Method for manufacturing high-density yttria film by atmospheric plasma spraying method and yttria thermal-sprayed film manufactured using same

Abstract

Provided is a method of manufacturing an yttria thermal spray coating having low porosity, high density, and excellent plasma resistance, including arranging a spray unit at a distance of 50 to 130 mm from a base material, subjecting Y2O3 thermal spray powder to atmospheric plasma spraying to form an yttria thermal spray coating on the base material, and supplying water at a rate of 50 to 400 ml/min together with the Y2O3 thermal spray powder.

1 . A method of manufacturing an yttria thermal spray film, the method comprising:
 arranging a spray unit at a distance of 50 to 130 mm from a base material;   subjecting Y2O3 thermal spray powder to atmospheric plasma spraying to form an yttria thermal spray film on the base material; and   supplying water at a rate of 50 to 400 ml/min together with the Y2O3 thermal spray powder,   wherein a water supply location corresponds to a distance of 2:8 to 8:2 between a plasma forming nozzle and the base material.   
     
     
         2 . The method of  claim 1 , wherein in the atmospheric plasma spraying, the spray unit is arranged at a distance of 80 to 120 mm with respect to the base material. 
     
     
         3 . The method of  claim 1 , wherein water is supplied at a rate of 200 to 350 ml/min together with the Y2O3 thermal spray powder. 
     
     
         4 . (canceled) 
     
     
         5 . The method of  claim 1 , wherein the water supply location corresponds to a distance of 3:7 to 5:5 between the plasma forming nozzle and the base material. 
     
     
         6 . The method of  claim 1 , wherein the water supply location corresponds to 25 to 50 mm from a plasma forming nozzle. 
     
     
         7 . The method of  claim 1 , wherein four water supply nozzles through which water is supplied are arranged at 90° intervals from each other and thus water is supplied from four directions. 
     
     
         8 . The method of  claim 1 , wherein eight water supply nozzles through which water is supplied are arranged at 45° intervals from each other and thus water is supplied from eight directions. 
     
     
         9 . The method of  claim 1 , wherein an orifice used in a water supply nozzle is circular in shape, and a size of the orifice is 0.007 to 0.011 inches. 
     
     
         10 . The method of  claim 1 , wherein an average particle size of the Y2O3 thermal spray powder is 5 to 60 μm. 
     
     
         11 . The method of  claim 1 , wherein a thickness of the yttria thermal spray coating film is 100 to 300 μm. 
     
     
         12 . An yttria thermal spray coating formed by the method of manufacturing an yttria thermal spray coating according to  claim 1 . 
     
     
         13 . The yttria thermal spray coating of  claim 12 , wherein a colorimetric measurement value L of the yttria thermal spray coating is 85 or more. 
     
     
         14 . The yttria thermal spray coating of  claim 12 , wherein a porosity of the yttria thermal spray coating is less than 2.6%. 
     
     
         15 . The yttria thermal spray coating of  claim 12 , wherein a porosity of the yttria thermal spray coating is less than 1.0%.