic structure comprises the photo spacer, the photo spacer comprises a side surface, the side surface being an arc surface, and the intersection line of the side surface and the first cross section is an arc;
 wherein a curvature radius of the arc gradually decreases in a direction away from the underlayer.   
     
     
         13 . (canceled) 
     
     
         14 . The display substrate according to  claim 7 , wherein when the organic structure comprises the photo spacer, a distance between vertices of two adjacent protrusions in a direction parallel to the plane where the underlayer is located is equal to ½˜⅙ of a dimension of a planar figure of the photo spacer in a preset direction, wherein the preset direction is a direction pointing to one of the two adjacent protrusions from the other one of the two adjacent protrusions. 
     
     
         15 . The display substrate according to  claim 7 , wherein the number of the dents provided at the intersection line of the first surface and the first cross section is an even number, and the number of the protrusions is greater than the number of the dents; or
 wherein the number of protrusions provided at the intersection line of the first surface and the first cross section is any one of 3, 5, and 7.   
     
     
         16 . (canceled) 
     
     
         17 . The display substrate according to  claim 1 , wherein in the direction perpendicular to the plane where the underlayer is located, a standard deviation of three times the dimension of the organic structure in the direction perpendicular to the plane where the underlayer is located is less than or equal to 0.2 μm. 
     
     
         18 . A display panel, comprising the display substrate according to  claim 1 . 
     
     
         19 . A mask for preparing the display substrate according to  claim 1 , the mask comprises a plurality of first slits, each of the first slits is provided with a plurality of first light blocking bars arranged in the same direction and a plurality of second light blocking bars arranged in the same direction, the first light blocking bar intersects with at least one of the second light blocking bars, and a planar figure of patterns in the first slit is a shape in mirror symmetry;
 wherein the number of the first light blocking bars is the same as the number of the second light blocking bars;   wherein the first light blocking bar is arranged to be perpendicular to the second light blocking bar;   wherein a minimum spacing between two adjacent first light blocking bars is equal to a minimum spacing between two adjacent second light blocking bars, and minimum spacing between two adjacent first light blocking bars is greater than a width of the first light blocking bar;   wherein the first light blocking bar and the second light blocking bars have a same structure and same dimensions, any one of the first light blocking bars intersects with all the second light blocking bars, and any one of the second light blocking bars intersects with all the first light blocking bars.   
     
     
         20 . (canceled) 
     
     
         21 . (canceled) 
     
     
         22 . (canceled) 
     
     
         23 . (canceled) 
     
     
         24 . The mask according to  claim 19 , wherein the first light blocking bars comprise a first group, a second group and a third group, and the second light blocking bars include a first group, a second group and a third group;
 the first group of the first light blocking bars and the second group of the first light blocking bars each comprise two first light blocking bars, the first group of the second light blocking bars and the second group of the second light blocking bars each comprise two second light blocking bars; the third group of the first light blocking bars comprises one of the first light blocking bars, and the third group of the second light blocking bars comprises one of the second light blocking bars;   the first group of the first light blocking bars intersect with the first group of the second light blocking bars to form a first closed ring; the second group of the first light blocking bars intersect with the second group of the second light blocking bars to form a second closed ring; the second closed ring is located inside the first closed ring; the third group of the first light blocking bars intersects with the third group of the second light blocking bars, and the third group of the first light blocking bars and the third group of the second light blocking bars intersect with the first closed ring and the second closed ring respectively, a geometric center of the mask is located at an intersection of the third group of the first light blocking bars and the third group of the second light blocking bars.   
     
     
         25 . The mask according to  claim 19 , wherein the minimum spacing between two adjacent first light blocking bars ranges from 2.5 μm to 14 μm, and the width of the first light blocking bar ranges from 1 μm to 4 μm. 
     
     
         26 . A preparation method of a display substrate, wherein the method comprises:
 providing an underlayer;   forming a photo spacer material film; and   obtaining a photo spacer by using the mask according to  claim 19  to pattern the photo spacer material film; wherein the photo spacer comprises a first surface that is arranged away from the underlayer and is provided with a plurality of protrusions and a plurality of dents, and the dents are located between at least two protrusions; wherein a geometric center of the first surface is provided with the protrusion; in a direction perpendicular to a plane where the underlayer is located, a difference between a maximum distance between the first surface and the underlayer and a minimum distance between the first surface and the underlayer is less than or equal to 0.06 μm.   
     
     
         27 . The preparation method according to  claim 26 , wherein the obtaining a photo spacer by using the mask to pattern the photo spacer material film comprises:
 determining a preset height and preset planar dimensions of the photo spacer;   determining two parameters among three parameters of a number of the first light blocking bars in the mask, a width of the first light blocking bars, and a minimum spacing between two adjacent first light blocking bars; wherein the number of the first light blocking bars is the same as the number of the second light blocking bars, the width of the first light blocking bars is the same as the width of the second light blocking bars, and the minimum spacing between two adjacent first light blocking bars is the same as the minimum spacing between two adjacent second light blocking bars;   obtaining a preset relationship between an unknown parameter, among the three parameters of the number of the first light blocking bars, the width of the first light blocking bars, and the minimum spacing between two adjacent first light blocking bars, and dimensional parameters of the photo spacer;   determining the unknown parameter of the mask according to the dimensional parameters of the photo spacer and the preset relationship; and   determining specifications of the mask according to the three parameters of the mask, and then obtaining the photo spacer by using the mask to pattern the photo spacer material film;   wherein the determining two parameters among three parameters of a number of the first light blocking bars in the mask, a width of the first light blocking bars, and a minimum spacing between two adjacent first light blocking bars comprises:   determining the number of the first light blocking bars in the mask and the width of the first light blocking bars;   wherein the obtaining a preset relationship between an unknown parameter, among the three parameters of the number of the first light blocking bars, the width of the first light blocking bars, and the minimum spacing between two adjacent first light blocking bars, and dimensional parameters of the photo spacer comprises:   obtaining the preset relationship between the minimum spacing between two adjacent first light blocking bars and the dimensional parameters of the photo spacer; wherein the dimensional parameters comprise the height and planar dimensions.   
     
     
         28 . (canceled) 
     
     
         29 . (canceled) 
     
     
         30 . (canceled) 
     
     
         31 . (canceled)