Parylene capping layer for embedded liquid packaging

Abstract

A variety of applications can include parylene capping layer for embedded liquid packaging. A capping structure for liquid packaging can include a conformal parylene capping layer on and contacting a liquid in a recessed cavity of a substrate such that the parylene prevents the liquid from leaking out of the cavity, embedding the liquid in the cavity of the substrate. The selections of substrate, liquid, or type of parylene can be based on the application for which the liquid packaging is implemented.

What is claimed is: 
     
         1 . A method comprising:
 forming a cavity or recessed surface in a substrate;   filling the cavity or recessed surface with a liquid; and   conformally forming parylene on and contacting the liquid such that the parylene prevents the liquid from leaking out of the cavity or recessed surface, embedding the liquid in the cavity or recessed surface of the substrate.   
     
     
         2 . The method of  claim 1 , wherein the method includes conformally forming the parylene in a vacuum. 
     
     
         3 . The method of  claim 2 , wherein the vacuum has a pressure between 25 mTorr and 100 mTorr. 
     
     
         4 . The method of  claim 1 , wherein conformally forming parylene on and contacting the liquid includes conformally forming parylene on and contacting combination of the substrate and the liquid in the cavity or recessed surface of the substrate. 
     
     
         5 . The method of  claim 1 , wherein the liquid is static in the cavity or the recessed surface. 
     
     
         6 . The method of  claim 1 , wherein the liquid flows in the cavity or the recessed surface. 
     
     
         7 . The method of  claim 1 , wherein filling the cavity or the recessed surface includes only partially filing the cavity or the recessed surface. 
     
     
         8 . The method of  claim 1 , wherein the substrate is a silicon substrate. 
     
     
         9 . The method of  claim 1 , wherein the substrate is a biocompatible substrate. 
     
     
         10 . The method of  claim 9 , wherein the method includes forming the substrate as part of a device that is implantable in a human. 
     
     
         11 . The method of  claim 1 , wherein the liquid is a silicone oil, a liquid metal, a coolant liquid, or a biological liquid. 
     
     
         12 . The method of  claim 1 , wherein the liquid has a composition that does not alter under conditions for conformally forming the parylene on the liquid in the cavity. 
     
     
         13 . The method of  claim 1 , wherein forming the cavity or recessed surface in the substrate includes drilling the substrate, wet or dry etching the substrate, laser etching the substrate, or three-dimensional printing of the cavity or the recessed surface in the substrate. 
     
     
         14 . The method of  claim 1 , wherein the parylene is parylene-C. 
     
     
         15 . The method of  claim 1 , wherein the parylene is a high temperature parylene. 
     
     
         16 . An article of manufacture comprising:
 a substrate;   a liquid in a cavity or recessed surface of the substrate; and   a conformal parylene capping layer on and contacting the liquid such that the parylene prevents the liquid from leaking out of the cavity or recessed surface, embedding the liquid in the cavity or recessed surface of the substrate.   
     
     
         17 . The article of manufacture of  claim 16 , wherein the substrate is a biocompatible substrate. 
     
     
         18 . The article of manufacture of  claim 16 , wherein the liquid is a silicone oil, a liquid metal, a coolant, or a biological liquid. 
     
     
         19 . The article of manufacture of  claim 16 , wherein the conformal parylene is conformal encapsulating combination of the substrate and the liquid in the cavity or recessed surface of the substrate. 
     
     
         20 . The article of manufacture of  claim 16 , wherein the liquid is static in the cavity or recessed surface. 
     
     
         21 . The article of manufacture of  claim 16 , wherein the article of manufacture includes a channel to flow the liquid in the cavity or recessed surface. 
     
     
         22 . A method comprising:
 forming a cavity or recessed surface in a substrate by a material removal process, by a material additive process, or combination of material removal process and material additive process, the cavity or recessed surface having a top level;   filling the cavity or recessed surface with a liquid to a level below the top level, the liquid being a composition that maintains its structural format under processing conditions for capping the liquid in the cavity; and   capping the liquid in the substrate by conformally depositing parylene on and contacting the liquid such that the parylene prevents the liquid from leaking out of the cavity, embedding the liquid in the cavity of the substrate.