Conveying device

Abstract

A conveying device comprises a conveying section and at least a pair of conveyor units. The conveying section is configured to convey a strip-shaped substrate in a transport direction. The conveyor units are configured to assist transport of the substrate by the conveying section. The conveyor units each include a belt member with a suction portion to which a prescribed surface of the substrate in a vicinity of corresponding one of widthwise ends of the substrate is configured to be attracted by suction force, the belt member being configured to apply a directional force to the substrate in accordance with a traveling direction of the suction portion, and a traveling direction adjustment unit that is configured to adjust the traveling direction of the suction portion.

What is claimed is: 
     
         1 . A conveying device comprising: 
 a conveying section configured to convey a strip-shaped substrate in a transport direction;   and at least a pair of conveyor units configured to assist transport of the substrate by the conveying section, the conveyor units each including a belt member with a suction portion to which a prescribed surface of the substrate in a vicinity of corresponding one of widthwise ends of the substrate is configured to be attracted by suction force, the belt member being configured to apply a directional force to the substrate in accordance with a traveling direction of the suction portion, anda traveling direction adjustment unit that is configured to adjust the traveling direction of the suction portion.   
     
     
         2 . The conveying device according to  claim 1 , further comprising an end position detection unit configured to detect positions of the widthwise ends of the substrate, 
       the traveling direction adjustment unit being configured to adjust the traveling direction of the suction portion on the basis of detection result from the end position detection unit. 
     
     
         3 . The conveying device according to  claim 1 , wherein the traveling direction adjustment unit is configured to adjust the traveling direction of the suction portion to be directed further outward in a width direction of the substrate with respect to the transport direction. 
     
     
         4 . The conveying device according to  claim 1 , wherein the conveyor units each further include a speed adjustment unit that is configured to adjust relative speed of the suction portion relative to the substrate in accordance with an adjustment of the traveling direction of the suction portion by the traveling direction adjustment unit. 
     
     
         5 . The conveying device according to  claim 1 , further comprising a first moving mechanism that is configured to move the conveyor units back and forth along the transport direction. 
     
     
         6 . The conveying device according to  claim 1 , further comprising a second moving mechanism that is configured to move the conveyor units toward or away from the prescribed surface of the substrate. 
     
     
         7 . The conveying device according to  claim 1 , further comprising a sag amount detection unit that is configured to detect a height position of a widthwise central portion of the substrate, 
       the traveling direction adjustment unit being configured to adjust the traveling direction of the suction portion on the basis of detection result from the sag amount detection unit. 
     
     
         8 . The conveying device according to  claim 2 , wherein the traveling direction adjustment unit is configured to adjust the traveling direction of the suction portion to be directed further outward in a width direction of the substrate with respect to the transport direction. 
     
     
         9 . The conveying device according to  claim 2 , wherein the conveyor units each further include a speed adjustment unit that is configured to adjust relative speed of the suction portion relative to the substrate in accordance with an adjustment of the traveling direction of the suction portion by the traveling direction adjustment unit. 
     
     
         10 . The conveying device according to  claim 2 , further comprising a first moving mechanism that is configured to move the conveyor units back and forth along the transport direction. 
     
     
         11 . The conveying device according to  claim 2 , further comprising a second moving mechanism that is configured to move the conveyor units toward or 
       away from the prescribed surface of the substrate. 
     
     
         12 . The conveying device according to  claim 2 , further comprising a sag amount detection unit that is configured to detect a height position of a widthwise central portion of the substrate, 
       the traveling direction adjustment unit being configured to adjust the traveling direction of the suction portion on the basis of detection result from the sag amount detection unit.