Temperature control apparatus and inspection apparatus

Abstract

A temperature control apparatus including a refrigeration cycle device including a compressor, a first heat exchanger, an expander, and a second heat exchanger, and causing a natural refrigerant to circulate; a first fluid passage including a first side downstream flow path part that receives and causes the first fluid to flow, the first fluid exchanging heat with the natural refrigerant passing through the first heat exchanger, the first fluid then flowing out from the first heat exchanger; a second fluid passage including a second side downstream flow path part that receives and causes the second fluid to flow, the second fluid exchanging heat with the natural refrigerant passing through the second heat exchanger, the second fluid then flowing out from the second heat exchanger; and a heat transfer member capable of receiving and causing the first and second fluids to flow.

1 . A temperature control apparatus comprising:
 a refrigeration cycle device including a compressor, a first heat exchanger, an expander, and a second heat exchanger, wherein a natural refrigerant flowing out from the compressor passes through the first heat exchanger, the expander, and the second heat exchanger in this order and then circulates to the compressor, and the compressor and the expander are connected by a common drive shaft;   a first fluid passage including a first side upstream flow path part that causes a first fluid to flow into the first heat exchanger and a first side downstream flow path part that receives and causes the first fluid to flow, the first fluid exchanging heat with the natural refrigerant passing through the first heat exchanger, the first fluid then flowing out from the first heat exchanger;   a second fluid passage including a second side upstream flow path part that causes a second fluid to flow into the second heat exchanger and a second side downstream flow path part that receives and causes the second fluid to flow, the second fluid exchanging heat with the natural refrigerant passing through the second heat exchanger, the second fluid then flowing out from the second heat exchanger; and   a heat transfer member capable of causing the first fluid to flow out to the first side upstream flow path part after receiving and causing the first fluid flowing out from the first side downstream flow path part to flow, the heat transfer member being capable of causing the second fluid to flow out to the second side upstream flow path part after receiving and causing the second fluid flowing out from the second side downstream flow path part to flow, wherein   a temperature of an object to be temperature-controlled is controlled through the heat transfer member.   
     
     
         2 . The temperature control apparatus according to  claim 1 , further comprising:
 a first bypass flow path connecting the first side downstream flow path part and the first side upstream flow path part;   a first valve mechanism that adjusts a ratio between a flow rate of the first fluid flowing from the first side downstream flow path part to the heat transfer member and a flow rate of the first fluid flowing through the first bypass flow path;   a second bypass flow path connecting the second side downstream flow path part and the second side upstream flow path part; and   a second valve mechanism that adjusts a ratio between a flow rate of the second fluid flowing from the second side downstream flow path part to the heat transfer member and a flow rate of the second fluid flowing through the second bypass flow path.   
     
     
         3 . The temperature control apparatus according to  claim 2 , wherein
 when the first fluid is caused to flow through the heat transfer member, the second valve mechanism blocks a flow of the second fluid in the heat transfer member and allows a flow of the second fluid in the second bypass flow path, and   when the second fluid is caused to flow through the heat transfer member, the first valve mechanism blocks a flow of the first fluid in the heat transfer member and allows a flow of the first fluid in the first bypass flow path.   
     
     
         4 . The temperature control apparatus according to  claim 1 , wherein in the heat transfer member, there is formed a plurality of first heat transfer flow path parts that causes the first fluid to flow out to the first side upstream flow path part after receiving and causing the first fluid flowing out from the first side downstream flow path part to flow, and wherein a plurality of the first heat transfer flow path parts is positioned in parallel so as to be branched from the first side downstream flow path part. 
     
     
         5 . The temperature control apparatus according to  claim 4 , wherein in the heat transfer member, there is formed a plurality of second heat transfer flow path parts that causes the second fluid to flow out to the second side upstream flow path part after receiving and causing the second fluid flowing out from the second side downstream flow path part to flow, and wherein a plurality of the second heat transfer flow path parts is positioned in parallel so as to be branched from the second side downstream flow path part. 
     
     
         6 . The temperature control apparatus according to  claim 5 , wherein
 each of the first heat transfer flow path parts includes a first side interface part having a meandering shape, a helical shape, a spiral shape, or a shape that enlarges a flow path area,   each of the second heat transfer flow path parts includes a second side interface part having a meandering shape, a helical shape, a spiral shape, or a shape that enlarges a flow path area,   the heat transfer member is provided with a plurality of temperature control parts, and   any of a plurality of the first side interface parts and any of a plurality of the second side interface parts are close to each other to form a temperature control source, and the temperature control part is provided on a surface of the heat transfer member on the temperature control source.   
     
     
         7 . An inspection apparatus comprising:
 a refrigeration cycle device including a compressor, a first heat exchanger, an expander, and a second heat exchanger, wherein a natural refrigerant flowing out from the compressor passes through the first heat exchanger, the expander, and the second heat exchanger in this order and then circulates to the compressor, and the compressor and the expander are connected by a common drive shaft;   a first fluid passage including a first side upstream flow path part that causes a first fluid to flow into the first heat exchanger and a first side downstream flow path part that receives and causes the first fluid to flow, the first fluid exchanging heat with the natural refrigerant passing through the first heat exchanger, the first fluid then flowing out from the first heat exchanger;   a second fluid passage including a second side upstream flow path part that causes a second fluid to flow into the second heat exchanger and a second side downstream flow path part that receives and causes the second fluid to flow, the second fluid exchanging heat with the natural refrigerant passing through the second heat exchanger, the second fluid then flowing out from the second heat exchanger; and   a heat transfer member capable of causing the first fluid to flow out to the first side upstream flow path part after receiving and causing the first fluid flowing out from the first side downstream flow path part to flow, the heat transfer member being capable of causing the second fluid to flow out to the second side upstream flow path part after receiving and causing the second fluid flowing out from the second side downstream flow path part to flow, wherein   a temperature of an object to be inspected that is held by a holding member or an object to be inspected that is held by the heat transfer member is controlled through the heat transfer member.