Polishing systems and methods

Abstract

A frictional displacement resistant conformal dop assembly is provided. A dop head of the dop can include a ball joint including a hemispherical portion received within a housing, the hemispherical portion having a center of rotation proximal to the surface, such that frictional forces applied perpendicular to a movement of the dop head are not associated with reduced conformity of the dop head to a surface interfacing therewith.

What is claimed is: 
     
         1 . A system including:
 a rotatable member comprising a first surface configured to couple with a workpiece, the rotatable member:
 configured for receipt within a housing; 
 configured to rotate about an axis parallel to a lateral plane of the first surface; and 
 having a center of rotation for the axis parallel to the lateral plane which is less than one half of a radius of a substantially hemispherical portion of the rotatable member from the first surface. 
   
     
     
         2 . The system of  claim 1 , wherein the system further comprises:
 a linear actuator configured to apply a clamping force between the workpiece and a polishing wheel during the rotation of the rotatable member about an axis perpendicular to the lateral plane; and   a connection rod coupled with the linear actuator at a first end and the workpiece at a second end.   
     
     
         3 . The system of  claim 2 , wherein the coupling between the second end of the connection rod and the workpiece comprises:
 a non-rotatable coupling between the second end of the connection rod and a housing for the rotatable member; and   a gimbaled coupling between the rotatable member and the housing.   
     
     
         4 . The system of  claim 3 , wherein the housing comprises a single integral portion radially surrounding a portion of the rotatable member. 
     
     
         5 . The system of  claim 3 , wherein:
 the rotatable member comprises:
 the substantially hemispherical portion having a first radial dimension; and 
 a coupler portion having a second dimension less than the first radial dimension; and 
   the housing comprises:
 a first portion comprising a sidewall defining a central cavity, the first portion configured to receive the substantially hemispherical portion into a corresponding hemispherical sidewall portion; and 
 a second portion configured to couple the second end of the connection rod with the first portion of the housing, and having a lower surface that, when assembled with the first portion of the housing, defines a headspace above the coupler portion of the rotatable member. 
   
     
     
         6 . The system of  claim 1 , wherein the substantially hemispherical portion is sub-hemispherical by an amount equal to a thickness of the workpiece and is configured to couple with a plurality of additional workpieces. 
     
     
         7 . The system of  claim 1 , further comprising:
 a redresser comprising a second surface comprising a plurality of protrusions configured to resurface a polishing wheel, the second surface laterally extending a greater dimension than the first surface and configured for receipt with the housing.   
     
     
         8 . The system of  claim 1 , further comprising:
 an environmental enclosure enclosing the rotatable member and the housing, the environmental enclosure configured to maintain positive pressure relative to an external environment.   
     
     
         9 . A polishing apparatus comprising:
 a rotatable member comprising a first surface configured to couple with a workpiece, the rotatable member:
 configured for receipt within a housing; 
 configured to rotate about an axis parallel to a lateral plane of the first surface; and 
 having a center of rotation for the axis parallel to the lateral plane which is less than one half of a radius of a substantially hemispherical portion of the rotatable member from the first surface; 
   the housing;   a polishing arm configured to translate the rotatable member along the lateral plane; and   a motor configured to rotate the rotatable member about an axis perpendicular to the lateral plane.   
     
     
         10 . The polishing apparatus of  claim 9 , further comprising:
 a pneumatic cylinder configured to apply a clamping force between the polishing arm and a connection rod coupled with:   the pneumatic cylinder at a first end via a thrust bearing; and   the housing at a second end.   
     
     
         11 . The polishing apparatus of  claim 10 , wherein the connection rod is coupled with the motor via a chain drive. 
     
     
         12 . The polishing apparatus of  claim 9 , wherein the rotatable member comprises:
 a retaining plate couplable with a second surface of the rotatable member, opposite from the first surface, the retaining plate configured to retain the rotatable member within a central cavity of the housing.   
     
     
         13 . The polishing apparatus of  claim 9 , wherein the housing comprises a single integral portion radially surrounding a portion of the rotatable member. 
     
     
         14 . A method of polishing diamond workpieces, the method comprising:
 coupling a workpiece with a first surface of a rotatable member;   receiving the rotatable member within a housing non-rotatably coupled with a connection rod, the rotatable member configured to rotate about an axis parallel to a lateral plane of the first surface and having a center of rotation for the axis parallel to the lateral plane which is less than one half of a radius of a substantially hemispherical portion of the rotatable member from the first surface; and   applying a clamping force between the connection rod and a polishing wheel simultaneously to rotating the connection rod about the axis of the application of the clamping force.   
     
     
         15 . The method of  claim 14 , wherein the clamping force is transmitted via a thrust bearing along the axis. 
     
     
         16 . The method of  claim 14 , wherein multiple workpieces are coupled with the first surface. 
     
     
         17 . The method of  claim 14 , further comprising:
 removing the rotatable member from the housing;   installing a redresser in the housing; and   applying the clamping force to redress the polishing wheel.   
     
     
         18 . The method of  claim 14 , wherein coupling the workpiece with the first surface comprises:
 forming an adhesive coating over a substrate;   pressing the workpiece into the adhesive coating;   forming a further adhesive over the workpiece;   coupling the workpiece to the first surface using the further adhesive; and   removing the substrate from the workpiece.   
     
     
         19 . The method of  claim 14 , wherein coupling the workpiece with the first surface comprises:
 forming an adhesive coating over a substrate;   laterally surrounding the substrate with a mold ring;   pressing the workpiece into the adhesive coating;   forming an epoxy layer over the workpiece;   coupling the workpiece to the first surface using the epoxy layer; and   removing the substrate from the workpiece.   
     
     
         20 . The method of  claim 14 , wherein coupling the workpiece with the first surface comprises:
 affixing the workpiece to a vacuum chuck using a vacuum pump;   coupling the workpiece to the first surface; and   disengaging the vacuum pump to removing the workpiece from the vacuum chuck.