Susceptor for processing substrates

Abstract

A susceptor with ESC functionality is presented. To provide a heater with metal material for thermal control and ESC capabilities, the present disclosure's susceptor comprises a supporting part configured to support a substrate, a heating coil disposed in the supporting part, the heating coil configured to heat up the temperature of the support, a thermocouple (TC) disposed in the supporting part for monitoring temperature of the supporting part, a shaft disposed below the supporting part, an insulation part disposed in the shaft, a plurality of cooling channels disposed in the insulation part; and insulation layers disposed on the surface of the supporting part and the insulating part, wherein the supporting part is made of conducting metals.

1 . A susceptor for processing substrates, the susceptor comprises:
 a supporting part configured to support a substrate;   a heating coil disposed in the supporting part, the heating coil configured to heat up the temperature of the support;   a thermocouple (TC) disposed in the supporting part for monitoring temperature of the supporting part;   a shaft disposed below the supporting part;   an insulation part disposed in the shaft;   a plurality of cooling channels disposed in the insulation part; and   insulation layers disposed on the surface of the supporting part and the insulating part, wherein the supporting part is made of conducting metals.   
     
     
         2 . A susceptor according to  claim 1 , further comprising
 a heating power source connected to the heating coil and configured to supply power for the heating coil to heat up; and   a chucking power source connected to the supporting part and configured to supply power for providing electrostatic chucking (ESC) function to the supporting part.   
     
     
         3 . A susceptor according to  claim 1 , wherein
 the conducting metals comprises one of the Copper (Cu), Aluminum (Al), Iron (Fe), Zinc (Zn), Nickel (Ni), Tungsten (W) and Tin (Sn) or a mixture thereof.   
     
     
         4 . A susceptor according to  claim 1 , further comprising
 a TC tube disposed from the TC to a bottom of the insulation part and contains a TC line which electrically connects the TC and the sensor;   a heat tube disposed from the heating coil to the bottom of the insulating part and contains a heat line which electrically connects the heating coil and the heating power source;   a chuck tube disposed from the supporting part to the bottom of the insulating part and contains a heat line which electrically connects the supporting part and the chucking power source; and   a pair of cooling tubes for supplying and exiting coolant to the cooling channels respectively.   
     
     
         5 . A susceptor according to  claim 2 , the heating power source further comprising:
 an alternating current (AC) transformer for generating power; and   a thyristor connected to the AC transformer at one side and to the heating coil.   
     
     
         6 . A susceptor according to  claim 2 , the chucking power source further comprising:
 a power generator; and   a resistor configured to cut out radio frequency (RF) element,   wherein the power generator is connected to an earth, and   the power generator and the resistor are connected in series.   
     
     
         7 . A susceptor according to  claim 6 , wherein a capacitor is connected in parallel to the power generator and the resistor and the capacitor is connected to another earth. 
     
     
         8 . A susceptor according to  claim 4 , wherein the TC tube, the heat tube, the chuck tube and the cooling tubes are coated with insulating materials. 
     
     
         9 . A susceptor for processing substrates, the susceptor comprises:
 a supporting part configured to support a substrate;   a heating coil disposed in the supporting part, the heating coil configured to heat up the temperature of the support;   a thermocouple (TC) disposed in the supporting part for monitoring temperature of the supporting part;   a plurality of cooling channels disposed in the supporting part;   a shaft disposed below the supporting part;   an insulation part disposed below the shaft;   an adaptor disposed below the insulation part; and   insulation layers disposed on the surface of the supporting part, the insulating part, and the adaptor, wherein the supporting part is made of conducting metals.   
     
     
         10 . A susceptor according to  claim 9 , further comprising
 a heating power source connected to the heating coil and configured to supply power for the heating coil to heat up; and   a chucking power source connected to the supporting part and configured to supply power for providing electrostatic chucking (ESC) function to the supporting part.   
     
     
         11 . A susceptor according to  claim 9 , wherein
 the conducting metals comprises one of the Copper (Cu), Aluminum (Al), Iron (Fe), Zinc (Zn), Nickel (Ni), Tungsten (W) and Tin (Sn) or a mixture thereof.   
     
     
         12 . A susceptor according to  claim 9 , further comprising
 a TC tube disposed from the TC to a bottom of the insulation part and contains a TC line which electrically connects the TC and the sensor;   a heat tube disposed from the heating coil to the bottom of the insulating part and contains a heat line which electrically connects the heating coil and the heating power source;   a chuck tube disposed from the supporting part to the bottom of the insulating part and contains a heat line which electrically connects the supporting part and the chucking power source; and   a pair of cooling tubes for supplying and exiting coolant to the cooling channels respectively.   
     
     
         13 . A susceptor according to  claim 10 , the heating power source further comprising:
 an alternating current (AC) transformer for generating power; and   a thyristor connected to the AC transformer at one side and to the heating coil.   
     
     
         14 . A susceptor according to  claim 10 , the chucking power source further comprising:
 a power generator; and   a resistor configured to cut out radio frequency (RF) element,   wherein the power generator is connected to an earth, and   the power generator and the resistor are connected in series.   
     
     
         15 . A susceptor according to  claim 14 , wherein a capacitor is connected in parallel to the power generator and the resistor and the capacitor is connected to another earth. 
     
     
         16 . A susceptor according to  claim 12 , wherein the TC tube, the heat tube, the chuck tube and the cooling tubes are coated with insulating materials.