Abrasive conditioner and a method of fabricating the same

Abstract

An abrasive conditioner includes a substrate having a plurality of protrusions on a side thereof, the protrusions being separated from one another by a plurality of depressions, and a plurality of abrasive particles respectively attached to the protrusions on a one-to-one correspondence basis via a bonding layer, wherein the bonding layer extends into the depressions. Embodiments disclosed herein also include a method of fabricating an abrasive conditioner.

What is claimed is: 
     
         1 . An abrasive conditioner comprising:
 a substrate having a plurality of protrusions on a side thereof, the protrusions being separated from one another by a plurality of depressions; and   a plurality of abrasive particles respectively attached to the protrusions on a one-to-one correspondence basis via a bonding layer, wherein the bonding layer extends into the depressions.   
     
     
         2 . The abrasive conditioner according to  claim 1 , wherein the bonding layer entirely covers the protrusions and the depressions. 
     
     
         3 . The abrasive conditioner according to  claim 1 , wherein the depressions include a first depression, and the protrusions include a first and a second protrusion adjacent to each other, the first protrusion being separated from the second protrusion by the first depression, the first protrusion and the second protrusion respectively having a first protrusion sidewall and a second protrusion sidewall that protrude from a bottom surface of the first depression, and the bonding layer covering the bottom surface of the first depression and the first and the second protrusion sidewalls. 
     
     
         4 . The abrasive conditioner according to  claim 3 , wherein the bonding layer continuously extend conformal to a profile of the bottom surface and the first and the second protrusion sidewalls inside the first depression. 
     
     
         5 . The abrasive conditioner according to  claim 3 , wherein the bonding layer is exposed between the first protrusion and the second protrusion, and a height from the bottom surface to a top of the first protrusion and a height from the bottom surface to a top of the second protrusion differing from a height of a bottom portion of the bonding layer that covers the bottom surface inside the first depression. 
     
     
         6 . The abrasive conditioner according to  claim 3 , wherein the first protrusion sidewall and the second protrusion sidewall are substantially perpendicular to the bottom surface. 
     
     
         7 . The abrasive conditioner according to  claim 1 , wherein the abrasive particles protrude outside the bonding layer on the protrusions of the substrate, and a portion of each of the abrasive particles buried inside the bonding layer has a thickness equal to or greater than about half of an average particle size of the abrasive particles. 
     
     
         8 . The abrasive conditioner according to  claim 1 , wherein the bonding layer is about 35 μm to about 200 μm in thickness. 
     
     
         9 . The abrasive conditioner according to  claim 1 , wherein:
 a particle size of the abrasive particles ranges from about 70 μm to about 400 μm; and   each of the protrusions has a protrusion height equal to about 0.5 to about 1.5 times a particle size of the abrasive particles, and/or a protrusion spacing between any adjacent ones of the protrusions is about 1.5 to about 20 times a particle size of the abrasive particles.   
     
     
         10 . The abrasive conditioner according to  claim 1 , wherein all of the abrasive particles have a particle size of about 70 μm, all of the abrasive particles have a particle size of about 100 μm, all of the abrasive particles have a particle size of about 170 μm, all of the abrasive particles have a particle size of about 200 μm, or all of the abrasive particles have a particle size of about 400 μm. 
     
     
         11 . The abrasive conditioner according to  claim 1 , wherein:
 the abrasive particles have a particle size of about 70 μm, and a protrusion spacing between any adjacent ones of the protrusions is between about 105 μm and about 1400 μm; or   the abrasive particles have a particle size of about 100 μm, and the protrusion spacing is between about 150 μm and about 2000 μm; or   the abrasive particles have a particle size of about 170 μm, and the protrusion spacing is between about 255 μm and about 3400 μm; or   the abrasive particles have a particle size of about 200 μm, and the protrusion spacing is between about 300 μm and about 4000 μm; or   the abrasive particles have a particle size of about 400 μm, and the protrusion spacing is between about 600 μm and about 8000 μm.   
     
     
         12 . The abrasive conditioner according to  claim 1 , wherein the protrusions are arranged in one annulus or multiple concentric annuluses, one or multiple arrays, one or multiple polygons, one or multiple rays around an axis, or one or multiple helices. 
     
     
         13 . A method of fabricating an abrasive conditioner, comprising:
 forming a plurality of protrusions and a plurality of depressions on a first side of a substrate, the protrusions being separated from one another by the depressions;   forming a bonding layer on the first side of the substrate, the bonding layer covering entirely the protrusions and the depressions;   positioning a plurality of abrasive particles on a one-to-one correspondence basis with respect to the protrusions; and   respectively attaching the abrasive particles to the protrusions on a top thereof via the bonding layer.   
     
     
         14 . The method according to  claim 13 , wherein the step of forming a plurality of protrusions and a plurality of depressions includes etching or laser cutting the substrate. 
     
     
         15 . The method according to  claim 13 , wherein the step of positioning a plurality of abrasive particles includes:
 providing a positioning plate including a plurality of concavities or a plurality of holes; and   respectively placing the abrasive particles in the concavities or the holes so that the abrasive particles are positioned on a one-to-one correspondence basis with respect to the protrusions.   
     
     
         16 . The method according to  claim 13 , wherein:
 the step of forming a plurality of protrusions and a plurality of depressions includes forming a first depression and a first and a second protrusion adjacent to each other, the first protrusion being separated from the second protrusion by the first depression, the first protrusion and the second protrusion respectively having a first protrusion sidewall and a second protrusion sidewall that protrude from a bottom surface of the first depression; and   the formed bonding layer continuously extends conformal to a profile of the bottom surface and the first and the second protrusion sidewalls inside the first depression.   
     
     
         17 . The method according to  claim 13 , wherein the abrasive particles protrude outside the bonding layer on the protrusions of the substrate, and a portion of each of the abrasive particles buried inside the bonding layer has a thickness equal to or greater than about half of an average particle size of the abrasive particles. 
     
     
         18 . The method according to  claim 13 , wherein the bonding layer is about 35 μm to about 200 μm in thickness. 
     
     
         19 . The method according to  claim 13 , wherein:
 a particle size of the abrasive particles ranges from about 70 μm to about 400 μm; and   each of the protrusions has a protrusion height equal to about 0.5 to about 1.5 times a particle size of the abrasive particles, and/or a protrusion spacing between any adjacent ones of the protrusions is about 1.5 to about 20 times a particle size of the abrasive particles.   
     
     
         20 . The method according to  claim 13 , wherein all of the abrasive particles have a particle size of about 70 μm, all of the abrasive particles have a particle size of about 100 μm, all of the abrasive particles have a particle size of about 170 μm, all of the abrasive particles have a particle size of about 200 μm, or all of the abrasive particles have a particle size of about 400 μm.