Microwave leak detection method and microwave leak detection device

Abstract

The present invention provides a microwave leakage detection device for use in an explosion-proof area. A microwave leakage detection device 1 includes an explosion-proof sensor 10 a with an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field, and a detection unit 20 configured to detect a microwave leakage in accordance with detection of an increase in at least one of an electric field and a magnetic field by the explosion-proof sensor 10 a . The explosion-proof sensor 10 is an inductive explosion-proof proximity sensor, and includes a detection coil 11 and an internal circuit 12.

1 . A microwave leakage detection method comprising:
 a step of arranging, in an explosion-proof area, one or more sensors with an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field, at a joint portion of flanges of hollow members each having a space into which microwaves are introduced, or on the outer side of a choke structure for preventing microwaves from leaking from inside to outside of the hollow members; and   a step of detecting a microwave leakage in accordance with detection of an increase in at least one of an electric field and a magnetic field by at least one of the one or more sensors.   
     
     
         2 . The microwave leakage detection method according to  claim 1 ,
 wherein each of the one or more sensors is an inductive or capacitive explosion-proof proximity sensor.   
     
     
         3 . The microwave leakage detection method according to  claim 1 or 2 ,
 wherein the one or more sensors are directional.   
     
     
         4 . The microwave leakage detection method according to any one of  claims 1 to 3 ,
 wherein, in the step of detecting a microwave leakage, a microwave leakage is detected when an output from at least one of the one or more explosion-proof sensors is equal to an output that corresponds to object detection.   
     
     
         5 . A microwave leakage detection device comprising:
 a sensor with an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field; and   a detection unit configured to detect a microwave leakage in accordance with detection of an increase in at least one of an electric field and a magnetic field by the sensor,   wherein the sensor is arranged, in an explosion-proof area, at a joint portion of flanges of hollow members each having a space into which microwaves are introduced, or on the outer side of a choke structure for preventing microwaves from leaking from inside to outside of the hollow members.   
     
     
         6 . The microwave leakage detection device according to  claim 5 ,
 wherein the sensor is an inductive or capacitive explosion-proof proximity sensor.   
     
     
         7 . The microwave leakage detection device according to  claim 5 or 6 , further comprising:
 a protective member that is provided so as to surround a detection range of the sensor, and through which microwaves are transmitted.   
     
     
         8 . The microwave leakage detection device according to any one of  claims 5 to 7 , further comprising:
 a reflective member provided around the sensor and configured to guide microwaves to the sensor.