Solvent-based compositions and related methods for molybdenum etching

Abstract

Compositions and methods for solvent-based molybdenum etching are provided. A composition comprises a phosphorus oxoacid, an oxidant, and at least 50% by weight of a solvent based on a total weight of the composition. The solvent comprises a compound having at least one sulfur-oxygen double bond.

What is claimed is: 
     
         1 . A composition for etching molybdenum, the composition comprising:
 a phosphorus oxoacid;   an oxidant; and   at least 50% by weight of a solvent based on a total weight of the composition, wherein the solvent comprises a compound having at least one sulfur-oxygen double bond.   
     
     
         2 . The composition of  claim 1 , wherein the composition comprises 1% to 30% by weight of the phosphorus oxoacid based on the total weight of the composition. 
     
     
         3 . The composition of  claim 1 , wherein the composition comprises 0.1% to 20% by weight of the oxidant based on the total weight of the composition. 
     
     
         4 . The composition of  claim 1 , wherein the composition comprises 50% to 95% by weight of the solvent based on the total weight of the composition. 
     
     
         5 . The composition of  claim 1 , wherein the composition comprises less than 50% by weight of an acetic acid based on a total weight of the composition. 
     
     
         6 . The composition of  claim 1 , wherein the composition does not comprise an acetic acid. 
     
     
         7 . The composition of  claim 1 , wherein the composition further comprises:
 0.1% to 20% by weight of a stabilizer based on the total weight of the composition.   
     
     
         8 . The composition of  claim 7 , wherein the stabilizer comprises at least one of an organic acid, a nitrogen-containing heterocycle, an amine compound, or any combination thereof. 
     
     
         9 . The composition of  claim 7 , wherein the stabilizer comprises at least one of a citric acid, a benzotriazole, or any combination thereof. 
     
     
         10 . The composition of  claim 1 , wherein the composition further comprises:
 0.1% to 10% by weight of an inhibitor based on the total weight of the composition.   
     
     
         11 . The composition of  claim 10 , wherein the inhibitor comprises a quaternary ammonium compound. 
     
     
         12 . The composition of  claim 10 , wherein the inhibitor comprises at least one of a tetraalkyl ammonium hydroxide, a tributylmethylammonium hydroxide (TBMAH), a benzyltrimethylammonium hydroxide (BTMAH), a choline hydroxide, an ethyltrimethylammonium hydroxide, a tris(2-hydroxyethyl)methyl ammonium hydroxide, a diethyldimethylammonium hydroxide, or any combination thereof. 
     
     
         13 . The composition of  claim 1 , wherein the solvent comprises at least one of sulfolane, methanesulfonic acid (MSA), or any combination thereof. 
     
     
         14 . The composition of  claim 1 , wherein the composition, when tested according to ASTM D93-20: Standard Test Methods for Flash Point by Pensky-Martens Closed Cup Tester, has a flash point of at least 100° C. 
     
     
         15 . A composition comprising:
 a phosphorus oxoacid;   an oxidant; and   a solvent,
 wherein the solvent comprises a compound having at least one sulfur-oxygen double bond; 
 wherein the composition, when tested according to ASTM D93-20: Standard Test Methods for Flash Point by Pensky-Martens Closed Cup Tester, has a flash point of at least 100° C. 
   
     
     
         16 . The composition of  claim 15 , wherein the composition comprises 50% to 95% by weight of the solvent based on a total weight of the composition. 
     
     
         17 . The composition of  claim 15 , wherein the solvent comprises at least one of sulfolane, methanesulfonic acid (MSA), or any combination thereof. 
     
     
         18 . A method comprising:
 obtaining a structure,
 wherein the structure comprises:
 a plurality of recesses; and 
 a molybdenum material located in the plurality of recesses; and contacting the structure with a composition to remove at least a portion of the molybdenum material, 
 
 wherein the composition comprises:
 a phosphorus oxoacid; 
 an oxidant; and 
 at least 50% by weight of a solvent based on a total weight of the composition,
 wherein the solvent comprises a compound having at least one sulfur-oxygen double bond. 
 
 
   
     
     
         19 . The method of  claim 18 , wherein the composition comprises 50% to 95% by weight of the solvent based on the total weight of the composition. 
     
     
         20 . The method of  claim 18 , wherein the solvent comprises at least one of sulfolane, methanesulfonic acid (MSA), or any combination thereof.